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Systems and methods for verifying photomask cleanliness
Grant 11,275,312 - Dunphy , et al. March 15, 2 | 2022-03-15 |
Systems and Methods for Contact Immersion Lithography
App 20210191276 - Shi; Hongqin ; et al. | 2021-06-24 |
Systems and methods for lithography
Grant 10,948,830 - Shi , et al. March 16, 2 | 2021-03-16 |
Method for fabricating a curved eyepiece
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Method For Fabricating A Curved Eyepiece
App 20170363870 - Cakmakci; Ozan ; et al. | 2017-12-21 |
Method, apparatus and system for providing a uniform laminate structure
Grant 9,789,675 - Shi October 17, 2 | 2017-10-17 |
Lens with lightguide insert for head wearable display
Grant 9,568,734 - Giri , et al. February 14, 2 | 2017-02-14 |
Methods and systems for bonding multiple wafers
Grant 9,399,596 - Shi , et al. July 26, 2 | 2016-07-26 |
Lens with lightguide insert for head wearable display
Grant 9,213,178 - Giri , et al. December 15, 2 | 2015-12-15 |
Releasing and post-releasing processes in fabrications for micromirror array devices
Grant 8,395,837 - Shi , et al. March 12, 2 | 2013-03-12 |
Releasing and post-releasing processes in fabrications for micromirror array devices
App 20120184067 - Shi; Hongqin ; et al. | 2012-07-19 |
Speckle reduction in display systems that employ coherent light sources
Grant 8,068,267 - Grasser , et al. November 29, 2 | 2011-11-29 |
Speckle Reduction In Display Systems That Employ Coherent Light Sources
App 20100079848 - Grasser; Regis ; et al. | 2010-04-01 |
Methods and apparatus of etch process control in fabrications of microstructures
Grant 7,645,704 - Shi , et al. January 12, 2 | 2010-01-12 |
System and Method for Display Illumination
App 20090059336 - Dunphy; James Christopher ; et al. | 2009-03-05 |
Micromirror device and method for making the same
Grant 7,483,198 - Doan , et al. January 27, 2 | 2009-01-27 |
Methods for Depositing, Releasing and Packaging Micro-Electromechanical Devices on Wafer Substrates
App 20080096313 - Patel; Satayadev R. ; et al. | 2008-04-24 |
Micromirror devices and methods of making the same
Grant 7,362,494 - Huibers , et al. April 22, 2 | 2008-04-22 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
Grant 7,307,775 - Patel , et al. December 11, 2 | 2007-12-11 |
Micromirror devices and methods of making the same
App 20070241417 - Huibers; Andrew ; et al. | 2007-10-18 |
Surface Lubrication In Microstructures
App 20070154622 - Shi; Hongqin | 2007-07-05 |
Apparatus And Method For Detecting An Endpoint In A Vapor Phase Etch
App 20070119814 - Patel; Satyadev R. ; et al. | 2007-05-31 |
Micromirror devices with in-plane deformable hinge
Grant 7,215,459 - Huibers , et al. May 8, 2 | 2007-05-08 |
Apparatus and method for detecting an endpoint in a vapor phase etch
Grant 7,189,332 - Patel , et al. March 13, 2 | 2007-03-13 |
Micromirror device and method for making the same
Grant 7,119,944 - Patel , et al. October 10, 2 | 2006-10-10 |
Removal of sacrificial materials in MEMS fabrications
App 20060096705 - Shi; Hongqin ; et al. | 2006-05-11 |
Method for vapor phase etching of silicon
Grant 7,041,224 - Patel , et al. May 9, 2 | 2006-05-09 |
Etching method used in fabrications of microstructures
Grant 7,027,200 - Shi , et al. April 11, 2 | 2006-04-11 |
Micromirror device and method for making the same
App 20060056005 - Patel; Satyadev ; et al. | 2006-03-16 |
Micromirror devices with in-plane deformable hinge
App 20060056006 - Huibers; Andrew ; et al. | 2006-03-16 |
Method for achieving improved selectivity in an etching process
Grant 6,942,811 - Patel , et al. September 13, 2 | 2005-09-13 |
Etching method in fabrications of microstructures
Grant 6,939,472 - Schaadt , et al. September 6, 2 | 2005-09-06 |
Micromirror device and method for making the same
App 20050157375 - Doan, Jonathan ; et al. | 2005-07-21 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
App 20050074919 - Patel, Satayadev R. ; et al. | 2005-04-07 |
Etching method in fabrications of microstructures
App 20050059253 - Schaadt, Gregory P. ; et al. | 2005-03-17 |
Methods and apparatus of etch process control in fabrications of microstructures
App 20050059254 - Shi, Hongqin ; et al. | 2005-03-17 |
Etching method used in fabrications of microstructures
App 20050020089 - Shi, Hongqin ; et al. | 2005-01-27 |
Thin cell gap microdisplays with optimum optical properties
Grant 6,801,285 - Shi , et al. October 5, 2 | 2004-10-05 |
Apparatus and method for detecting an endpoint in a vapor phase etch
App 20040069747 - Patel, Satyadev R. ; et al. | 2004-04-15 |
Thin cell gap microdisplays with optimum optical properties
App 20030053017 - Shi, Hongqin ; et al. | 2003-03-20 |
Method for vapor phase etching of silicon
App 20020195423 - Patel, Satyadev R. ; et al. | 2002-12-26 |
Method for achieving improved selectivity in an etching process
App 20020121502 - Patel, Satyadev R. ; et al. | 2002-09-05 |
Thermotropic chiral nematic liquid crystalline copolymers
Grant 5,332,522 - Chen , et al. July 26, 1 | 1994-07-26 |
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