SHIBAURA MECHATRONICS CORPORATION

Patent Applications and Registrations

Patent applications and USPTO patent grants for SHIBAURA MECHATRONICS CORPORATION.The latest application filed is for "substrate treatment device".

Company Profile

92.200.200

SHIBAURA MECHATRONICS CORPORATION - Yokohama-shi JP
SHIBAURA MECHATRONICS CORPORATION - Kanagawa JP
SHIBAURA MECHATRONICS CORPORATION - Yokohama JP
SHIBAURA MECHATRONICS CORPORATION - Yokohama-shi, Kanagawa N/A JP
Shibaura Mechatronics Corporation - Yokohama-shi, Kanagawa-ken N/A JP
Shibaura Mechatronics Corporation - JP JP
Shibaura Mechatronics Corporation - Kanagawa-Ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Treatment Device App 20220310417 - NAKAMURA; Minami ; et al.	2022-09-29
Plasma processing apparatus Grant 11,437,224 - Azumano September 6, 2	2022-09-06
Substrate Treatment Device App 20220270914 - KAMIYA; Masaya ; et al.	2022-08-25
Heat Treatment Device App 20220248502 - IMAOKA; Yuichi ; et al.	2022-08-04
Plasma processing apparatus Grant 11,387,083 - Azumano July 12, 2	2022-07-12
Plasma processing apparatus Grant 11,387,082 - Azumano July 12, 2	2022-07-12
Substrate treatment device and substrate treatment method Grant 11,355,337 - Kamiya , et al. June 7, 2	2022-06-07
Substrate processing apparatus and substrate processing method Grant 11,322,384 - Kubota , et al. May 3, 2	2022-05-03
Substrate Processing Apparatus App 20220080468 - DEMURA; Kensuke ; et al.	2022-03-17
Film Formation Apparatus App 20220084871 - TANABE; Shohei ; et al.	2022-03-17
Substrate Carrying Apparatus App 20220084861 - FURUYA; Masaaki	2022-03-17
Substrate Processing Apparatus And Substrate Processing Method App 20220068671 - DEMURA; Kensuke ; et al.	2022-03-03
Substrate Treatment Method And Substrate Treatment Apparatus App 20220037149 - NAGASHIMA; Yuji	2022-02-03
Film formation apparatus Grant 11,211,233 - Ono December 28, 2	2021-12-28
Tablet printing apparatus, tablet printing method, tablet manufacturing apparatus, and tablet manufacturing method Grant 11,203,215 - Hirano , et al. December 21, 2	2021-12-21
Heater pipe gas leak detecting device and heater pipe gas leak detecting method Grant 11,193,850 - Yokoi , et al. December 7, 2	2021-12-07
Cooling Device, Substrate Treatment Device, Cooling Method, And Substrate Treatment Method App 20210366739 - DEMURA; Kensuke	2021-11-25
Tablet printing apparatus and heat dissipation method thereof Grant 11,155,101 - Hirano , et al. October 26, 2	2021-10-26
Substrate Treatment Device App 20210323036 - MATSUSHIMA; Daisuke ; et al.	2021-10-21
Substrate Treatment Device App 20210299713 - DEMURA; Kensuke ; et al.	2021-09-30
Electromagnetic Wave Attenuator, Electronic Device, Film Formation Apparatus, And Film Formation Method App 20210305171 - NISHIGAKI; Hisashi ; et al.	2021-09-30
Plasma processing apparatus Grant 11,127,574 - Kawamata , et al. September 21, 2	2021-09-21
Substrate Treatment Device App 20210276055 - NAKAMURA; Minami ; et al.	2021-09-09
Substrate Treatment Device App 20210265159 - DEMURA; Kensuke ; et al.	2021-08-26
Film Formation Apparatus And Moisture Removal Method Thereof App 20210254212 - TANABE; Shohei ; et al.	2021-08-19
Tablet Printing Apparatus And Tablet Printing Method App 20210213726 - TANAKA; Junpei ; et al.	2021-07-15
Electromagnetic wave attenuator and electronic device Grant 11,049,818 - Kikitsu , et al. June 29, 2	2021-06-29
Electromagnetic wave attenuator and electronic device Grant 11,011,475 - Kikitsu , et al. May 18, 2	2021-05-18
Electromagnetic wave attenuator and electronic device Grant 11,011,474 - Kikitsu , et al. May 18, 2	2021-05-18
Plasma processing apparatus Grant 11,004,665 - Kawamata , et al. May 11, 2	2021-05-11
Substrate Processing Apparatus And Substrate Processing Method App 20210098279 - KUBOTA; Shunya ; et al.	2021-04-01
