Shibukawa; Jun
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shibukawa; Jun.The latest application filed is for "substrate inverting apparatus and substrate processing apparatus".
- Shibukawa; Jun - Kyoto JP
- Shibukawa; Jun - Kyoto-shi JP
- - Kyoto JP
| Patent | Date |
|---|---|
| Substrate processing method Grant 10,040,102 - Mitsuyoshi , et al. August 7, 2 | 2018-08-07 |
| Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate Grant 9,327,918 - Hayashi , et al. May 3, 2 | 2016-05-03 |
| Substrate inverting apparatus and substrate processing apparatus Grant 9,324,602 - Shinohara , et al. April 26, 2 | 2016-04-26 |
| Substrate processing apparatus Grant 9,050,634 - Mitsuyoshi , et al. June 9, 2 | 2015-06-09 |
| Substrate processing apparatus Grant 9,050,635 - Mitsuyoshi , et al. June 9, 2 | 2015-06-09 |
| Substrate Inverting Apparatus And Substrate Processing Apparatus App 20150131088 - Shinohara; Takashi ; et al. | 2015-05-14 |
| Substrate processing apparatus Grant 08919358 - | 2014-12-30 |
| Substrate processing apparatus Grant 8,919,358 - Mitsuyoshi , et al. December 30, 2 | 2014-12-30 |
| Substrate Processing Method App 20140202499 - MITSUYOSHI; Ichiro ; et al. | 2014-07-24 |
| Substrate Processing Apparatus App 20140202501 - MITSUYOSHI; Ichiro ; et al. | 2014-07-24 |
| Substrate Processing Apparatus And Substrate Processing Method For Performing Cleaning Process And The Like On Substrate App 20140093337 - HAYASHI; Motoyasu ; et al. | 2014-04-03 |
| Substrate Processing Apparatus App 20130206185 - Mitsuyoshi; Ichiro ; et al. | 2013-08-15 |
| Substrate Processing Apparatus App 20130180551 - Mitsuyoshi; Ichiro ; et al. | 2013-07-18 |
| Substrate processing apparatus Grant 8,316,497 - Shibukawa , et al. November 27, 2 | 2012-11-27 |
| Substrate Processing Apparatus App 20090211040 - Shibukawa; Jun ; et al. | 2009-08-27 |
| Substrate Processing Apparatus App 20080199284 - Mitsuyoshi; Ichiro ; et al. | 2008-08-21 |
| Substrate Processing Apparatus And Substrate Processing Method App 20080156351 - Mitsuyoshi; Ichiro ; et al. | 2008-07-03 |
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