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Reflective Compact Lens For Magneto-optic Kerr Effect Metrology System App 20220137380 - ZHENG; Alex ;   et al. | 2022-05-05 |
Resistivity probes with curved portions Grant 11,249,110 - Johnson, III , et al. February 15, 2 | 2022-02-15 |
Magneto-optic Kerr effect metrology systems Grant 11,043,239 - Wang , et al. June 22, 2 | 2021-06-22 |
Magneto-optic Kerr Effect Metrology Systems App 20200302965 - Wang; Jun ;   et al. | 2020-09-24 |
Multi-Pin Dense Array Resistivity Probe App 20200072869 - Johnson, III; Walter H. ;   et al. | 2020-03-05 |
Resistivity probe having movable needle bodies Grant 10,514,391 - Johnson, III , et al. Dec | 2019-12-24 |
Multi-Pin Dense Array Resistivity Probe App 20180052189 - Johnson, III; Walter H. ;   et al. | 2018-02-22 |
Variable spacing four-point probe pin device and method Grant 9,435,826 - Johnson , et al. September 6, 2 | 2016-09-06 |
System and method for nondestructively measuring concentration and thickness of doped semiconductor layers Grant 8,804,106 - Zhu , et al. August 12, 2 | 2014-08-12 |
Variable Spacing Four-point Probe Pin Device And Method App 20130300445 - Johnson; Walter H. ;   et al. | 2013-11-14 |
System And Method For Nondestructively Measuring Concentration And Thickness Of Doped Semiconductor Layers App 20130003050 - Zhu; NanChang ;   et al. | 2013-01-03 |
Method and apparatus for determining dielectric layer properties Grant 8,004,290 - Zhang , et al. August 23, 2 | 2011-08-23 |
Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer Grant 7,893,703 - Rzepiela , et al. February 22, 2 | 2011-02-22 |
Systems configured to perform a non-contact method for determining a property of a specimen Grant 7,719,294 - Samsavar , et al. May 18, 2 | 2010-05-18 |
Contactless charge measurement of product wafers and control of corona generation and deposition Grant 7,538,333 - Samsavar , et al. May 26, 2 | 2009-05-26 |
Measurement of effective capacitance Grant 7,525,304 - Feng , et al. April 28, 2 | 2009-04-28 |
Methods for imperfect insulating film electrical thickness/capacitance measurement Grant 7,397,254 - Zhang , et al. July 8, 2 | 2008-07-08 |
Corona based charge voltage measurement Grant 7,345,306 - Edelstein , et al. March 18, 2 | 2008-03-18 |
Contactless charge measurement of product wafers and control of corona generation and deposition Grant 7,248,062 - Samsavar , et al. July 24, 2 | 2007-07-24 |
Methods And Systems For Determining One Or More Properties Of A Specimen App 20070126458 - Shi; Jianou ;   et al. | 2007-06-07 |
Test Pads, Methods and Systems for Measuring Properties of a Wafer App 20070109003 - Shi; Jianou ;   et al. | 2007-05-17 |
Systems and Methods for Controlling Deposition of a Charge on a Wafer for Measurement of One or More Electrical Properties of the Wafer App 20070069759 - Rzepiela; Jeffrey A. ;   et al. | 2007-03-29 |
Methods and systems for determining one or more properties of a specimen Grant 7,187,186 - Shi , et al. March 6, 2 | 2007-03-06 |
Systems and methods for using non-contact voltage sensors and corona discharge guns Grant 7,110,238 - Xu , et al. September 19, 2 | 2006-09-19 |
Non-contact methods for measuring electrical thickness and determining nitrogen content of insulating films Grant 7,103,484 - Shi , et al. September 5, 2 | 2006-09-05 |
Corona based charge voltage measurement Grant 7,098,050 - Edelstein , et al. August 29, 2 | 2006-08-29 |
Methods for imperfect insulating film electrical thickness/capacitance measurement Grant 7,075,318 - Zhang , et al. July 11, 2 | 2006-07-11 |
Methods and systems for determining an electrical property of an insulating film Grant 7,064,565 - Xu , et al. June 20, 2 | 2006-06-20 |
Methods and systems for determining one or more properties of a specimen App 20050206402 - Shi, Jianou ;   et al. | 2005-09-22 |
Systems and methods for using non-contact voltage sensors and corona discharge guns Grant 6,909,291 - Xu , et al. June 21, 2 | 2005-06-21 |
UV exposure for improving properties and adhesion of dielectric polymer films formed by chemical vapor deposition Grant 6,284,050 - Shi , et al. September 4, 2 | 2001-09-04 |
Contact temperature probe with unrestrained orientation Grant 5,791,782 - Wooten , et al. August 11, 1 | 1998-08-11 |