Tablet Printing Apparatus, Tablet Printing Method, Tablet Manufacturing Apparatus, And Tablet Manufacturing Method App 20210094331 - HIRANO; Azusa ; et al.	2021-04-01
Solution Application Apparatus And A Tablet Printing Apparatus App 20210086503 - AOYAGI; Hitoshi ; et al.	2021-03-25
Plasma Processing Apparatus App 20210074530 - Azumano; Hidehito	2021-03-11
Film formation apparatus Grant 10,903,059 - Ono , et al. January 26, 2	2021-01-26
Film formation apparatus Grant 10,896,841 - Ono January 19, 2	2021-01-19
Tablet printing apparatus Grant 10,864,717 - Ogimoto , et al. December 15, 2	2020-12-15
Tablet printing apparatus and tablet printing method Grant 10,857,818 - Ogimoto , et al. December 8, 2	2020-12-08
Film Forming Apparatus, Method For Manufacturing Film-formed Product, And Method For Manufacturing Electronic Component App 20200362452 - Ito; Akihiko	2020-11-19
Film Formation Apparatus And Film Formation Method App 20200340117 - Ono; Daisuke ; et al.	2020-10-29
Tablet printing apparatus and tablet printing method Grant 10,814,644 - Hirano , et al. October 27, 2	2020-10-27
Substrate Treatment Device And Substrate Treatment Method App 20200335324 - Kamiya; Masaya ; et al.	2020-10-22
Tablet printing apparatus and tablet printing method Grant 10,806,674 - Ogimoto , et al. October 20, 2	2020-10-20
Substrate treatment apparatus, substrate treatment method, and method for manufacturing substrate Grant 10,804,121 - Hamada , et al. October 13, 2	2020-10-13
Organic Film Forming Apparatus App 20200310183 - Nishibe; Yukinobu ; et al.	2020-10-01
Tablet printing apparatus and tablet printing method Grant 10,772,801 - Okabe September 15, 2	2020-09-15
Imprint template manufacturing apparatus and imprint template manufacturing method Grant 10,773,425 - Demura , et al. Sept	2020-09-15
Tablet Printing Apparatus And Heat Dissipation Method Thereof App 20200282747 - HIRANO; Azusa ; et al.	2020-09-10
Substrate treatment device and substrate treatment method Grant 10,734,217 - Kamiya , et al.	2020-08-04
Electromagnetic Wave Attenuator And Electronic Device App 20200243457A1 -	2020-07-30
Electromagnetic Wave Attenuator And Electronic Device App 20200227358A1 -	2020-07-16
Tablet printing apparatus and tablet printing method Grant 10,709,639 - Hirano , et al.	2020-07-14
Tablet Printing Apparatus And Tablet Printing Method App 20200215833 - AOYAGI; Hitoshi ; et al.	2020-07-09
Tablet printing apparatus and tablet printing method Grant 10,682,849 - Ikuta , et al.	2020-06-16
Imprint template treatment apparatus Grant 10,668,496 - Nakamura , et al.	2020-06-02
Substrate Processing Apparatus App 20200135504 - HAYASHI; Konosuke ; et al.	2020-04-30
Substrate Processing Apparatus App 20200135505 - HAYASHI; Konosuke ; et al.	2020-04-30
Film formation apparatus Grant 10,633,736 - Ito , et al.	2020-04-28
Reflective Mask Cleaning Apparatus And Reflective Mask Cleaning Method App 20200124960 - Matsushima; Daisuke ; et al.	2020-04-23
Film Formation Apparatus App 20200118803 - ONO; Daisuke	2020-04-16
Plasma Processing Apparatus App 20200105507 - Azumano; Hidehito	2020-04-02
Plasma Processing Apparatus App 20200105506 - Azumano; Hidehito	2020-04-02
Substrate processing apparatus Grant 10,607,863 - Hayashi , et al.	2020-03-31
Tablet printing apparatus and tablet printing method Grant 10,596,828 - Hirano , et al.	2020-03-24
Tablet printing apparatus and tablet printing method Grant 10,596,811 - Ikuta , et al.	2020-03-24
Suction stage, lamination device, and method for manufacturing laminated substrate Grant 10,586,727 - Matsui , et al.	2020-03-10
Substrate processing apparatus and substrate processing method Grant 10,573,540 - Kobayashi , et al. Feb	2020-02-25
Heater Pipe Gas Leak Detecting Device And Heater Pipe Gas Leak Detecting Method App 20200025643 - YOKOI; Masataka ; et al.	2020-01-23
Tablet printing apparatus Grant 10,486,440 - Hirano , et al. Nov	2019-11-26
