loadpatents
Patent applications and USPTO patent grants for Shichi; Hiroyasu.The latest application filed is for "ion milling apparatus".
Patent | Date |
---|---|
Ion milling apparatus Grant 11,257,654 - Asai , et al. February 22, 2 | 2022-02-22 |
Ion milling device, ion source, and ion milling method Grant 11,158,481 - Asai , et al. October 26, 2 | 2021-10-26 |
Ion Milling Apparatus App 20210287871 - ASAI; Kengo ;   et al. | 2021-09-16 |
Field ionization source, ion beam apparatus, and beam irradiation method Grant 10,971,329 - Matsubara , et al. April 6, 2 | 2021-04-06 |
Ion beam device and cleaning method for gas field ion source Grant 10,840,070 - Kawanami , et al. November 17, 2 | 2020-11-17 |
Ion Beam Device And Cleaning Method For Gas Field Ion Source App 20200294776 - KAWANAMI; Yoshimi ;   et al. | 2020-09-17 |
Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus Grant 10,662,059 - Watanabe , et al. | 2020-05-26 |
Ion beam apparatus Grant 10,651,006 - Matsubara , et al. | 2020-05-12 |
Ion beam device Grant 10,636,623 - Shichi , et al. | 2020-04-28 |
Microstructure manufacturing method and ION beam apparatus Grant 10,549,989 - Shichi , et al. Fe | 2020-02-04 |
Microstructure manufacturing method and microstructure manufacturing apparatus Grant 10,546,721 - Watanabe , et al. Ja | 2020-01-28 |
Ion Beam Device App 20190295802 - SHICHI; Hiroyasu ;   et al. | 2019-09-26 |
ION MILLING DEVICE, lON SOURCE, AND ION MILLING METHOD App 20190237291 - ASAI; Kengo ;   et al. | 2019-08-01 |
Ion beam device Grant 10,366,858 - Shichi , et al. July 30, 2 | 2019-07-30 |
Ion milling system Grant 10,361,065 - Asai , et al. | 2019-07-23 |
Ion beam device and sample observation method Grant 10,340,117 - Matsubara , et al. | 2019-07-02 |
Ion milling device and ion milling method Grant 10,332,722 - Asai , et al. | 2019-06-25 |
Ion milling device, ion source and ion milling method Grant 10,304,653 - Asai , et al. | 2019-05-28 |
Mirror ion microscope and ion beam control method Grant 10,304,657 - Shichi , et al. | 2019-05-28 |
Control method and control program for focused ion beam device Grant 10,276,341 - Watanabe , et al. | 2019-04-30 |
Micro-electro-mechanical-systems Processing Method, And Micro-electro-mechanical-systems Processing Apparatus App 20190062157 - WATANABE; Keiji ;   et al. | 2019-02-28 |
Ion beam apparatus and ion beam irradiation method Grant 10,211,022 - Matsubara , et al. Feb | 2019-02-19 |
Field Ionization Source, Ion Beam Apparatus, And Beam Irradiation Method App 20190051491 - MATSUBARA; Shinichi ;   et al. | 2019-02-14 |
Ion beam system Grant 10,163,602 - Shichi , et al. Dec | 2018-12-25 |
Ion Beam Apparatus App 20180308658 - MATSUBARA; Shinichi ;   et al. | 2018-10-25 |
Ion Milling System App 20180286633 - ASAI; Kengo ;   et al. | 2018-10-04 |
Microstructure Manufacturing Method and Microstructure Manufacturing Apparatus App 20180261427 - WATANABE; Keiji ;   et al. | 2018-09-13 |
Control Method and Control Program for Focused Ion Beam Device App 20180261423 - WATANABE; Keiji ;   et al. | 2018-09-13 |
Microstructure manufacturing method and ION beam apparatus App 20180244517 - Shichi; Hiroyasu ;   et al. | 2018-08-30 |
Mirror Ion Microscope and Ion Beam Control Method App 20180025888 - SHICHI; Hiroyasu ;   et al. | 2018-01-25 |
Ion Beam System App 20180012726 - SHICHI; Hiroyasu ;   et al. | 2018-01-11 |
