| Patent | Date |
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Composition for forming adhesive film for imprinting, adhesive film, laminate, method for producing cured product pattern, and method for manufacturing circuit substrate
Grant 11,441,053 - Shimoju , et al. September 13, 2 | 2022-09-13 |
Curable composition for imprinting, cured product, pattern forming method, lithography method, pattern, mask for lithography, and polymerizable composition for imprinting
Grant 11,401,361 - Shimoju , et al. August 2, 2 | 2022-08-02 |
Composition, adhesive film, laminate, method for producing cured product pattern, and method for manufacturing circuit substrate
Grant 11,299,653 - Shimoju , et al. April 12, 2 | 2022-04-12 |
Composition For Forming Pattern, Kit, Cured Film, Laminate, Pattern Producing Method, And Method For Manufacturing Semiconductor Element
App 20220009153 - GOTO; Yuichiro ; et al. | 2022-01-13 |
Curable Composition For Imprinting, Kit, Pattern Producing Method, And Method For Manufacturing Semiconductor Element
App 20210388134 - SHIMOJU; Naoya ; et al. | 2021-12-16 |
Kit, Composition For Forming Underlayer Film For Imprinting, Laminate, And Production Method Using The Same
App 20200363718 - Shimoju; Naoya ; et al. | 2020-11-19 |
Laminate, method for manufacturing laminate, semiconductor device, and method for manufacturing the semiconductor device
Grant 10,780,679 - Iwai , et al. Sept | 2020-09-22 |
Curable Composition For Imprinting, Cured Product, Pattern Forming Method, Lithography Method, Pattern, Mask For Lithography, An
App 20200157267 - SHIMOJU; Naoya ; et al. | 2020-05-21 |
Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, and electronic device
Grant 10,649,329 - Kataoka , et al. | 2020-05-12 |
Photosensitive Resin Composition, Polymer Precursor, Cured Film, Laminate, Method For Producing Cured Film, And Semiconductor De
App 20200089113 - KAWABATA; Takeshi ; et al. | 2020-03-19 |
Composition, Adhesive Film, Laminate, Method For Producing Cured Product Pattern, And Method For Manufacturing Circuit Substrate
App 20200040222 - SHIMOJU; Naoya ; et al. | 2020-02-06 |
Polyimide precursor composition, photosensitive resin composition, cured film, method for producing cured film, a semiconductor device, and method for producing polyimide precursor composition
Grant 10,538,627 - Kawabata , et al. Ja | 2020-01-21 |
Precursor composition, photosensitive resin composition, method for producing precursor composition, cured film, method for producing cured film, and semiconductor device
Grant 10,526,448 - Shibuya , et al. J | 2020-01-07 |
Composition For Forming Adhesive Film For Imprinting, Adhesive Film, Laminate, Method For Producing Cured Product Pattern, And M
App 20190382623 - SHIMOJU; Naoya ; et al. | 2019-12-19 |
Photosensitive Resin Composition, Heterocyclic Ring-containing Polymer Precursor, Cured Film, Laminate, Method For Producing Cur
App 20190369496 - KAWABATA; Takeshi ; et al. | 2019-12-05 |
Resin, composition, cured film, method for manufacturing cured film and semiconductor device
Grant 10,450,417 - Kawabata , et al. Oc | 2019-10-22 |
Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film and method of forming pattern
Grant 10,234,759 - Kawabata , et al. | 2019-03-19 |
Laminate, Method For Manufacturing Laminate, Semiconductor Device, And Method For Manufacturing The Semiconductor Device
App 20180222164 - IWAI; Yu ; et al. | 2018-08-09 |
Resin, Composition, Cured Film, Method For Manufacturing Cured Film And Semiconductor Device
App 20180215874 - KAWABATA; Takeshi ; et al. | 2018-08-02 |
Precursor Composition, Photosensitive Resin Composition, Method For Producing Precursor Composition, Cured Film, Method For Producing Cured Film, And Semiconductor Device
App 20180118887 - SHIBUYA; Akinori ; et al. | 2018-05-03 |
Polyimide Precursor Composition, Photosensitive Resin Composition, Cured Film, Method For Producing Cured Film, A Semiconductor Device, And Method For Producing Polyimide Precursor Composition
App 20180079864 - KAWABATA; Takeshi ; et al. | 2018-03-22 |
Method For Forming Negative Tone Pattern, Method For Manufacturing Electronic Device, And Active-light-sensitive Or Radiation-sensitive Resin Composition