Substrate transfer apparatus, substrate processing apparatus, and substrate processing method Grant 10,483,151 - Furuya Nov	2019-11-19
Substrate processing apparatus Grant 10,460,961 - Nagashima , et al. Oc	2019-10-29
Film formation apparatus and film-formed workpiece manufacturing method Grant 10,422,032 - Fukuoka , et al. Sept	2019-09-24
Tablet printing apparatus and tablet manufacturing method Grant 10,421,293 - Tanio , et al. Sept	2019-09-24
Floating conveyor and substrate processing apparatus Grant 10,421,622 - Imaoka , et al. Sept	2019-09-24
Tablet printing apparatus and printing method Grant 10,406,826 - Hirano , et al. Sept	2019-09-10
Substrate processing device and substrate processing method Grant 10,406,566 - Matsushita , et al. Sept	2019-09-10
Tablet Printing Apparatus And Tablet Printing Method App 20190217631 - Hirano; Azusa ; et al.	2019-07-18
Tablet printing apparatus and tablet printing method Grant 10,343,424 - Aoyagi , et al. July 9, 2	2019-07-09
Tablet Printing Apparatus And Tablet Printing Method App 20190183733 - OGIMOTO; Shinichi ; et al.	2019-06-20
Substrate processing apparatus and substrate processing method Grant 10,325,787 - Hayashi , et al.	2019-06-18
Substrate treatment method and substrate treatment apparatus Grant 10,319,602 - Kobayashi , et al.	2019-06-11
Tablet printing apparatus Grant 10,293,597 - Hirano , et al.	2019-05-21
Substrate processing apparatus and substrate processing method Grant 10,281,210 - Miyazaki , et al.	2019-05-07
Substrate processing device and substrate processing method Grant 10,276,406 - Hayashi , et al.	2019-04-30
Film formation apparatus and film formation method Grant 10,260,145 - Ono	2019-04-16
Tablet Printing Apparatus And Tablet Printing Method App 20190099996 - IKUTA; Ryo ; et al.	2019-04-04
Film Formation Apparatus App 20190103300 - ONO; Daisuke	2019-04-04
Tablet Printing Apparatus App 20190091990 - OGIMOTO; Shinichi ; et al.	2019-03-28
Electronic component, electric component manufacturing apparatus, and electronic component manufacturing method Grant 10,244,670 - Ito , et al.	2019-03-26
Tablet Printing Apparatus And Tablet Printing Method App 20190084318 - HIRANO; Azusa ; et al.	2019-03-21
Film Formation Apparatus App 20190074167 - ONO; Daisuke ; et al.	2019-03-07
Tablet printing apparatus Grant 10,220,640 - Tsuruoka , et al.	2019-03-05
Tablet Printing Apparatus App 20180370256 - HIRANO; Azusa ; et al.	2018-12-27
Tablet printing apparatus and tablet printing method Grant 10,160,217 - Aoyagi , et al. Dec	2018-12-25
Tablet Printing Apparatus And Tablet Printing Method App 20180344573 - HIRANO; Azusa ; et al.	2018-12-06
Tablet Printing Apparatus And Tablet Manufacturing Method App 20180326747 - TANIO; Noritsugu ; et al.	2018-11-15
Tablet printing apparatus and tablet printing method Grant 10,124,580 - Hirano , et al. November 13, 2	2018-11-13
Tablet Printing Apparatus App 20180311974 - Tsuruoka; Yasutsugu ; et al.	2018-11-01
Plasma processing apparatus and plasma processing method Grant 10,111,313 - Motokawa , et al. October 23, 2	2018-10-23
Tablet Printing Apparatus And Tablet Printing Method App 20180280241 - Okabe; Yutaka	2018-10-04
Plasma Processing Apparatus App 20180286645 - KAWAMATA; Yoshio ; et al.	2018-10-04
Outer Mask, Plasma Processing Apparatus, And Manufacturing Method Of Photo Mask App 20180284603 - Iino; Yoshinori ; et al.	2018-10-04
Plasma Processing Apparatus App 20180286644 - KAWAMATA; Yoshio ; et al.	2018-10-04
Tablet Printing Apparatus App 20180229493 - HIRANO; Azusa ; et al.	2018-08-16
Substrate processing apparatus and substrate processing method Grant 10,026,760 - Hamada , et al. July 17, 2	2018-07-17
Tablet Printing Apparatus And Tablet Printing Method App 20180194132 - HIRANO; Azusa ; et al.	2018-07-12
