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Patent applications and USPTO patent grants for Shibata; Hayato.The latest application filed is for "charged particle beam drawing method and apparatus".
Patent | Date |
---|---|
Charged particle beam drawing method and apparatus Grant 8,188,449 - Shibata , et al. May 29, 2 | 2012-05-29 |
Writing apparatus and writing data conversion method Grant 8,076,656 - Shibata December 13, 2 | 2011-12-13 |
Writing apparatus, writing data conversion method, and computer-readable recording medium storing program using Huffman tree for converting writing data in lithographic process Grant 7,926,007 - Shibata April 12, 2 | 2011-04-12 |
Charged Particle Beam Drawing Method And Apparatus App 20110012031 - Shibata; Hayato ;   et al. | 2011-01-20 |
Writing Apparatus, Writing Data Conversion Method, And Computer-readable Recording Medium Storing Program App 20090194710 - SHIBATA; Hayato | 2009-08-06 |
Writing Apparatus And Writing Data Conversion Method App 20090145751 - SHIBATA; Hayato | 2009-06-11 |
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