App 20170199455 - KOJIMA; Masafumi ; et al. | 2017-07-13 |
Method For Forming Negative Tone Pattern, Method For Manufacturing Electronic Device, And Active-light-sensitive Or Radiation-sensitive Resin Composition
App 20170192355 - KOJIMA; Masafumi ; et al. | 2017-07-06 |
Active Light Sensitive Or Radiation Sensitive Resin Composition, Active Light Sensitive Or Radiation Sensitive Film, Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20170097565 - KATAOKA; Shohei ; et al. | 2017-04-06 |
Method of forming pattern, actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, process for manufacturing electronic device and electronic device
Grant 9,551,931 - Ito , et al. January 24, 2 | 2017-01-24 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, electronic device and compound
Grant 9,523,912 - Kataoka , et al. December 20, 2 | 2016-12-20 |
Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern
Grant 9,454,079 - Shibuya , et al. September 27, 2 | 2016-09-27 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20160266488 - KOJIMA; Masafumi ; et al. | 2016-09-15 |
Pattern forming method, method for manufacturing electronic device, and electronic device
Grant 9,405,197 - Shibuya , et al. August 2, 2 | 2016-08-02 |
Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern using the composition
Grant 9,316,911 - Matsuda , et al. April 19, 2 | 2016-04-19 |
Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the composition
Grant 9,291,892 - Shibuya , et al. March 22, 2 | 2016-03-22 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Manufacturing Method Of Electronic Device, Electronic Device And Compound
App 20160070167 - KATAOKA; Shohei ; et al. | 2016-03-10 |
Pattern-forming Method, Electronic Device And Method For Producing Same, And Developing Fluid
App 20160048082 - KOJIMA; Masafumi ; et al. | 2016-02-18 |
Active Light-sensitive, Or Radiation-sensitive Resin Composition, And Pattern-forming Method Using Same
App 20160033862 - SHIBUYA; Akinori | 2016-02-04 |
Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition for use in the method
Grant 9,250,519 - Kataoka , et al. February 2, 2 | 2016-02-02 |
Method Of Forming Pattern, Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film, Process For Manufacturing Electronic Device And Electronic Device
App 20160004157 - ITO; Junichi ; et al. | 2016-01-07 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
Grant 9,223,219 - Enomoto , et al. December 29, 2 | 2015-12-29 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film And Method Of Forming Pattern
App 20150338736 - KAWABATA; Takeshi ; et al. | 2015-11-26 |
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
Grant 9,152,049 - Kataoka , et al. October 6, 2 | 2015-10-06 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film Formed Using Said Composition, Method For Forming Pattern Using Said Composition, Process For Producing Electronic Device, And Electronic Device
App 20150277225 - KOJIMA; MASAFUMI ; et al. | 2015-10-01 |
Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern using the composition
Grant 9,081,277 - Matsuda , et al. July 14, 2 | 2015-07-14 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film Using The Same, Pattern Forming Method, And Method For Manufacturing Electronic Device And Electronic Device, And Compound
App 20150168830 - GOTO; Akiyoshi ; et al. | 2015-06-18 |
Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20150160559 - SHIBUYA; Akinori ; et al. | 2015-06-11 |
Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method using the same, polymerizable compound and polymer compound obtained by polymerizing the polymerizable compound
Grant 9,046,773 - Yamaguchi , et al. June 2, 2 | 2015-06-02 |
Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film and method of forming pattern
Grant 9,034,558 - Yamaguchi , et al. May 19, 2 | 2015-05-19 |
Actinic-ray- or radiation-sensitive resin composition, compound and method of forming pattern using the composition
Grant 9,023,579 - Yamaguchi , et al. May 5, 2 | 2015-05-05 |