Floating Conveyor And Substrate Processing Apparatus App 20180178993 - IMAOKA; Yuichi ; et al.	2018-06-28
Film Formation Apparatus App 20180163295 - ITO; Akihiko ; et al.	2018-06-14
Tablet Printing Apparatus And Tablet Printing Method App 20180154659 - OGIMOTO; Shinichi ; et al.	2018-06-07
Device and method for treating a substrate with hydrofluoric and nitric acid Grant 9,972,513 - Saito , et al. May 15, 2	2018-05-15
Substrate processing apparatus and substrate processing method Grant 9,966,282 - Miyazaki , et al. May 8, 2	2018-05-08
Substrate processing apparatus and substrate processing method Grant 9,964,358 - Matsushita , et al. May 8, 2	2018-05-08
Imprint Template Manufacturing Apparatus And Imprint Template Manufacturing Method App 20180117796 - DEMURA; Kensuke ; et al.	2018-05-03
Imprint Template Manufacturing Apparatus And Imprint Template Manufacturing Method App 20180117795 - DEMURA; Kensuke ; et al.	2018-05-03
Electronic Component, Electronic Component Manufacturing Apparatus, And Electronic Component Manufacturing Method App 20180110162 - ITO; Akihiko ; et al.	2018-04-19
Tablet Printing Apparatus And Tablet Printing Method App 20180104966 - AOYAGI; Hitoshi ; et al.	2018-04-19
Substrate Processing Apparatus App 20180096864 - Nagashima; Yuji ; et al.	2018-04-05
Tablet Printing Apparatus And Tablet Printing Method App 20180086059 - IKUTA; Ryo ; et al.	2018-03-29
Substrate gripping device and substrate processing apparatus Grant 9,922,861 - Furuya , et al. March 20, 2	2018-03-20
Substrate Treatment Device And Substrate Treatment Method App 20180047559 - Kamiya; Masaya ; et al.	2018-02-15
Processing Liquid Generator And Substrate Processing Apparatus Using The Same App 20180033651 - HAYASHI; Konosuke ; et al.	2018-02-01
Template For Imprint App 20180022016 - NAKAMURA; Satoshi ; et al.	2018-01-25
Tablet Printing Apparatus And Tablet Printing Method App 20180015726 - AOYAGI; Hitoshi ; et al.	2018-01-18
Imprint Template Manufacturing Apparatus App 20180015497 - Nakamura; Satoshi ; et al.	2018-01-18
Imprint Template Manufacturing Apparatus App 20180016673 - NAKAMURA; Satoshi ; et al.	2018-01-18
Film Forming Apparatus, Method For Manufacturing Film-formed Product, And Method For Manufacturing Electronic Component App 20170369987 - Ito; Akihiko	2017-12-28
Liquid feeding device and substrate treating device Grant 9,811,096 - Hayashi , et al. November 7, 2	2017-11-07
Substrate processing apparatus and substrate processing method Grant 9,795,999 - Ootagaki , et al. October 24, 2	2017-10-24
Substrate Processing Apparatus And Substrate Processing Method App 20170287744 - KOBAYASHI; Nobuo ; et al.	2017-10-05
Substrate Transfer Apparatus, Substrate Processing Apparatus, And Substrate Processing Method App 20170287767 - FURUYA; Masaaki	2017-10-05
Substrate Treating Device And Substrate Treating Method App 20170287743 - KOBAYASHI; Nobuo ; et al.	2017-10-05
Plasma Processing Apparatus App 20170275761 - Kamo; Yoshinao	2017-09-28
Substrate Processing Apparatus App 20170278729 - HAYASHI; Konosuke ; et al.	2017-09-28
Film Formation Apparatus And Film Formation Method App 20170268098 - Ono; Daisuke	2017-09-21
Substrate Processing Device And Substrate Processing Method App 20170259308 - MATSUSHITA; Jun ; et al.	2017-09-14
Tablet Printing Apparatus And Tablet Printing Method App 20170259595 - AOYAGI; Hitoshi ; et al.	2017-09-14
Substrate Treating Device And Substrate Treating Method App 20170256423 - SAITO; Yuki ; et al.	2017-09-07
Substrate Treatment Apparatus, Substrate Treatment Method, And Method For Manufacturing Substrate App 20170250097 - HAMADA; Koichi ; et al.	2017-08-31
Bonding apparatus and bonding process method Grant 9,741,596 - Hayashi , et al. August 22, 2	2017-08-22
Substrate treatment apparatus and substrate treatment method Grant 9,694,371 - Ootagaki , et al. July 4, 2	2017-07-04
