Shichida; Hiroyuki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shichida; Hiroyuki.The latest application filed is for "method of holding substrate and substrate holding system".
- Shichida; Hiroyuki - Kudamatsu JP
- Shichida, Hiroyuki - Kudamatsu-shi JP
| Patent | Date |
|---|---|
| Electrode cover for a plasma processing apparatus Grant D557,226 - Uchino , et al. December 11, 2 | 2007-12-11 |
| Method of holding substrate and substrate holding system Grant 6,899,789 - Tamura , et al. May 31, 2 | 2005-05-31 |
| Method of holding substrate and substrate holding system Grant 6,676,805 - Tamura , et al. January 13, 2 | 2004-01-13 |
| Method of holding substrate and substrate holding system Grant 6,645,871 - Tamura , et al. November 11, 2 | 2003-11-11 |
| Method of holding substrate and substrate holding system App 20030192647 - Tamura, Naoyuki ; et al. | 2003-10-16 |
| Method of holding substrate and substrate holding system Grant 6,610,170 - Tamura , et al. August 26, 2 | 2003-08-26 |
| Method of holding substrate and substrate holding system Grant 6,610,171 - Tamura , et al. August 26, 2 | 2003-08-26 |
| Method of holding substrate and substrate holding system Grant 6,524,428 - Tamura , et al. February 25, 2 | 2003-02-25 |
| Method of holding substrate and substrate holding system App 20020108574 - Tamura, Naoyuki ; et al. | 2002-08-15 |
| Method of holding substrate and substrate holding system App 20020104618 - Tamura, Naoyuki ; et al. | 2002-08-08 |
| Method of holding substrate and substrate holding system App 20020096116 - Tamura, Naoyuki ; et al. | 2002-07-25 |
| Method of holding substrate and substrate holding system App 20020046706 - Tamura, Naoyuki ; et al. | 2002-04-25 |
| Method of holding substrate and substrate holding system App 20010025608 - Tamura, Naoyuki ; et al. | 2001-10-04 |
| Method of holding substrate and substrate holding system App 20010009178 - Tamura, Naoyuki ; et al. | 2001-07-26 |
| Substrate holding system including an electrostatic chuck Grant 6,048,434 - Tamura , et al. April 11, 2 | 2000-04-11 |
| Method of holding substrate and substrate holding system Grant 5,906,684 - Tamura , et al. May 25, 1 | 1999-05-25 |
| Method of holding substrate and substrate holding system Grant 5,792,304 - Tamura , et al. August 11, 1 | 1998-08-11 |
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