Method Of Forming Pattern And Actinic-ray- Or Radiation-sensitive Resin Composition For Use In The Method
App 20150111157 - KATO; Keita ; et al. | 2015-04-23 |
Pattern Forming Method And Actinic Ray-sensitive Or Radiation-sensitive Resin Composition For Use In The Method
App 20150111135 - KATAOKA; Shohei ; et al. | 2015-04-23 |
Positive resist composition and pattern forming method using the same
Grant 9,012,123 - Yamamoto , et al. April 21, 2 | 2015-04-21 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Composition
App 20150093691 - SHIBUYA; Akinori | 2015-04-02 |
Positive photosensitive composition and pattern forming method using the same
Grant 8,932,794 - Fukuhara , et al. January 13, 2 | 2015-01-13 |
Method of forming pattern using actinic-ray or radiation-sensitive resin composition, and pattern
Grant 8,911,930 - Enomoto , et al. December 16, 2 | 2014-12-16 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
Grant 8,846,290 - Tango , et al. September 30, 2 | 2014-09-30 |
Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the same composition
Grant 8,846,293 - Iizuka , et al. September 30, 2 | 2014-09-30 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And, Resist Film, Pattern Forming Method, Electronic Device Manufacturing Method, And Electronic Device, Each Using The Composition
App 20140287363 - SHIBUYA; Akinori ; et al. | 2014-09-25 |
Actinic-ray-sensitive or radiation-sensitive resin composition, resist film and pattern forming method each using the composition, method for preparing electronic device, and electronic device
Grant 8,841,060 - Kataoka , et al. September 23, 2 | 2014-09-23 |
Actinic Ray- Or Radiation-sensitive Resin Composition, Actinic Ray- Or Radiation-sensitive Film And Method Of Forming Pattern
App 20140248562 - SHIBUYA; Akinori ; et al. | 2014-09-04 |
Actinic Ray- Or Radiation-sensitive Resin Composition, Actinic Ray- Or Radiation-sensitive Film And Method Of Forming Pattern
App 20140234759 - KATAOKA; Shohei ; et al. | 2014-08-21 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film Therefrom, Method Of Forming Pattern Using The Composition, Process For Manufacturing Electronic Device And Electronic Device
App 20140212814 - ITO; Junichi ; et al. | 2014-07-31 |
Actinic Ray-sensitive Or Radiation-sensitive Resing Composition, Actinic Ray-sensitive Or Radiation-sensitive Film Using The Composition, And Pattern Forming Method
App 20140170564 - MATSUDA; Tomoki ; et al. | 2014-06-19 |
Actinic ray-sensitive or radiation-sensitive resin composition, and resist film and pattern forming method using the same
Grant 8,715,903 - Tomeba , et al. May 6, 2 | 2014-05-06 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
Grant 8,617,788 - Kato , et al. December 31, 2 | 2013-12-31 |
Actinic-ray- or radiation-sensitive resin composition, compound and method of forming pattern using the composition
Grant 8,557,499 - Yamaguchi , et al. October 15, 2 | 2013-10-15 |
Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the same
Grant 8,541,160 - Shibuya September 24, 2 | 2013-09-24 |
Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using same
Grant 8,460,850 - Sato , et al. June 11, 2 | 2013-06-11 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film, Pattern Forming Method, Electronic Device Manufacturing Method, And Electronic Device, Each Using The Composition
App 20130136900 - SHIBUYA; Akinori ; et al. | 2013-05-30 |
Actinic-ray-or Radiation-sensitive Resin Composition And Method Of Forming Pattern Therewith
App 20130130178 - Iizuka; Yusuke ; et al. | 2013-05-23 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film And Method Of Forming Pattern
App 20130115557 - Yamaguchi; Shuhei ; et al. | 2013-05-09 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Same
App 20130095429 - Iizuka; Yusuke ; et al. | 2013-04-18 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film And Pattern Forming Method Each Using The Composition, Method For Preparing Electronic Device, And Electronic Device
App 20130004740 - KATAOKA; Shohei ; et al. | 2013-01-03 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film Therefrom And Method Of Forming Pattern Using The Composition
