Shi; Rui-Fang

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shi; Rui-Fang.The latest application filed is for "correcting aberration and apodization of an optical system using correction plates".

Company Profile

11.30.34

Shi; Rui-Fang - Cupertino CA
Shi; Rui-Fang - Carlsbad CA
Shi; Rui-Fang - King of Prussia PA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Broadband light interferometry for focal-map generation in photomask inspection Grant 11,442,021 - Shi , et al. September 13, 2	2022-09-13
Correcting Aberration And Apodization Of An Optical System Using Correction Plates App 20220244530 - Huang; Haifeng ; et al.	2022-08-04
Integration of an Optical Height Sensor in Mask Inspection Tools App 20220196572 - Marks; Zefram ; et al.	2022-06-23
Common path mode fiber tip diffraction interferometer for wavefront measurement Grant 11,333,487 - Huang , et al. May 17, 2	2022-05-17
Inspection Of Reticles Using Machine Learning App 20220084179 - Fang; Hawren ; et al.	2022-03-17
Inspection of reticles using machine learning Grant 11,257,207 - Fang , et al. February 22, 2	2022-02-22
Inspection system with non-circular pupil Grant 11,112,691 - Kvamme , et al. September 7, 2	2021-09-07
Fast Phase-shift Interferometry By Laser Frequency Shift App 20210159667 - Huang; Haifeng ; et al.	2021-05-27
Common Path Mode Fiber Tip Diffraction Interferometer For Wavefront Measurement App 20210123716 - Huang; Haifeng ; et al.	2021-04-29
Broadband Light Interferometry for Focal-Map Generation in Photomask Inspection App 20210109030 - Shi; Rui-Fang ; et al.	2021-04-15
EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test Photomasks App 20200401037 - Huang; Haifeng ; et al.	2020-12-24
Wave-Front Aberration Metrology of Extreme Ultraviolet Mask Inspection Systems App 20200379336 - Zusin; Dmitriy ; et al.	2020-12-03
Inspection System with Non-Circular Pupil App 20200225574 - Kvamme; Damon F. ; et al.	2020-07-16
Phase contrast monitoring for extreme ultra-violet (EUV) masks defect inspection Grant 10,634,623 - Zhang , et al.	2020-04-28
Block-to-block reticle inspection Grant 10,539,512 - Sezginer , et al. Ja	2020-01-21
Time-varying intensity map generation for reticles Grant 10,401,305 - Hess , et al. Sep	2019-09-03
Inspection Of Reticles Using Machine Learning App 20190206041 - Fang; Hawren ; et al.	2019-07-04
Apparatus and methods for predicting wafer-level defect printability Grant 10,304,180 - Shi , et al.	2019-05-28
Critical dimension uniformity monitoring for extreme ultra-violet reticles Grant 10,288,415 - Shi , et al.	2019-05-14
Methods And Apparatus For Polarizing Reticle Inspection App 20190003960 - Huang; Haifeng ; et al.	2019-01-03
Methods and apparatus for polarizing reticle inspection Grant 10,168,273 - Huang , et al. J	2019-01-01
Polygon-based geometry classification for semiconductor mask inspection Grant 10,140,698 - Xu , et al. Nov	2018-11-27
Phase Contrast Monitoring For Extreme Ultra-violet (euv) Masks Defect Inspection App 20180100814 - Zhang; Qiang ; et al.	2018-04-12
Critical Dimension Uniformity Monitoring For Extreme Ultra-violet Reticles App 20180080759 - Shi; Rui-fang ; et al.	2018-03-22
Critical dimension uniformity monitoring for extreme ultraviolet reticles Grant 9,863,761 - Shi , et al. January 9, 2	2018-01-09
Block-to-Block Reticle Inspection App 20180003647 - Sezginer; Abdurrahman ; et al.	2018-01-04
Apparatus And Methods For Predicting Wafer-level Defect Printability App 20170309008 - Shi; Rui-fang ; et al.	2017-10-26
Integrated multi-pass inspection Grant 9,778,207 - Sousa , et al. October 3, 2	2017-10-03
Block-to-block reticle inspection Grant 9,766,185 - Sezginer , et al. September 19, 2	2017-09-19
Integrated Multi-pass Inspection App 20170256043 - Sousa; Weston L. ; et al.	2017-09-07