Film Formation Apparatus And Film-formed Workpiece Manufacturing Method App 20170183769 - FUKUOKA; Yotaro ; et al.	2017-06-29
Spin treatment apparatus Grant 9,679,787 - Furuya June 13, 2	2017-06-13
Etching amount measurement apparatus for dry etching apparatus Grant 9,612,205 - IvanPetrov , et al. April 4, 2	2017-04-04
Substrate processing device and substrate processing method Grant 9,607,865 - Hayashi , et al. March 28, 2	2017-03-28
Bonding apparatus and method for manufacturing bonded substrate Grant 9,586,391 - Hayashi , et al. March 7, 2	2017-03-07
Substrate Processing Apparatus And Substrate Processing Method App 20170053779 - Nakazawa; Kazuki ; et al.	2017-02-23
Substrate processing device and substrate processing method Grant 9,553,003 - Hayashi , et al. January 24, 2	2017-01-24
Reflective Mask Cleaning Apparatus And Reflective Mask Cleaning Method App 20170017151 - Matsushima; Daisuke ; et al.	2017-01-19
Method for manufacturing reflective mask and apparatus for manufacturing reflective mask Grant 9,513,557 - Yamazaki , et al. December 6, 2	2016-12-06
Method for manufacturing reflective mask and apparatus for manufacturing reflective mask Grant 9,507,251 - Yoshimori , et al. November 29, 2	2016-11-29
Substrate Processing Apparatus And Substrate Processing Method App 20160322241 - MATSUSHITA; Jun ; et al.	2016-11-03
Spin treatment apparatus Grant 9,454,080 - Furuya September 27, 2	2016-09-27
Substrate Processing Apparatus And Substrate Processing Method App 20160276379 - HAMADA; Koichi ; et al.	2016-09-22
Suction Stage, Lamination Device, And Method For Manufacturing Laminated Substrate App 20160225655 - Matsui; Emi ; et al.	2016-08-04
Substrate Treatment Device, Peeling Method For Laminated Substrate, And Method For Removing Adhesive App 20160225613 - Kanai; Takahiro ; et al.	2016-08-04
Heater unit, fan filter unit, and substrate processing apparatus Grant 9,330,948 - Furuya , et al. May 3, 2	2016-05-03
Substrate Processing Apparatus And Substrate Processing Method App 20160093486 - MIYAZAKI; Kunihiro ; et al.	2016-03-31
Substrate Processing Apparatus And Substrate Processing Method App 20160071746 - HAYASHI; Konosuke	2016-03-10
Liquid Feeding Device And Substrate Treating Device App 20160062372 - HAYASHI; Konosuke ; et al.	2016-03-03
Substrate Processing Apparatus And Substrate Processing Method App 20160025409 - MIYAZAKI; Kunihiro ; et al.	2016-01-28
Substrate treatment device and substrate treatment method Grant 9,240,314 - Kurokawa , et al. January 19, 2	2016-01-19
Bonding Apparatus and Method for Manufacturing Bonded Substrate App 20160009070 - Hayashi; Konosuke ; et al.	2016-01-14
Mounting Stage and Plasma Processing Apparatus App 20150380219 - Demura; Kensuke	2015-12-31
Processing system and processing method Grant 9,199,805 - Furuya , et al. December 1, 2	2015-12-01
Substrate treatment apparatus and substrate treatment method Grant 9,202,724 - Hayashi December 1, 2	2015-12-01
Substrate Processing Apparatus And Substrate Processing Method App 20150273534 - OOTAGAKI; Takashi ; et al.	2015-10-01
Substrate Treatment Apparatus And Substrate Treatment Method App 20150273491 - OOTAGAKI; Takashi ; et al.	2015-10-01
Substrate processing apparatus, and substrate processing method Grant 9,099,513 - Kogure August 4, 2	2015-08-04
Method For Manufacturing Reflective Mask And Apparatus For Manufacturing Reflective Mask App 20150177624 - Yamazaki; Katsuhiro ; et al.	2015-06-25
Ultrasonic bonding apparatus Grant 8,997,815 - Aizawa , et al. April 7, 2	2015-04-07
Gripping device, transfer device, processing device, and manufacturing method for electronic device Grant 8,998,561 - Furuya April 7, 2	2015-04-07
Method for manufacturing reflective mask and apparatus for manufacturing reflective mask Grant 8,999,612 - Yamazaki , et al. April 7, 2	2015-04-07
