Shibagaki; Masami

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shibagaki; Masami.The latest application filed is for "heat treatment method and heat treatment apparatus for semiconductor substrate".

Company Profile

0.24.24

Shibagaki; Masami - Hachioji JP
Shibagaki; Masami - Kawasaki JP
SHIBAGAKI; MASAMI - Kawasaki-shi JP
Shibagaki; Masami - Fuchu N/A JP
SHIBAGAKI; Masami - Hachioji-shi JP
Shibagaki; Masami - Tokyo JP
Shibagaki; Masami - Fuchu-shi JP
Shibagaki; Masami - Fuchi-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Etching apparatus Grant 11,195,700 - Suzuki , et al. December 7, 2	2021-12-07
Heat treatment method and heat treatment apparatus for semiconductor substrate Grant 9,991,119 - Shibagaki , et al. June 5, 2	2018-06-05
Substrate heat treatment apparatus Grant 9,603,195 - Mashimo , et al. March 21, 2	2017-03-21
Heat Treatment Method And Heat Treatment Apparatus For Semiconductor Substrate App 20170011921 - SHIBAGAKI; MASAMI ; et al.	2017-01-12
Temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording medium Grant 9,431,281 - Shibagaki , et al. August 30, 2	2016-08-30
Heat treatment apparatus and semiconductor device manufacturing method Grant 9,147,742 - Doi , et al. September 29, 2	2015-09-29
Etching Apparatus App 20140338836 - SUZUKI; Hidekazu ; et al.	2014-11-20
Substrate Heat Treatment Apparatus App 20140308028 - MASHIMO; Kaori ; et al.	2014-10-16
Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat treating apparatus, and recording medium Grant 8,691,676 - Shibagaki , et al. April 8, 2	2014-04-08
Substrate Heat Treating Apparatus, Temperature Control Method Of Substrate Heat Treating Apparatus, Manufacturing Method Of Semiconductor Device, Temperature Control Program Of Substrate Heat Treating Apparatus, And Recording Medium App 20130109109 - Shibagaki; Masami ; et al.	2013-05-02
Substrate processing apparatus, substrate annealing method, and semiconductor device manufacturing method Grant 8,426,323 - Masaki , et al. April 23, 2	2013-04-23
Temperature Control Method For Substrate Heat Treatment Apparatus, Semiconductor Device Manufacturing Method, Temperature Control Program For Substrate Heat Treatment Apparatus, And Recording Medium App 20120219921 - Shibagaki; Masami ; et al.	2012-08-30
Annealing method for semiconductor device with silicon carbide substrate and semiconductor device Grant 8,198,182 - Shibagaki , et al. June 12, 2	2012-06-12
Substrate processing method and method of manufacturing crystalline silicon carbide (SIC) substrate Grant 8,187,958 - Shibagaki , et al. May 29, 2	2012-05-29
Heating process apparatus Grant 8,150,243 - Kumagai , et al. April 3, 2	2012-04-03
Substrate supporting/transferring tray Grant 8,147,242 - Shibagaki , et al. April 3, 2	2012-04-03
Substrate Processing Method And Method Of Manufacturing Crystalline Silicon Carbide (sic) Substrate App 20120070968 - Shibagaki; Masami ; et al.	2012-03-22
Vacuum heating apparatus Grant 8,129,663 - Masaki , et al. March 6, 2	2012-03-06
Apparatus for heat-treating substrate and method for heat-treating substrate Grant 8,090,245 - Shibagaki January 3, 2	2012-01-03
Heating apparatus, heating method, and semiconductor device manufacturing method Grant 8,032,015 - Shibagaki , et al. October 4, 2	2011-10-04
Annealing Method For Semiconductor Device With Silicon Carbide Substrate And Semiconductor Device App 20110121317 - Shibagaki; Masami ; et al.	2011-05-26
Heat Treatment Apparatus And Semiconductor Device Manufacturing Method App 20110117753 - Doi; Hiroshi ; et al.	2011-05-19
Substrate heating apparatus, heating method, and semiconductor device manufacturing method Grant 7,897,523 - Shibagaki , et al. March 1, 2	2011-03-01
Substrate heating apparatus and semiconductor fabrication method Grant 7,807,553 - Shibagaki , et al. October 5, 2	2010-10-05
Temperature Control Method For Heating Apparatus App 20100243618 - Shibagaki; Masami ; et al.	2010-09-30
Apparatus For Heat-treating Substrate And Substrate Manufacturing Method App 20100226630 - Shibagaki; Masami	2010-09-09
Substrate supporting/transferring tray Grant 7,780,440 - Shibagaki , et al. August 24, 2	2010-08-24
Substrate Processing Apparatus, Substrate Annealing Method, And Semiconductor Device Manufacturing Method App 20100151695 - Masaki; Nobuyuki ; et al.	2010-06-17
Substrate heat treatment apparatus and substrate transfer tray used in substrate heat treatment Grant 7,732,739 - Shibagaki , et al. June 8, 2	2010-06-08
Heating Process Apparatus App 20100111512 - Kumagai; Akira ; et al.	2010-05-06
Substrate Supporting/transferring Tray App 20100084392 - SHIBAGAKI; Masami ; et al.	2010-04-08
Annealing Method For Semiconductor Device With Silicon Carbide Substrate And Semiconductor Device App 20100025695 - Shibagaki; Masami ; et al.	2010-02-04
Vacuum Heating Apparatus App 20090321412 - Masaki; Nobuyuki ; et al.	2009-12-31
Substrate Heating Apparatus, Semiconductor Device Manufacturing Method, And Semiconductor Device App 20090218579 - Shibagaki; Masami	2009-09-03
Heating Apparatus, Heating Method, And Semiconductor Device Manufcaturing Method App 20090202231 - Shibagaki; Masami ; et al.	2009-08-13
Substrate Heating Apparatus, Heating Method, and Semiconductor Device Manufacturing Method App 20090191724 - Shibagaki; Masami ; et al.	2009-07-30
Apparatus For Heat-treating Substrate And Method For Heat-treating Substrate App 20090190908 - Shibagaki; Masami	2009-07-30
Substrate Heating Apparatus And Semiconductor Fabrication Method App 20080213988 - Shibagaki; Masami ; et al.	2008-09-04
Substrate Supporting/Transferring Tray App 20080128969 - Shibagaki; Masami ; et al.	2008-06-05
Substrate Heat Treatment Apparatus And Substrate Transfer Tray Used In Substrate Heat Treatment App 20070194001 - Shibagaki; Masami ; et al.	2007-08-23
Method for forming a copper thin film Grant 6,887,522 - Sekiguchi , et al. May 3, 2	2005-05-03
Method for forming a copper thin film App 20020157610 - Sekiguchi, Atsushi ; et al.	2002-10-31
Etching method Grant 4,885,054 - Shibagaki December 5, 1	1989-12-05

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