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Health Management System, Fault Diagnosis System, Health Management Method, And Fault Diagnosis Method App 20150160098 - NODA; Toujirou ;   et al. | 2015-06-11 |
Facility State Monitoring Method and Device for Same App 20140279795 - Shibuya; Hisae ;   et al. | 2014-09-18 |
Method and apparatus for inspecting patterns formed on a substrate Grant 8,824,774 - Sakai , et al. September 2, 2 | 2014-09-02 |
Anomaly Detection/Diagnostic Method and Anomaly Detection/Diagnostic System App 20140195184 - Maeda; Shunji ;   et al. | 2014-07-10 |
Method and device for monitoring the state of a facility Grant 8,682,824 - Shibuya , et al. March 25, 2 | 2014-03-25 |
Defect classification method and apparatus, and defect inspection apparatus Grant 8,660,340 - Shibuya , et al. February 25, 2 | 2014-02-25 |
Inspecting method and inspecting apparatus for substrate surface Grant 8,654,350 - Hamamatsu , et al. February 18, 2 | 2014-02-18 |
Method And Apparatus For Monitoring Equipment Conditions App 20140039834 - SHIBUYA; Hisae ;   et al. | 2014-02-06 |
Apparatus of inspecting defect in semiconductor and method of the same Grant 8,643,834 - Hamamatsu , et al. February 4, 2 | 2014-02-04 |
Error detection method and its system for early detection of errors in a planar or facilities Grant 8,630,962 - Maeda , et al. January 14, 2 | 2014-01-14 |
Visual inspection method and apparatus and image analysis system Grant 8,620,061 - Shibuya , et al. December 31, 2 | 2013-12-31 |
Visual inspection method and apparatus and image analysis system Grant 08620061 - | 2013-12-31 |
Method And Apparatus For Inspecting Patterns Formed On A Substrate App 20130307963 - SAKAI; Kaoru ;   et al. | 2013-11-21 |
Anomaly Sensing and Diagnosis Method, Anomaly Sensing and Diagnosis System, Anomaly Sensing and Diagnosis Program and Enterprise Asset Management and Infrastructure Asset Management System App 20130282336 - Maeda; Shunji ;   et al. | 2013-10-24 |
Defect Classification Method And Apparatus, And Defect Inspection Apparatus App 20130202189 - Shibuya; Hisae ;   et al. | 2013-08-08 |
Malfunction Detection Method and System Thereof App 20130173218 - Maeda; Shunji ;   et al. | 2013-07-04 |
Method and apparatus for inspecting patterns formed on a substrate Grant 8,467,594 - Sakai , et al. June 18, 2 | 2013-06-18 |
Defect classification method and apparatus, and defect inspection apparatus Grant 8,437,534 - Shibuya , et al. May 7, 2 | 2013-05-07 |
Inspecting Method and Inspecting Apparatus For Substrate Surface App 20130107247 - Hamamatsu; Akira ;   et al. | 2013-05-02 |
Method For Anomaly Detection/diagnosis, System For Anomaly Detection/diagnosis, And Program For Anomaly Detection/diagnosis App 20130073260 - Maeda; Shunji ;   et al. | 2013-03-21 |
Apparatus Of Inspecting Defect In Semiconductor And Method Of The Same App 20130038862 - HAMAMATSU; Akira ;   et al. | 2013-02-14 |
Defect inspection apparatus and its method Grant 8,355,123 - Hamamatsu , et al. January 15, 2 | 2013-01-15 |
Anomaly Detection Method And Anomaly Detection System App 20120316835 - Maeda; Shunji ;   et al. | 2012-12-13 |
Method And Device For Monitoring The State Of A Facility App 20120290879 - Shibuya; Hisae ;   et al. | 2012-11-15 |
Failure Diagnosis System, Failure Diagnosis Device And Failure Diagnosis Program App 20120290497 - Magara; Hiroyuki ;   et al. | 2012-11-15 |
Apparatus of inspecting defect in semiconductor and method of the same Grant 8,310,666 - Hamamatsu , et al. November 13, 2 | 2012-11-13 |