Substrate Processing Device And Substrate Processing Method App 20150090297 - MATSUSHITA; Jun ; et al.	2015-04-02
Substrate Processing Device And Substrate Processing Method App 20150090296 - NAGASHIMA; Yuji ; et al.	2015-04-02
Substrate Treatment Method And Substrate Treatment Apparatus App 20150093906 - KOBAYASHI; Nobuo ; et al.	2015-04-02
Spin Treatment Apparatus App 20150083038 - FURUYA; Masaaki	2015-03-26
Spin Treatment Apparatus App 20150059642 - FURUYA; Masaaki	2015-03-05
Etching Amount Measurement Pattern, Etching Amount Measurement Apparatus, And Etching Amount Measurement Method App 20150062578 - IvanPetrov; Ganachev ; et al.	2015-03-05
Lead wire connection apparatus and connection method of semiconductor cells Grant 8,967,222 - Abe , et al. March 3, 2	2015-03-03
Substrate Gripping Device And Substrate Processing Apparatus App 20140299166 - FURUYA; Masaaki ; et al.	2014-10-09
Wet Etching Apparatus App 20140290859 - KOBAYASHI; Nobuo ; et al.	2014-10-02
Ultrasonic Bonding Apparatus App 20140283996 - AIZAWA; Takahiro ; et al.	2014-09-25
Substrate Processing Device And Substrate Processing Method App 20140261549 - HAYASHI; Konosuke ; et al.	2014-09-18
Substrate Processing Device And Substrate Processing Method App 20140261554 - HAYASHI; Konosuke ; et al.	2014-09-18
Substrate Processing Device And Substrate Processing Method App 20140261566 - HAYASHI; Konosuke ; et al.	2014-09-18
Plasma etching apparatus Grant 8,834,674 - Motokawa , et al. September 16, 2	2014-09-16
Method For Manufacturing Reflective Mask And Apparatus For Manufacturing Reflective Mask App 20140186754 - Yoshimori; Tomoaki ; et al.	2014-07-03
Bonding Apparatus And Bonding Process Method App 20140182761 - Hayashi; Konosuke ; et al.	2014-07-03
Method for manufacturing reflective mask and apparatus for manufacturing reflective mask Grant 8,702,901 - Yoshimori , et al. April 22, 2	2014-04-22
Feature analyzing apparatus for a surface of an object Grant 8,700,498 - Hayashi , et al. April 15, 2	2014-04-15
Magnetron sputtering apparatus and magnetron sputtering method Grant 8,663,432 - Iwasaki , et al. March 4, 2	2014-03-04
Cleaning Solution Producing Apparatus, Cleaning Solution Producing Method, And Substrate Cleaning Apparatus App 20140041694 - MIYAZAKI; Kunihiro ; et al.	2014-02-13
Method For Manufacturing Reflective Mask And Apparatus For Manufacturing Reflective Mask App 20130260292 - Yamazaki; Katsuhiro ; et al.	2013-10-03
Plasma Processing Apparatus And Plasma Processing Method App 20130256270 - MOTOKAWA; Takeharu ; et al.	2013-10-03
Ashing method and ashing device Grant 8,524,102 - Yamazaki September 3, 2	2013-09-03
Processing System And Processing Method App 20130209212 - Furuya; Masaaki ; et al.	2013-08-15
Vacuum processing device Grant 8,506,774 - Ikeda , et al. August 13, 2	2013-08-13
Substrate surface inspecting apparatus and substrate surface inspecting method Grant 8,508,246 - Wakaba , et al. August 13, 2	2013-08-13
Inspection method based on captured image and inspection device Grant 8,497,985 - Hayashi , et al. July 30, 2	2013-07-30
Inspection device for disk-shaped substrate Grant 8,488,867 - Hayashi , et al. July 16, 2	2013-07-16
Inspection System And Inspection Method App 20130169793 - HAYASHI; Yoshinori ; et al.	2013-07-04
Illumination System, Illumination Method, And Inspection System App 20130169795 - HAYASHI; Yoshinori ; et al.	2013-07-04
Resin layer formation method, resin layer formation device, disk and disk manufacturing method Grant 8,475,870 - Ito , et al. July 2, 2	2013-07-02
Droplet applying device, droplet applying method, liquid crystal display panel manufacturing apparatus, and liquid crystal display panel manufacturing method Grant 8,459,201 - Hara , et al. June 11, 2	2013-06-11
Cleaning method and method for manufacturing electronic device Grant 8,454,754 - Shibata , et al. June 4, 2	2013-06-04