Ion Beam Device App 20170352517 - SHICHI; Hiroyasu ;   et al. | 2017-12-07 |
Ion beam device and emitter tip adjustment method Grant 9,761,407 - Muto , et al. September 12, 2 | 2017-09-12 |
Ion Beam Apparatus And Ion Beam Irradiation Method App 20170229277 - MATSUBARA; Shinichi ;   et al. | 2017-08-10 |
Ion Beam Device And Sample Observation Method App 20170229284 - MATSUBARA; Shinichi ;   et al. | 2017-08-10 |
Ion Milling Device And Ion Milling Method App 20170221677 - ASAI; Kengo ;   et al. | 2017-08-03 |
Ion Milling Device, Ion Source And Ion Milling Method App 20170221671 - ASAI; Kengo ;   et al. | 2017-08-03 |
Ion source and ion beam device using same Grant 9,640,360 - Shichi , et al. May 2, 2 | 2017-05-02 |
Ion Beam Device App 20170076902 - SHICHI; Hiroyasu ;   et al. | 2017-03-16 |
Ion beam device Grant 9,508,521 - Shichi , et al. November 29, 2 | 2016-11-29 |
Ion Beam Device and Emitter Tip Adjustment Method App 20160225575 - MUTO; Hiroyuki ;   et al. | 2016-08-04 |
Charged particle microscope Grant 9,111,716 - Matsubara , et al. August 18, 2 | 2015-08-18 |
Charged Particle Microscope App 20150083930 - Matsubara; Shinichi ;   et al. | 2015-03-26 |
Ion Beam Device App 20140319370 - SHICHI; Hiroyasu ;   et al. | 2014-10-30 |
Ion Source And Ion Beam Device Using Same App 20140299768 - Shichi; Hiroyasu ;   et al. | 2014-10-09 |
Gas field ion source and method for using same, ion beam device, and emitter tip and method for manufacturing same Grant 8,847,173 - Kawanami , et al. September 30, 2 | 2014-09-30 |
Method and apparatus for specimen fabrication Grant 8,796,651 - Shichi , et al. August 5, 2 | 2014-08-05 |
Ion beam device Grant 8,779,380 - Shichi , et al. July 15, 2 | 2014-07-15 |
Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample Grant 8,779,400 - Shichi , et al. July 15, 2 | 2014-07-15 |
Method and apparatus for processing a micro sample Grant 8,618,520 - Tokuda , et al. December 31, 2 | 2013-12-31 |
Method and apparatus for processing a micro sample Grant 08618520 - | 2013-12-31 |
Ion Beam Processing Apparatus App 20130320209 - SHICHI; Hiroyasu ;   et al. | 2013-12-05 |
Ion Source, Ion Beam Processing/observation Apparatus, Charged Particle Beam Apparatus, And Method For Observing Cross Section Of Sample App 20130284593 - SHICHI; Hiroyasu ;   et al. | 2013-10-31 |
Ion beam device Grant 8,563,944 - Shichi , et al. October 22, 2 | 2013-10-22 |
Gas field ion source, charged particle microscope, and apparatus Grant 8,530,865 - Shichi , et al. September 10, 2 | 2013-09-10 |
Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample Grant 8,481,980 - Shichi , et al. July 9, 2 | 2013-07-09 |
Ion microscope Grant 8,455,841 - Saho , et al. June 4, 2 | 2013-06-04 |
Charged Particle Microscope and Ion Microscope App 20130126731 - Shichi; Hiroyasu ;   et al. | 2013-05-23 |
Gas Field Ion Source And Method For Using Same, Ion Beam Device, And Emitter Tip And Method For Manufacturing Same App 20130119252 - Kawanami; Yoshimi ;   et al. | 2013-05-16 |
Dual beam apparatus with tilting sample stage Grant 8,431,891 - Shichi , et al. April 30, 2 | 2013-04-30 |
Gas Field Ionization Ion Source, Scanning Charged Particle Microscope, Optical Axis Adjustment Method And Specimen Observation Method App 20130087704 - ISHITANI; Tohru ;   et al. | 2013-04-11 |
Ion Beam Device App 20120319003 - SHICHI; Hiroyasu ;   et al. | 2012-12-20 |
