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Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
Grant 10,910,219 - Tanaka , et al. February 2, 2 | 2021-02-02 |
Laser Irradiation Method And Laser Irradiation Device And Method Of Manufacturing Semiconductor Device
App 20190348286 - TANAKA; Koichiro ; et al. | 2019-11-14 |
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
Grant 10,366,885 - Tanaka , et al. July 30, 2 | 2019-07-30 |
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
Grant 9,748,099 - Tanaka , et al. August 29, 2 | 2017-08-29 |
Laser Irradiation Method And Laser Irradiation Device And Method Of Manufacturing Semiconductor Device
App 20170062214 - TANAKA; Koichiro ; et al. | 2017-03-02 |
Semiconductor Device And Method Of Manufacturing The Same
App 20170025546 - KOKUBO; Chiho ; et al. | 2017-01-26 |
Laser Irradiation Method And Laser Irradiation Device And Method Of Manufacturing Semiconductor Device
App 20140113440 - TANAKA; Koichiro ; et al. | 2014-04-24 |
Laser irradiation apparatus
Grant 8,696,808 - Yamazaki , et al. April 15, 2 | 2014-04-15 |
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
Grant 8,686,315 - Tanaka , et al. April 1, 2 | 2014-04-01 |
Method for manufacturing SOI substrate
Grant 8,198,173 - Ohnuma , et al. June 12, 2 | 2012-06-12 |
Semiconductor Device And Method Of Manufacturing The Same
App 20120097963 - KOKUBO; Chiho ; et al. | 2012-04-26 |
Semiconductor device having multichannel transistor
Grant 8,093,593 - Kokubo , et al. January 10, 2 | 2012-01-10 |
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment
Grant 8,044,372 - Yamazaki , et al. October 25, 2 | 2011-10-25 |
Laser irradiation method and method of manufacturing semiconductor device
Grant 7,943,885 - Tanaka , et al. May 17, 2 | 2011-05-17 |
Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment
Grant 7,892,952 - Yamazaki , et al. February 22, 2 | 2011-02-22 |
Method For Manufacturing Soi Substrate
App 20110039395 - OHNUMA; Hideto ; et al. | 2011-02-17 |
Method for manufacturing SOI substrate
Grant 7,829,432 - Ohnuma , et al. November 9, 2 | 2010-11-09 |
Laser beam irradiation method and method of manufacturing a thin firm transistor
Grant 7,736,917 - Shimomura , et al. June 15, 2 | 2010-06-15 |
Manufacturing method of semiconductor device
Grant 7,670,935 - Yamazaki , et al. March 2, 2 | 2010-03-02 |
Method For Manufacturing Soi Substrate
App 20090325363 - OHNUMA; Hideto ; et al. | 2009-12-31 |
Method for manufacturing semiconductor device
Grant 7,635,883 - Azami , et al. December 22, 2 | 2009-12-22 |
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment
Grant 7,589,032 - Yamazaki , et al. September 15, 2 | 2009-09-15 |
Manufacturing method for a thin film transistor that uses a pulse oscillation laser crystallize an amorphous semiconductor film
Grant 7,510,920 - Yamazaki , et al. March 31, 2 | 2009-03-31 |
Semiconductor fabricating apparatus
Grant 7,439,115 - Yamazaki , et al. October 21, 2 | 2008-10-21 |
Method of fabricating a semiconductor device utilizing crystallization of semiconductor region with laser beam
Grant 7,319,055 - Kokubo , et al. January 15, 2 | 2008-01-15 |
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment
App 20070246664 - Yamazaki; Shunpei ; et al. | 2007-10-25 |
Manufacturing method of semiconductor device
Grant 7,279,372 - Yamazaki , et al. October 9, 2 | 2007-10-09 |
Laser beam irradiation method and method of manufacturing a thin firm transistor
App 20070141733 - Shimomura; Akihisa ; et al. | 2007-06-21 |
Method of manufacturing a semiconductor device and semiconductor manufacturing apparatus
Grant 7,217,952 - Nakajima , et al. May 15, 2 | 2007-05-15 |
Laser beam irradiation method that includes determining a thickness of semiconductor prior to crystallizing
Grant 7,176,042 - Shimomura , et al. February 13, 2 | 2007-02-13 |
Semiconductor device and method of manufacturing the same
App 20070001228 - Kokubo; Chiho ; et al. | 2007-01-04 |
Method for manufacturing semiconductor device
App 20070004104 - Azami; Munehiro ; et al. | 2007-01-04 |
Laser irradiation apparatus
App 20070000428 - Yamazaki; Shunpei ; et al. | 2007-01-04 |
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
Grant 7,138,306 - Tanaka , et al. November 21, 2 | 2006-11-21 |
Irradiation method of laser beam
Grant 7,135,389 - Yamazaki , et al. November 14, 2 | 2006-11-14 |
Method for manufacturing semiconductor device
Grant 7,129,121 - Azami , et al. October 31, 2 | 2006-10-31 |
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
App 20060215721 - Tanaka; Koichiro ; et al. | 2006-09-28 |
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
App 20060215722 - Tanaka; Koichiro ; et al. | 2006-09-28 |
Semiconductor device and method of manufacturing the same
Grant 7,109,069 - Kokubo , et al. September 19, 2 | 2006-09-19 |
Laser irradiation apparatus
Grant 7,105,048 - Yamazaki , et al. September 12, 2 | 2006-09-12 |
Method of manufacturing a semiconductor device by irradiating with a laser beam
Grant 7,087,504 - Nakajima , et al. August 8, 2 | 2006-08-08 |
Semiconductor fabricating apparatus
App 20060155413 - Yamazaki; Shunpei ; et al. | 2006-07-13 |
Manufacturing method of semiconductor device