Robot apparatus and processing apparatus provided therewith, ashing system, and ashing method Grant 8,434,993 - Azumano , et al. May 7, 2	2013-05-07
Surface roughness inspection system Grant 8,433,102 - Hayashi , et al. April 30, 2	2013-04-30
Spin processing apparatus and spin processing method Grant 8,377,251 - Hayashi February 19, 2	2013-02-19
Heater Unit, Fan Filter Unit, And Substrate Processing Apparatus App 20120325797A1 -	2012-12-27
Apparatus for electrolyzing sulfuric acid, method of performing electrolysis, and apparatus for processing a substrate Grant 8,236,161 - Kobayashi , et al. August 7, 2	2012-08-07
Plasma Processing Apparatus And Plasma Processing Method App 20120192953 - Matsushima; Daisuke	2012-08-02
Resin layer formation method, resin layer formation device, disk, and disk manufacturing method Grant 8,220,410 - Ito , et al. July 17, 2	2012-07-17
Apparatus and method for inspecting edge of semiconductor wafer Grant 8,194,241 - Hayashi , et al. June 5, 2	2012-06-05
Plasma Etching Apparatus And Plasma Etching Method App 20120132617 - MATSUSHIMA; Daisuke	2012-05-31
Lead Wire Connection Apparatus And Connection Method Of Semiconductor Cells App 20120077302 - Abe; Mitsuhito ; et al.	2012-03-29
Film forming apparatus and film forming method Grant 8,137,511 - Kawamata March 20, 2	2012-03-20
Plasma generating apparatus and plasma treatment apparatus Grant 8,133,348 - Ganachev , et al. March 13, 2	2012-03-13
Brittle workpiece splitting system and brittle workpiece splitting method Grant 8,104,385 - Hayashi , et al. January 31, 2	2012-01-31
Disc wafer inspecting device and inspecting method Grant 8,107,064 - Hayashi , et al. January 31, 2	2012-01-31
Wafer containing cassette inspection device and method Grant 8,094,923 - Hayashi , et al. January 10, 2	2012-01-10
Gripping Device, Transfer Device, Processing Device, And Manufacturing Method For Electronic Device App 20120004773 - Furuya; Masaaki	2012-01-05
Plasma processing device and plasma processing method Grant 8,088,296 - Yamazaki January 3, 2	2012-01-03
Resin layer formation method, resin layer formation device, and disk manufacturing method Grant 8,088,438 - Ito , et al. January 3, 2	2012-01-03
Substrate Cooling Device And Substrate Treatment System App 20110290185 - Ihara; Ryuta ; et al.	2011-12-01
Etching Acid Waste Liquid Disposal System, Etching Acid Waste Liquid Disposal Apparatus And Etching Acid Waste Liquid Disposal Method Applied To The System And The Apparatus App 20110278261 - Himi; Hideki ; et al.	2011-11-17
Surface inspection apparatus Grant 8,023,111 - Hayashi , et al. September 20, 2	2011-09-20
Photocatalyst element, method and device for preparing the same Grant 8,022,011 - Hiraoka , et al. September 20, 2	2011-09-20
Adhesive tape adhering apparatus Grant 7,950,434 - Suzuki May 31, 2	2011-05-31
Magnetron Sputtering Apparatus And Magnetron Sputtering Method App 20110114473 - Iwasaki; Masaaki ; et al.	2011-05-19
Sputtering apparatus and method, and sputtering control program Grant 7,935,232 - Kuroiwa May 3, 2	2011-05-03
Plasma Processing Apparatus, Plasma Processing Method, And Method For Manufacturing Electronic Device App 20110092073 - Nitta; Hideyuki ; et al.	2011-04-21
Spin Processing Apparatus And Spin Processing Method App 20110073565 - Hayashi; Konosuke	2011-03-31
Bonding apparatus and bonding method Grant 7,913,737 - Takeuchi , et al. March 29, 2	2011-03-29
Substrate Processing Apparatus And Substrate Processing Method App 20110048471 - KIKUCHI; Tsutomu	2011-03-03
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge Grant 7,880,403 - Kuriyama February 1, 2	2011-02-01
Droplet Applying Device, Droplet Applying Method, Liquid Crystal Display Panel Manufacturing Apparatus, And Liquid Crystal Display Panel Manufacturing Method App 20100255208 - Hara; Satoru ; et al.	2010-10-07