Method And Apparatus For Processing A Microsample App 20120273692 - TOKUDA; Mitsuo ;   et al. | 2012-11-01 |
Ion beam device Grant 8,263,943 - Shichi , et al. September 11, 2 | 2012-09-11 |
Charged Particle Microscope App 20120217391 - Shichi; Hiroyasu ;   et al. | 2012-08-30 |
Method and apparatus for processing a microsample Grant 8,222,618 - Tokuda , et al. July 17, 2 | 2012-07-17 |
Gas Field Ion Source, Charged Particle Microscope, And Apparatus App 20120119086 - Shichi; Hiroyasu ;   et al. | 2012-05-17 |
Ion Microscope App 20120097863 - Saho; Norihide ;   et al. | 2012-04-26 |
Gas field ion source, charged particle microscope, and apparatus Grant 8,115,184 - Shichi , et al. February 14, 2 | 2012-02-14 |
Ion Beam Device App 20110266465 - Shichi; Hiroyasu ;   et al. | 2011-11-03 |
ION Beam System and Machining Method App 20110204225 - Shichi; Hiroyasu ;   et al. | 2011-08-25 |
Apparatus and method for specimen fabrication Grant 7,989,782 - Tomimatsu , et al. August 2, 2 | 2011-08-02 |
Method And Apparatus For Processing A Microsample App 20110174974 - TOKUDA; Mitsuo ;   et al. | 2011-07-21 |
Ion Beam Device App 20110147609 - Shichi; Hiroyasu ;   et al. | 2011-06-23 |
Ion beam system and machining method Grant 7,952,083 - Shichi , et al. May 31, 2 | 2011-05-31 |
Method and apparatus for specimen fabrication App 20110114476 - Shichi; Hiroyasu ;   et al. | 2011-05-19 |
Method and apparatus for specimen fabrication Grant 7,897,936 - Shichi , et al. March 1, 2 | 2011-03-01 |
Method and apparatus for processing a micro sample Grant 7,888,639 - Tokuda , et al. February 15, 2 | 2011-02-15 |
Ion Beam Processing Apparatus App 20100176297 - Shichi; Hiroyasu ;   et al. | 2010-07-15 |
Method for failure analysis and system for failure analysis Grant 7,725,278 - Tomimatsu , et al. May 25, 2 | 2010-05-25 |
Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electronic device Grant 7,709,062 - Shichi , et al. May 4, 2 | 2010-05-04 |
Ion beam processing apparatus Grant 7,700,931 - Shichi , et al. April 20, 2 | 2010-04-20 |
Apparatus for ion beam fabrication Grant 7,696,496 - Tomimatsu , et al. April 13, 2 | 2010-04-13 |
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor Grant 7,667,212 - Fukuda , et al. February 23, 2 | 2010-02-23 |
Ion Source, Ion Beam Processing/observation Apparatus, Charged Particle Beam Apparatus, And Method For Observing Cross Section Of Sample App 20090230299 - Shichi; Hiroyasu ;   et al. | 2009-09-17 |
Gas field ion source, charged particle microscope, and apparatus App 20090173888 - SHICHI; Hiroyasu ;   et al. | 2009-07-09 |
Method and apparatus for processing a micro sample Grant 7,550,750 - Tokuda , et al. June 23, 2 | 2009-06-23 |
Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method App 20090152462 - Ishitani; Tohru ;   et al. | 2009-06-18 |
Apparatus And Method For Specimen Fabrication App 20090121158 - Tomimatsu; Satoshi ;   et al. | 2009-05-14 |
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor App 20090071605 - Fukuda; Muneyuki ;   et al. | 2009-03-19 |
Apparatus and method for specimen fabrication Grant 7,482,603 - Tomimatsu , et al. January 27, 2 | 2009-01-27 |
Method and apparatus for processing a micro sample Grant 7,470,918 - Tokuda , et al. December 30, 2 | 2008-12-30 |
Method and apparatus for processing a micro sample Grant 7,465,945 - Tokuda , et al. December 16, 2 | 2008-12-16 |