Method and apparatus for database-assisted requalification reticle inspection Grant 9,733,640 - Yiin , et al. August 15, 2	2017-08-15
Qualifying patterns for microlithography Grant 9,612,541 - Shi , et al. April 4, 2	2017-04-04
Mesoscopic defect detection for reticle inspection Grant 9,607,371 - Shi , et al. March 28, 2	2017-03-28
Polygon-based Geometry Classification For Semiconductor Mask Inspection App 20170046471 - Xu; Yin ; et al.	2017-02-16
Apparatus and methods for predicting wafer-level defect printability Grant 9,547,892 - Shi , et al. January 17, 2	2017-01-17
Reticle inspection using near-field recovery Grant 9,478,019 - Sezginer , et al. October 25, 2	2016-10-25
Using reflected and transmission maps to detect reticle degradation Grant 9,417,191 - Hess , et al. August 16, 2	2016-08-16
Integrated Multi-Pass Inspection App 20160093040 - Sousa; Weston L. ; et al.	2016-03-31
Apparatus And Methods For Predicting Wafer-level Defect Printability App 20160012579 - Shi; Rui-fang ; et al.	2016-01-14
Reticle Inspection Using Near-Field Recovery App 20150324963 - Sezginer; Abdurrahman ; et al.	2015-11-12
Mesoscopic Defect Detection For Reticle Inspection App 20150279014 - Shi; Rui-fang ; et al.	2015-10-01
Detection of thin lines for selective sensitivity during reticle inspection using processed images Grant 9,092,847 - Wang , et al. July 28, 2	2015-07-28
Critical Dimension Uniformity Monitoring For Extreme Ultraviolet Reticles App 20150144798 - Shi; Rui-fang ; et al.	2015-05-28
Using Reflected And Transmission Maps To Detect Reticle Degradation App 20150103351 - Hess; Carl E. ; et al.	2015-04-16
Block-to-Block Reticle Inspection App 20150078650 - Sezginer; Abdurrahman ; et al.	2015-03-19
Qualifying Patterns For Microlithography App 20150054940 - Shi; Rui-fang ; et al.	2015-02-26
Method And Apparatus For Database-assisted Requalification Reticle Inspection App 20150005917 - Yiin; Lih-Huah ; et al.	2015-01-01
Detection Of Thin Lines For Selective Sensitivity During Reticle Inspection Using Processed Images App 20140369593 - Wang; Zhengyu ; et al.	2014-12-18
Detection of thin lines for selective sensitivity during reticle inspection using processed images Grant 8,855,400 - Wang , et al. October 7, 2	2014-10-07
Detection Of Thin Lines For Selective Sensitivity During Reticle Inspection Using Processed Images App 20130236083 - Wang; Zhengyu ; et al.	2013-09-12
Time-varying Intensity Map Generation For Reticles App 20130211736 - Hess; Carl E. ; et al.	2013-08-15
Photomask inspection and verification by lithography image reconstruction using imaging pupil filters Grant 7,995,832 - Xiong , et al. August 9, 2	2011-08-09
Computer-implemented methods, systems, and computer-readable media for determining a model for predicting printability of reticle features on a wafer Grant 7,962,863 - Su , et al. June 14, 2	2011-06-14
Semiconductor device pattern generation Grant 7,546,573 - Verma , et al. June 9, 2	2009-06-09
Computer-implemented Methods, Systems, And Computer-readable Media For Determining A Model For Predicting Printability Of Reticle Features On A Wafer App 20090024967 - Su; Bo ; et al.	2009-01-22
Photomask Inspection And Verification By Lithography Image Reconstruction Using Imaging Pupil Filters App 20080170774 - Xiong; Yalin ; et al.	2008-07-17
Coatings for sensitivity enhancement of signal from glass disks Grant 6,704,103 - Shi , et al. March 9, 2	2004-03-09
Coatings for sensitivity enhancement of signal from glass disks App 20030043371 - Shi, Rui-Fang ; et al.	2003-03-06
Method for the preparation of optical fibers Grant 5,911,025 - Garito , et al. June 8, 1	1999-06-08
Graded index optical fibers Grant 5,729,645 - Garito , et al. March 17, 1	1998-03-17

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