Shibagaki; Masahiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shibagaki; Masahiro.The latest application filed is for "apparatus for producing semiconductor devices".
- Shibagaki; Masahiro - San Jose CA
- Shibagaki; Masahiro - Hyogo-ku Kobe JP
- Shibagaki; Masahiro - Hiratsuka JP
| Patent | Date |
|---|---|
| Apparatus for producing semiconductor devices Grant 4,693,777 - Hazano , et al. September 15, 1 | 1987-09-15 |
| Fragrance emitter Grant 4,339,079 - Sato , et al. July 13, 1 | 1982-07-13 |
| Ion source and ion etching process Grant 4,277,304 - Horiike , et al. July 7, 1 | 1981-07-07 |
| Etching apparatus using a plasma Grant 4,252,595 - Yamamoto , et al. * February 24, 1 | 1981-02-24 |
| Apparatus for the plasma treatment of semiconductors Grant 4,175,235 - Niwa , et al. November 20, 1 | 1979-11-20 |
| Gas etching method and apparatus Grant 4,160,690 - Shibagaki , et al. July 10, 1 | 1979-07-10 |
| Continuous gas plasma etching apparatus Grant 4,151,034 - Yamamoto , et al. April 24, 1 | 1979-04-24 |
| Etching apparatus using a plasma Grant 4,094,722 - Yamamoto , et al. June 13, 1 | 1978-06-13 |
| Activated gas reaction apparatus & method Grant 4,065,369 - Ogawa , et al. December 27, 1 | 1977-12-27 |
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