App 20130004741 - MATSUDA; Tomoki ; et al. | 2013-01-03 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Resist Film
App 20120282548 - Enomoto; Yuichiro ; et al. | 2012-11-08 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film Therefrom And Method Of Forming Pattern Using The Composition
App 20120273924 - Matsuda; Tomoki ; et al. | 2012-11-01 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Actinic Ray-sensitive Or Radiation-sensitive Film And Pattern Forming Method Using The Same Composition
App 20120251948 - IIZUKA; Yusuke ; et al. | 2012-10-04 |
Actinic-Ray- or Radiation-Sensitive Resin Composition, Compound and Method of Forming Pattern Using the Composition
App 20120237874 - Yamaguchi; Shuhei ; et al. | 2012-09-20 |
Photosensitive Composition And Pattern Forming Method Using Same
App 20120219910 - Shibuya; Akinori ; et al. | 2012-08-30 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film And Pattern Forming Method Using The Same Composition
App 20120207978 - SHIBUYA; Akinori ; et al. | 2012-08-16 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film And Pattern Forming Method Using The Same
App 20120164573 - Tango; Naohiro ; et al. | 2012-06-28 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Composition
App 20120156617 - Kataoka; Shohei ; et al. | 2012-06-21 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, Actinic-ray-sensitive Or Radiation-sensitive Film, And Pattern Forming Method
App 20120135348 - SHIBUYA; Akinori ; et al. | 2012-05-31 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film And Pattern Forming Method Using The Same
App 20120129100 - Shibuya; Akinori ; et al. | 2012-05-24 |
Resist Composition, Resist Film Therefrom And Method Of Forming Pattern Therewith
App 20120076996 - YAMAMOTO; Kei ; et al. | 2012-03-29 |
Method Of Forming Pattern Using Actinic-ray Or Radiation-sensitive Resin Composition, And Pattern
App 20120077131 - Enomoto; Yuichiro ; et al. | 2012-03-29 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using The Same
App 20120015302 - Tango; Naohiro ; et al. | 2012-01-19 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using The Same
App 20120009522 - Kato; Takayuki ; et al. | 2012-01-12 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film And Pattern Forming Method Using The Same
App 20110293900 - TOMEBA; Hisamitsu ; et al. | 2011-12-01 |
Actinic-ray- Or Radiation-sensitive Resin Composition And Method Of Forming Pattern Using The Same
App 20110269072 - SHIBUYA; Akinori | 2011-11-03 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Resist Film And Pattern Forming Method Using The Same
App 20110223536 - SHIBUYA; Akinori ; et al. | 2011-09-15 |
Positive Photosensitive Composition And Pattern Forming Method Using The Same
App 20110136062 - Fukuhara; Toshiaki ; et al. | 2011-06-09 |
Positive resist composition and pattern forming method using the same
Grant 7,955,780 - Kato , et al. June 7, 2 | 2011-06-07 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Compound And Method Of Forming Pattern Using The Composition
App 20110027716 - YAMAGUCHI; Shuhei ; et al. | 2011-02-03 |
Positive Resist Composition And Pattern Forming Method Using The Same
App 20110014571 - Yamamoto; Kei ; et al. | 2011-01-20 |
Actinic-ray-or Radiation-sensitive Resin Composition, Compound And Method Of Forming Pattern Using The Composition
App 20110008731 - Yamaguchi; Shuhei ; et al. | 2011-01-13 |
Positive photosensitive composition, polymer compound used for the positive photosensitive composition, production method of the polymer compound, and pattern forming method using the positive photosensitive composition
Grant 7,794,916 - Shibuya September 14, 2 | 2010-09-14 |
Positive Resist Composition And Pattern Forming Method Using The Same
App 20100203451 - Kato; Takayuki ; et al. | 2010-08-12 |
Positive Resist Composition And Pattern Forming Method
App 20100104974 - Kaneko; Yushi ; et al. | 2010-04-29 |
Positive working resist composition and pattern forming method
Grant 7,648,817 - Kato , et al. January 19, 2 | 2010-01-19 |
Photosensitive Composition And Pattern Forming Method Using Same
App 20090325102 - SHIBUYA; Akinori ; et al. | 2009-12-31 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method Using Same
