Shibata; Yugo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shibata; Yugo.The latest application filed is for "vibration isolation apparatus, method of isolating vibration, lithography apparatus, and method of producing device".

Company Profile

0.12.11

Shibata; Yugo - Utsunomiya JP
Shibata; Yugo - Utsunomiya-shi JP
Shibata; Yugo - Tochigi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Vibration isolation apparatus, method of isolating vibration, lithography apparatus, and method of producing device Grant 9,791,018 - Shibata October 17, 2	2017-10-17
Vibration Isolation Apparatus, Method Of Isolating Vibration, Lithography Apparatus, And Method Of Producing Device App 20150014507 - Shibata; Yugo	2015-01-15
Positioning apparatus Grant 8,786,831 - Asano , et al. July 22, 2	2014-07-22
Positioning Apparatus App 20110248578 - Asano; Tosiya ; et al.	2011-10-13
Positioning apparatus Grant 8,031,328 - Asano , et al. October 4, 2	2011-10-04
Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield Grant 7,932,646 - Shibata April 26, 2	2011-04-26
Stage apparatus, exposure apparatus, and device manufacturing method Grant 7,880,864 - Shibata February 1, 2	2011-02-01
Positioning apparatus, exposure apparatus, and device manufacturing method using repulsion force generation Grant 7,804,207 - Shibata September 28, 2	2010-09-28
Stage Device, Exposure Apparatus And Device Manufacturing Method App 20080169708 - Shibata; Yugo	2008-07-17
Stage Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20080158539 - Shibata; Yugo	2008-07-03
Positioning device and method of initializing a positioning device Grant 7,375,346 - Shibata May 20, 2	2008-05-20
Positioning Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20080100149 - Shibata; Yugo	2008-05-01
Alignment apparatus, exposure apparatus, and device manufacturing method Grant 7,330,093 - Asano , et al. February 12, 2	2008-02-12
Alignment apparatus, exposure apparatus, and device manufacturing method Grant 7,282,874 - Shibata , et al. October 16, 2	2007-10-16
Positioning Device And Method Of Initializing A Positioning Device App 20070063149 - Shibata; Yugo	2007-03-22
Alignment apparatus, exposure apparatus, and device manufacturing method Grant 7,193,493 - Asano , et al. March 20, 2	2007-03-20
Positioning device and method of initializing a positioning device Grant 7,157,722 - Shibata January 2, 2	2007-01-02
Positioning apparatus App 20060175910 - Asano; Tosiya ; et al.	2006-08-10
Alignment apparatus, exposure apparatus, and device manufacturing method App 20060175993 - Shibata; Yugo ; et al.	2006-08-10
Alignment apparatus, exposure apparatus, and device manufacturing method App 20060028310 - Asano; Toshiya ; et al.	2006-02-09
Positioning device and method of initializing a positioning device App 20050211920 - Shibata, Yugo	2005-09-29
Alignment apparatus, exposure apparatus, and device manufacturing method App 20040112164 - Asano, Toshiya ; et al.	2004-06-17

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