Apparatus for ion beam fabrication App 20080283778 - Tomimatsu; Satoshi ;   et al. | 2008-11-20 |
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor Grant 7,453,072 - Fukuda , et al. November 18, 2 | 2008-11-18 |
Method and apparatus for specimen fabrication App 20080191151 - Shichi; Hiroyasu ;   et al. | 2008-08-14 |
Ion Beam System And Machining method App 20080135779 - SHICHI; Hiroyasu ;   et al. | 2008-06-12 |
Method of preventing charging, and apparatus for charged particle beam using the same Grant 7,372,050 - Fukuda , et al. May 13, 2 | 2008-05-13 |
Method, apparatus and system for specimen fabrication by using an ion beam Grant 7,368,729 - Shichi , et al. May 6, 2 | 2008-05-06 |
Ion Beam Processing Apparatus App 20080073582 - Shichi; Hiroyasu ;   et al. | 2008-03-27 |
Method and apparatus for processing a micro sample App 20080067385 - Tokuda; Mitsuo ;   et al. | 2008-03-20 |
Ion beam system and machining method Grant 7,326,942 - Shichi , et al. February 5, 2 | 2008-02-05 |
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor App 20070252092 - Fukuda; Muneyuki ;   et al. | 2007-11-01 |
Method and apparatus for specimen fabrication Grant 7,268,356 - Shichi , et al. September 11, 2 | 2007-09-11 |
Method and apparatus for processing a micro sample App 20070181831 - Tokuda; Mitsuo ;   et al. | 2007-08-09 |
Method and apparatus for processing a micro sample App 20070158564 - Tokuda; Mitsuo ;   et al. | 2007-07-12 |
Method and apparatus for processing a micro sample App 20070158591 - Tokuda; Mitsuo ;   et al. | 2007-07-12 |
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor Grant 7,242,013 - Fukuda , et al. July 10, 2 | 2007-07-10 |
Method for failure analysis and system for failure analysis App 20070112533 - Tomimatsu; Satoshi ;   et al. | 2007-05-17 |
Method and apparatus for processing a micro sample Grant 7,205,560 - Tokuda , et al. April 17, 2 | 2007-04-17 |
Method and apparatus for processing a micro sample Grant 7,205,554 - Tokuda , et al. April 17, 2 | 2007-04-17 |
Method for failure analysis and system for failure analysis Grant 7,200,506 - Tomimatsu , et al. April 3, 2 | 2007-04-03 |
Ion beam apparatus and analysis method App 20060284115 - Kaneoka; Noriyuki ;   et al. | 2006-12-21 |
Apparatus and method for specimen fabrication App 20060284112 - Tomimatsu; Satoshi ;   et al. | 2006-12-21 |
Method, apparatus and system for specimen fabrication by using an ion beam App 20060249697 - Shichi; Hiroyasu ;   et al. | 2006-11-09 |
Method, apparatus and system for specimen fabrication by using an ion beam Grant 7,095,021 - Shichi , et al. August 22, 2 | 2006-08-22 |
Ion beam system and machining method App 20060065854 - Shichi; Hiroyasu ;   et al. | 2006-03-30 |
Method of preventing charging, and apparatus for charged particle beam using the same App 20060060794 - Fukuda; Muneyuki ;   et al. | 2006-03-23 |
Method of prevention charging, and apparatus for charged particle beam using the same Grant 6,977,376 - Fukuda , et al. December 20, 2 | 2005-12-20 |
Method and apparatus for processing a micro sample App 20050211927 - Tokuda, Mitsuo ;   et al. | 2005-09-29 |
Method and apparatus for processing a micro sample App 20050199828 - Tokuda, Mitsuo ;   et al. | 2005-09-15 |
Method and apparatus for processing a micro sample Grant 6,927,391 - Tokuda , et al. August 9, 2 | 2005-08-09 |