App 20090325103 - SATO; Kenichiro ; et al. | 2009-12-31 |
Positive photosensitive composition, polymer compounds for use in the positive photosensitive composition, manufacturing method of the polymer compounds, compounds for use in the manufacture of the polymer compounds, and pattern-forming method using the positive photosensitive composition
Grant 7,629,107 - Shibuya , et al. December 8, 2 | 2009-12-08 |
Positive Photosensitive Composition And Method Of Forming Pattern Therewith
App 20090274975 - Tada; Yuko ; et al. | 2009-11-05 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method Using The Same, Polymerizable Compound And Polymer Compound Obtained By Polymerizing The Polymerizable Compound
App 20090246695 - YAMAGUCHI; Shuhei ; et al. | 2009-10-01 |
Lithographic printing plate precursor
Grant 7,449,282 - Shibuya November 11, 2 | 2008-11-11 |
Photosensitive composition and image recording method using the same
Grant 7,435,529 - Ishiji , et al. October 14, 2 | 2008-10-14 |
Photosensitive composition
Grant 7,422,837 - Shibuya September 9, 2 | 2008-09-09 |
Positive Working Resist Composition And Pattern Forming Method
App 20080206669 - Kato; Takayuki ; et al. | 2008-08-28 |
Positive Photosensitive Composition, Polymer Compound Used For The Positive Photosensitive Composition, Production Method Of The Polymer Compound, And Pattern Forming Method Using The Positive Photosensitive Composition
App 20080187863 - SHIBUYA; Akinori | 2008-08-07 |
Photosensitive composition
Grant 7,396,634 - Shibuya July 8, 2 | 2008-07-08 |
Positive Photosensitive Composition, Polymer Compounds For Use In The Positive Photosensitive Composition, Manufacturing Method Of The Polymer Compounds, Compounds For Use In The Manufacture Of The Polymer Compounds, And Pattern-forming Method Using The Positive Photosensitive Composition
App 20080085464 - SHIBUYA; Akinori ; et al. | 2008-04-10 |
Photosensitive composition and novel compound used therefor
Grant 7,267,925 - Shibuya September 11, 2 | 2007-09-11 |
Polymerizable composition and negative-working planographic printing plate precursor using the same
Grant 7,232,644 - Shibuya , et al. June 19, 2 | 2007-06-19 |
Compound, photosensitive composition, lithographic printing plate precursor, and method of forming image
Grant 7,169,529 - Shibuya January 30, 2 | 2007-01-30 |
Photosensitive composition, image-recording material and image-recording method
App 20060210923 - Ishiji; Youhei ; et al. | 2006-09-21 |
Photosensitive composition and lithographic printing plate precursor
App 20060210920 - Shibuya; Akinori | 2006-09-21 |
Photosensitive composition
App 20060204889 - Shibuya; Akinori ; et al. | 2006-09-14 |
Photosensitive composition
App 20060073410 - Shibuya; Akinori | 2006-04-06 |
Photosensitive composition and image recording method using the same
App 20060008733 - Ishiji; Yohei ; et al. | 2006-01-12 |
Lithographic printing plate precursor
App 20050255404 - Shibuya, Akinori | 2005-11-17 |
Locating system and method for determining positions of objects
Grant 6,946,956 - Hayashi , et al. September 20, 2 | 2005-09-20 |
Photosensitive composition
App 20050181305 - Shibuya, Akinori | 2005-08-18 |
Photosensitive composition
Grant 6,878,505 - Shibuya , et al. April 12, 2 | 2005-04-12 |
Compound, photosensitive composition, lithographic printing plate precursor, and method of forming image
App 20040224257 - Shibuya, Akinori | 2004-11-11 |
Photosensitive composition and novel compound used therefor
App 20040191679 - Shibuya, Akinori | 2004-09-30 |
Polymerizable composition and negative-working planographic printing plate precursor using the same
App 20040043325 - Shibuya, Akinori ; et al. | 2004-03-04 |
Locating system and method for determining positions of objects
App 20040021566 - Hayashi, Hitoshi ; et al. | 2004-02-05 |
Infrared photosensitive composition and image recording material for infrared exposure
App 20040009426 - Goto, Takahiro ; et al. | 2004-01-15 |
Photosensitive composition
App 20030077541 - Shibuya, Akinori ; et al. | 2003-04-24 |
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