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Doping Control of Metal Nitride Films
App 20210159118 - Lakshmanan; Annamalai ; et al. | 2021-05-27 |
Doping control of metal nitride films
Grant 10,910,263 - Lakshmanan , et al. February 2, 2 | 2021-02-02 |
Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnect
Grant 10,892,186 - Sheu , et al. January 12, 2 | 2021-01-12 |
Seed layers for copper interconnects
Grant 10,847,463 - Wu , et al. November 24, 2 | 2020-11-24 |
Apparatus And Methods For Asymmetric Deposition Of Metal On High Aspect Ratio Nanostructures
App 20200219720 - SHEU; BEN-LI ; et al. | 2020-07-09 |
Cobalt manganese vapor phase deposition
Grant 10,665,542 - Yu , et al. | 2020-05-26 |
Methods for asymmetric deposition of metal on high aspect ratio nanostructures
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Doping Control Of Metal Nitride Films
App 20190378754 - Lakshmanan; Annamalai ; et al. | 2019-12-12 |
Doping control of metal nitride films
Grant 10,431,493 - Lakshmanan , et al. O | 2019-10-01 |
Apparatus And Methods For Asymmetric Deposition Of Metal On High Aspect Ratio Nanostructures
App 20190287791 - SHEU; BEN-LI ; et al. | 2019-09-19 |
Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use
Grant 10,283,352 - Liu , et al. | 2019-05-07 |
Integration Of ALD Copper With High Temperature PVD Copper Deposition For BEOL Interconnect
App 20190115254 - Sheu; Ben-Li ; et al. | 2019-04-18 |
Seed Layers For Copper Interconnects
App 20190067201 - WU; Zhiyuan ; et al. | 2019-02-28 |
Doping Control of Metal Nitride Films
App 20180277428 - Lakshmanan; Annamalai ; et al. | 2018-09-27 |
Cobalt Manganese Vapor Phase Deposition
App 20180240755 - Yu; Sang Ho ; et al. | 2018-08-23 |
Precursors Of Manganese And Manganese-Based Compounds For Copper Diffusion Barrier Layers And Methods Of Use
App 20180204721 - Liu; Feng Q. ; et al. | 2018-07-19 |
Doping control of metal nitride films
Grant 10,008,412 - Lakshmanan , et al. June 26, 2 | 2018-06-26 |
Methods of depositing cobalt manganese films
Grant 9,953,926 - Yu , et al. April 24, 2 | 2018-04-24 |
Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use
Grant 9,916,975 - Liu , et al. March 13, 2 | 2018-03-13 |
Doping Control of Metal Nitride Films
App 20170256448 - Lakshmanan; Annamalai ; et al. | 2017-09-07 |
Doping control of metal nitride films
Grant 9,659,814 - Lakshmanan , et al. May 23, 2 | 2017-05-23 |
Precursors Of Manganese And Manganese-Based Compounds For Copper Diffusion Barrier Layers And Methods Of Use
App 20160181150 - Liu; Feng Q. ; et al. | 2016-06-23 |
High Through-put And Low Temperature Ald Copper Deposition And Integration
App 20160032455 - Liu; Feng Q. ; et al. | 2016-02-04 |
Cobalt Manganese Vapor Phase Deposition
App 20150194384 - Yu; Sang Ho ; et al. | 2015-07-09 |
Doping Control of Metal Nitride Films
App 20140220772 - Lakshmanan; Annamalai ; et al. | 2014-08-07 |
Wiggling control for pseudo-hardmask
Grant 8,470,126 - Sheu , et al. June 25, 2 | 2013-06-25 |
Wiggling Control For Pseudo-hardmask
App 20130020026 - Sheu; Ben-Li ; et al. | 2013-01-24 |
Method for reducing line width roughness with plasma pre-etch treatment on photoresist
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Wiggling control for pseudo-hardmask
Grant 8,304,262 - Sheu , et al. November 6, 2 | 2012-11-06 |
Wiggling Control For Pseudo-hardmask
App 20120214310 - Sheu; Ben-Li ; et al. | 2012-08-23 |
Method For Reducing Line Width Roughness With Plasma Pre-etch Treatment On Photoresist
App 20110117749 - SHEU; Ben-Li ; et al. | 2011-05-19 |
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