Microfabrication apparatus and microfabrication method Grant 6,894,287 - Fukuda , et al. May 17, 2 | 2005-05-17 |
Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor App 20050066899 - Fukuda, Muneyuki ;   et al. | 2005-03-31 |
Apparatus for specimen fabrication and method for specimen fabrication Grant 6,858,851 - Tomimatsu , et al. February 22, 2 | 2005-02-22 |
Method and apparatus for specimen fabrication App 20050006600 - Shichi, Hiroyasu ;   et al. | 2005-01-13 |
Method and apparatus for processing a micro sample App 20050001164 - Tokuda, Mitsuo ;   et al. | 2005-01-06 |
Method, apparatus and system for specimen fabrication by using an ion beam App 20040256555 - Shichi, Hiroyasu ;   et al. | 2004-12-23 |
Method and apparatus for specimen fabrication Grant 6,794,663 - Shichi , et al. September 21, 2 | 2004-09-21 |
Method and apparatus for processing a micro sample Grant 6,781,125 - Tokuda , et al. August 24, 2 | 2004-08-24 |
Method of preventing charging, and apparatus for charged particle beam using the same App 20040155185 - Fukuda, Muneyuki ;   et al. | 2004-08-12 |
Method of preventing charging, and apparatus for charged particle beam using the same Grant 6,774,363 - Fukuda , et al. August 10, 2 | 2004-08-10 |
Microfabrication apparatus and microfabrication method App 20040135096 - Fukuda, Muneyuki ;   et al. | 2004-07-15 |
Apparatus for specimen fabrication and method for specimen fabrication App 20040129878 - Tomimatsu, Satoshi ;   et al. | 2004-07-08 |
Method and apparatus for specimen fabrication App 20040089821 - Shichi, Hiroyasu ;   et al. | 2004-05-13 |
Beam as well as method and equipment for specimen fabrication Grant 6,717,156 - Sugaya , et al. April 6, 2 | 2004-04-06 |
Method for failure analysis and system for failure analysis App 20030236586 - Tomimatsu, Satoshi ;   et al. | 2003-12-25 |
Method and apparatus for specimen fabrication Grant 6,664,552 - Shichi , et al. December 16, 2 | 2003-12-16 |
Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electron device App 20030198755 - Shichi, Hiroyasu ;   et al. | 2003-10-23 |
Method of preventing charging, and apparatus for charged particle beam using the same App 20030085354 - Fukuda, Muneyuki ;   et al. | 2003-05-08 |
Beam as well as method and equipment for specimen fabrication App 20020166976 - Sugaya, Masakazu ;   et al. | 2002-11-14 |
Method and apparatus for specimen fabrication App 20020079463 - Shichi, Hiroyasu ;   et al. | 2002-06-27 |
Method and apparatus for processing a micro sample App 20020050565 - Tokuda, Mitsuo ;   et al. | 2002-05-02 |
Method and apparatus for X-ray analyses Grant 5,877,498 - Sugimoto , et al. March 2, 1 | 1999-03-02 |
Surface analyzing method and its apparatus Grant 5,714,757 - Itabashi , et al. February 3, 1 | 1998-02-03 |
Method and apparatus for x-ray analyses Grant 5,594,246 - Sudo , et al. January 14, 1 | 1997-01-14 |
Surface analysis method and apparatus for carrying out the same Grant 5,481,109 - Ninomiya , et al. January 2, 1 | 1996-01-02 |
Secondary ion mass spectrometer Grant 4,851,673 - Izumi , et al. July 25, 1 | 1989-07-25 |
Apparatus for generating metal ions Grant 4,774,433 - Ikebe , et al. September 27, 1 | 1988-09-27 |
Ion source Grant 4,687,938 - Tamura , et al. August 18, 1 | 1987-08-18 |
Ion beam apparatus Grant 4,687,930 - Tamura , et al. August 18, 1 | 1987-08-18 |
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