Inspecting method and inspecting apparatus for substrate surface Grant 8,310,665 - Hamamatsu , et al. November 13, 2 | 2012-11-13 |
Method and apparatus for detecting pattern defects Grant 8,306,312 - Shibuya , et al. November 6, 2 | 2012-11-06 |
Equipment Status Monitoring Method, Monitoring System, And Monitoring Program App 20120271587 - Shibuya; Hisae ;   et al. | 2012-10-25 |
Anomaly Detection and Diagnosis/Prognosis Method, Anomaly Detection and Diagnosis/Prognosis System, and Anomaly Detection and Diagnosis/Prognosis Program App 20120166142 - Maeda; Shunji ;   et al. | 2012-06-28 |
Inspecting Method and Inspecting Apparatus for Substrate Surface App 20120162665 - Hamamatsu; Akira ;   et al. | 2012-06-28 |
Visual Inspection Method And Apparatus And Image Analysis System App 20120155741 - Shibuya; Hisae ;   et al. | 2012-06-21 |
Defect Inspection Apparatus And Its Method App 20120133927 - HAMAMATSU; Akira ;   et al. | 2012-05-31 |
Defect inspection apparatus and its method Grant 8,149,396 - Hamamatsu , et al. April 3, 2 | 2012-04-03 |
Inspecting method and inspecting apparatus for substrate surface Grant 8,144,337 - Hamamatsu , et al. March 27, 2 | 2012-03-27 |
Visual inspection method and apparatus and image analysis system Grant 8,139,841 - Shibuya , et al. March 20, 2 | 2012-03-20 |
Anomaly Detection Method and Anomaly Detection System App 20120041575 - Maeda; Shunji ;   et al. | 2012-02-16 |
Method and apparatus for analyzing defect data and a review system Grant 8,116,556 - Shibuya , et al. February 14, 2 | 2012-02-14 |
Method And Apparatus For Inspecting Patterns Formed On A Substrate App 20120002860 - SAKAI; Kaoru ;   et al. | 2012-01-05 |
Method for analyzing defect data and inspection apparatus and review system Grant 8,086,422 - Shibuya , et al. December 27, 2 | 2011-12-27 |
Method for analyzing defect data and inspection apparatus and review system Grant 8,027,527 - Shibuya , et al. September 27, 2 | 2011-09-27 |
Apparatus Of Inspecting Defect In Semiconductor And Method Of The Same App 20110228262 - Hamamatsu; Akira ;   et al. | 2011-09-22 |
Defect Inspection Apparatus and Its Method App 20110205534 - Hamamatsu; Akira ;   et al. | 2011-08-25 |
Error Detection Method And System App 20110191076 - Maeda; Shunji ;   et al. | 2011-08-04 |
Method And Apparatus For Detecting Pattern Defects App 20110164809 - Shibuya; Hisae ;   et al. | 2011-07-07 |
Apparatus of inspecting defect in semiconductor and method of the same Grant 7,952,699 - Hamamatsu , et al. May 31, 2 | 2011-05-31 |
Defect inspection apparatus and its method Grant 7,940,385 - Hamamatsu , et al. May 10, 2 | 2011-05-10 |
Method and apparatus for detecting pattern defects Grant 7,912,276 - Shibuya , et al. March 22, 2 | 2011-03-22 |
Method and Apparatus for Analyzing Defect Data and a Review System App 20110013825 - SHIBUYA; Hisae ;   et al. | 2011-01-20 |
Method and apparatus for inspecting a defect of a pattern Grant 7,848,563 - Sakai , et al. December 7, 2 | 2010-12-07 |
Apparatus Of Inspecting Defect In Semiconductor And Method Of The Same App 20100268482 - HAMAMATSU; Akira ;   et al. | 2010-10-21 |
Method and apparatus for analyzing defect data and a review system Grant 7,813,539 - Shibuya , et al. October 12, 2 | 2010-10-12 |
Method And Apparatus For Detecting Pattern Defects App 20100195896 - SHIBUYA; Hisae ;   et al. | 2010-08-05 |
Apparatus of inspecting defect in semiconductor and method of the same Grant 7,751,036 - Hamamatsu , et al. July 6, 2 | 2010-07-06 |
Method and apparatus for detecting pattern defects Grant 7,720,275 - Shibuya , et al. May 18, 2 | 2010-05-18 |