Photocatalyst element, method and device for preparing the same Grant 7,799,731 - Hiraoka , et al. September 21, 2	2010-09-21
Film Forming Apparatus And Film Forming Method App 20100230273 - Kawamata; Yoshio	2010-09-16
Photocatalyst Element, Method And Device For Preparing The Same App 20100206723 - HIRAOKA; Junji ; et al.	2010-08-19
Photocatalyst Element, Method And Device For Preparing The Same App 20100210447 - Hiraoka; Junji ; et al.	2010-08-19
Substrate treatment apparatus Grant 7,766,021 - Kurokawa , et al. August 3, 2	2010-08-03
Disc Wafer Inspecting Device And Inspecting Method App 20100177953 - Hayashi; Yoshinori ; et al.	2010-07-15
Substrate Treatment Apparatus And Substrate Treatment Method App 20100122772 - HAYASHI; Konosuke	2010-05-20
Method Of Detecting An Arc In A Glow-discharge Device And Apparatus For Controlling A High-frequency Arc Discharge App 20100117540 - Kuriyama; Noboru	2010-05-13
Discharging power source, sputtering power source, and sputtering device Grant 7,695,599 - Kuriyama , et al. April 13, 2	2010-04-13
Surface Inspection Apparatus App 20100066998 - Hayashi; Yoshinori ; et al.	2010-03-18
Surface inspection apparatus and surface inspection method for strained silicon wafer Grant 7,679,730 - Takano , et al. March 16, 2	2010-03-16
Robot Apparatus And Processing Apparatus Provided Therewith, Ashing System, And Ashing Method App 20100048035 - Azumano; Hidehito ; et al.	2010-02-25
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge Grant 7,633,242 - Kuriyama December 15, 2	2009-12-15
Method and apparatus for producing photocatalyst Grant 7,608,562 - Hiraoka , et al. October 27, 2	2009-10-27
Magnetron Sputtering Magnet Assembly, Magnetron Sputtering Device, And Magnetron Sputtering Method App 20090194409 - Utsunomiya; Nobuaki ; et al.	2009-08-06
Surface Roughness Inspection System App 20090177415 - Hayashi; Yoshinori ; et al.	2009-07-09
Method And Apparatus For Producing Photocatalyst App 20090134022 - HIRAOKA; Junji ; et al.	2009-05-28
Sputtering power-supply unit Grant 7,531,070 - Kuriyama , et al. May 12, 2	2009-05-12
Apparatus For Electrolyzing Sulfuric Acid, Method Of Performing Electrolysis, And Apparatus For Processing A Substrate App 20090078582 - Kobayashi; Nobuo ; et al.	2009-03-26
Substrate Treatment Apparatus App 20090071511 - Kurokawa; Yoshiaki ; et al.	2009-03-19
Surface Inspection Apparatus And Surface Inspection Method For Strained Silicon Wafer App 20090066933 - Takano; Hideaki ; et al.	2009-03-12
Plasma processing device and ashing method Grant 7,491,908 - Iino February 17, 2	2009-02-17
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge Grant 7,492,105 - Kuriyama February 17, 2	2009-02-17
Method and apparatus for producing photocatalyst Grant 7,462,578 - Hiraoka , et al. December 9, 2	2008-12-09
Surface inspection apparatus and surface inspection method Grant 7,403,278 - Hayashi , et al. July 22, 2	2008-07-22
Substrate transfer apparatus and substrate transfer method Grant 7,367,601 - Ogimoto May 6, 2	2008-05-06
Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge Grant 7,301,286 - Kuriyama November 27, 2	2007-11-27
Wafer inspection apparatus Grant 7,149,341 - Hayashi , et al. December 12, 2	2006-12-12
Component holding head, component mounting apparatus using same, and component mounting method Grant 7,114,245 - Ogimoto October 3, 2	2006-10-03
Electronic part compression bonding apparatus and method Grant 7,075,036 - Ogimoto , et al. July 11, 2	2006-07-11
Apparatus and method for carrying substrate Grant 7,010,852 - Ogimoto March 14, 2	2006-03-14
Mounting system for mounting an electronic component on a substrate Grant 6,857,182 - Ogimoto February 22, 2	2005-02-22

Company Registrations

NCAGE Code	SBHA9	SHIBAURA MECHATRONICS CORPORATION
CAGE Code	SBHA9	SHIBAURA MECHATRONICS CORPORATION

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