App 20060134886 - Yamazaki; Shunpei ; et al. | 2006-06-22 |
Semiconductror fabricating apparatus
Grant 7,050,878 - Yamazaki , et al. May 23, 2 | 2006-05-23 |
Method of manufacturing semiconductor device using a laser irradiation process
Grant 7,037,809 - Yamazaki , et al. May 2, 2 | 2006-05-02 |
Manufacturing method for a semiconductor device
App 20060079041 - Yamazaki; Shunpei ; et al. | 2006-04-13 |
Semiconductor film, semiconductor device, and method of manufacturing the same including adding metallic element to the amorphous semiconductor film and introducing oxygen after crystallization
Grant 7,015,079 - Miyairi , et al. March 21, 2 | 2006-03-21 |
Method of manufacturing a semiconductor device and semiconductor manufacturing apparatus
App 20060009015 - Nakajima; Setsuo ; et al. | 2006-01-12 |
Manufacturing method for a semiconductor device using a marker on an amorphous semiconductor film to selectively crystallize a region with a laser light
Grant 6,979,605 - Yamazaki , et al. December 27, 2 | 2005-12-27 |
Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment
App 20050277028 - Yamazaki, Shunpei ; et al. | 2005-12-15 |
Method of manufacturing a semiconductor device
Grant 6,962,860 - Yamazaki , et al. November 8, 2 | 2005-11-08 |
Method for manufacturing semiconductor device
App 20050245007 - Azami, Munehiro ; et al. | 2005-11-03 |
Method for manufacturing semiconductor device
Grant 6,911,358 - Azami , et al. June 28, 2 | 2005-06-28 |
Semiconductor device and manufacturing method thereof
App 20050040412 - Kokubo, Chiho ; et al. | 2005-02-24 |
Laser apparatus, laser irradiation method, manufacturing method for a semiconductor device, semiconductor device and electronic equipment
Grant 6,844,523 - Yamazaki , et al. January 18, 2 | 2005-01-18 |
Manufacturing method of semiconductor device
App 20050009251 - Yamazaki, Shunpei ; et al. | 2005-01-13 |
Laser beam irradiation method and method of manufacturing a thin film transistor
App 20040248347 - Shimomura, Akihisa ; et al. | 2004-12-09 |
Semiconductor device and manufacturing method therefor
Grant 6,797,550 - Kokubo , et al. September 28, 2 | 2004-09-28 |
Irregular semiconductor film, having ridges of convex portion
Grant 6,777,713 - Miyairi , et al. August 17, 2 | 2004-08-17 |
Semiconductor film, semiconductor device, and method of manufacturing the same
App 20040157413 - Miyairi, Hidekazu ; et al. | 2004-08-12 |
Laser beam irradiation method
Grant 6,767,799 - Shimomura , et al. July 27, 2 | 2004-07-27 |
Manufacturing method of semiconductor device
Grant 6,764,886 - Yamazaki , et al. July 20, 2 | 2004-07-20 |
Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment
App 20040132266 - Yamazaki, Shunpei ; et al. | 2004-07-08 |
Method for manufacturing semiconductor device
App 20040072411 - Azami, Munehiro ; et al. | 2004-04-15 |
Laser Apparatus, Laser Irradiation Method, Manufacturing Method For Semiconductor Device, Semiconductor Device, Production System For Semiconductor Device Using The Laser Apparatus, And Electronic Equipment
Grant 6,700,096 - Yamazaki , et al. March 2, 2 | 2004-03-02 |
Semiconductor device and method of manufacturing the same
App 20030234395 - Kokubo, Chiho ; et al. | 2003-12-25 |
Manufacturing method for a semiconductor device
App 20030235971 - Yamazaki, Shunpei ; et al. | 2003-12-25 |
Semiconductor device and manufacturing method therefor
App 20030224550 - Kokubo, Chiho ; et al. | 2003-12-04 |
Manufacturing method of semiconductor device
App 20030215973 - Yamazaki, Shunpei ; et al. | 2003-11-20 |
Irradiation method of laser beam
App 20030211714 - Yamazaki, Shunpei ; et al. | 2003-11-13 |
Semiconductor device and method of manufacturing the semiconductor device
App 20030178682 - Noda, Takeshi ; et al. | 2003-09-25 |
Laser beam irradiation method and method of manufacturing a thin film transistor
App 20030180992 - Shimomura, Akihisa ; et al. | 2003-09-25 |
Semiconductor fabricating apparatus
App 20030171837 - Yamazaki, Shunpei ; et al. | 2003-09-11 |
Laser irradiation apparatus
App 20030153182 - Yamazaki, Shunpei ; et al. | 2003-08-14 |
Laser apparatus, laser irradiating method, manufacturing method of semiconductor device, semiconductor device, manufacturing system of semiconductor device using the laser apparatus, and electronic device
App 20030148594 - Yamazaki, Shunpei ; et al. | 2003-08-07 |
Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment
App 20030136772 - Yamazaki, Shunpei ; et al. | 2003-07-24 |
Semiconductor film, semiconductor device, and method of manufacturing the same
App 20030089909 - Miyairi, Hidekazu ; et al. | 2003-05-15 |
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment
App 20030089690 - Yamazaki, Shunpei ; et al. | 2003-05-15 |
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
App 20030086182 - Tanaka, Koichiro ; et al. | 2003-05-08 |
Laser apparatus, laser irradiation method, manufacturing method for a semiconductor device, semiconductor device and electronic equipment
App 20030080100 - Yamazaki, Shunpei ; et al. | 2003-05-01 |
Method of manufacturing a semiconductor device and semiconductor manufacturing apparatus
App 20020173085 - Nakajima, Setsuo ; et al. | 2002-11-21 |
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