Method for evaluating color picture tubes and device for the same and method for making color picture tubes Grant 7,639,277 - Shibuya , et al. December 29, 2 | 2009-12-29 |
Inspecting Method and Inspecting Apparatus for Substrate Surface App 20090290168 - HAMAMATSU; Akira ;   et al. | 2009-11-26 |
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Method For Analyzing Defect Data And Inspection Apparatus And Review System App 20090105990 - SHIBUYA; Hisae ;   et al. | 2009-04-23 |
Defect inspection apparatus and its method App 20090027664 - Hamamatsu; Akira ;   et al. | 2009-01-29 |
Apparatus of inspecting defect in semiconductor and method of the same Grant 7,474,394 - Hamamatsu , et al. January 6, 2 | 2009-01-06 |
Visual Inspection Method and Apparatus and Image Analysis System App 20080317329 - Shibuya; Hisae ;   et al. | 2008-12-25 |
Defect Classification Method And Apparatus, And Defect Inspection Apparatus App 20080075352 - SHIBUYA; HISAE ;   et al. | 2008-03-27 |
Apparatus of inspecting defect in semiconductor and method of the same App 20070019185 - Hamamatsu; Akira ;   et al. | 2007-01-25 |
Method for analyzing defect data and inspection apparatus and review system App 20060238755 - Shibuya; Hisae ;   et al. | 2006-10-26 |
Method for analyzing defect data and inspection apparatus and review system App 20060239536 - Shibuya; Hisae ;   et al. | 2006-10-26 |
Method and apparatus for inspection App 20060233434 - Hamamatsu; Akira ;   et al. | 2006-10-19 |
Method and apparatus for detecting pattern defects App 20060215902 - Shibuya; Hisae ;   et al. | 2006-09-28 |
Method for analyzing defect data and inspection apparatus and review system Grant 7,084,968 - Shibuya , et al. August 1, 2 | 2006-08-01 |
Method and apparatus for inspecting a defect of a pattern App 20060159330 - Sakai; Kaoru ;   et al. | 2006-07-20 |
Method and its apparatus for classifying defects App 20060078188 - Kurihara; Masaki ;   et al. | 2006-04-13 |
Method for analyzing defect data and inspection apparatus and review system App 20050168731 - Shibuya, Hisae ;   et al. | 2005-08-04 |
Method for analyzing defect data and inspection apparatus and review system Grant 6,876,445 - Shibuya , et al. April 5, 2 | 2005-04-05 |
Method and apparatus for analyzing composition of defects Grant 6,870,169 - Obara , et al. March 22, 2 | 2005-03-22 |
Method and apparatus for inspecting defects in a semiconductor wafer Grant 6,792,366 - Hosoya , et al. September 14, 2 | 2004-09-14 |
Method and apparatus for inspecting defects in a semiconductor wafer Grant 6,792,367 - Hosoya , et al. September 14, 2 | 2004-09-14 |
Method and apparatus for analyzing composition of defects App 20040126909 - Obara, Kenji ;   et al. | 2004-07-01 |
Method and apparatus for analyzing defect information Grant 6,741,941 - Obara , et al. May 25, 2 | 2004-05-25 |
Method and apparatus for analyzing defect data and a review system App 20040064269 - Shibuya, Hisae ;   et al. | 2004-04-01 |
Method and apparatus for inspecting defects in a semiconductor wafer App 20030109070 - Hosoya, Naoki ;   et al. | 2003-06-12 |
Method and apparatus for inspecting defects in a semiconductor wafer App 20030109952 - Hosoya, Naoki ;   et al. | 2003-06-12 |
Method for analyzing defect data and inspection apparatus and review system App 20020181756 - Shibuya, Hisae ;   et al. | 2002-12-05 |
Method for evaluating color picture tubes and device for the same and method for making color picture tubes App 20020047903 - Shibuya, Hisae ;   et al. | 2002-04-25 |