Sherstinsky; Semyon
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sherstinsky; Semyon.The latest application filed is for "detachable electrostatic chuck for supporting a substrate in a process chamber".
- Sherstinsky; Semyon - San Francisco CA
| Patent | Date |
|---|---|
| Detachable electrostatic chuck for supporting a substrate in a process chamber Grant 7,907,384 - Brown , et al. March 15, 2 | 2011-03-15 |
| Detachable electrostatic chuck Grant 7,697,260 - Brown , et al. April 13, 2 | 2010-04-13 |
| Detachable electrostatic chuck for supporting a substrate in a process chamber App 20090201622 - Brown; Karl ; et al. | 2009-08-13 |
| Detachable electrostatic chuck for supporting a substrate in a process chamber Grant 7,480,129 - Brown , et al. January 20, 2 | 2009-01-20 |
| Pedestal with integral shield Grant 7,252,737 - Brown , et al. August 7, 2 | 2007-08-07 |
| Physical vapor deposition plasma reactor with VHF source power applied through the workpiece Grant 7,244,344 - Brown , et al. July 17, 2 | 2007-07-17 |
| Physical vapor deposition plasma reactor with VHF source power applied through the workpiece App 20060169576 - Brown; Karl M. ; et al. | 2006-08-03 |
| Detachable electrostatic chuck for supporting a substrate in a process chamber App 20060002053 - Brown; Karl ; et al. | 2006-01-05 |
| Detachable electrostatic chuck App 20050219786 - Brown, Karl ; et al. | 2005-10-06 |
| Pedestal with integral shield App 20050056370 - Brown, Karl ; et al. | 2005-03-17 |
| Lower pedestal shield Grant 6,837,968 - Brown , et al. January 4, 2 | 2005-01-04 |
| Lower pedestal shield App 20040083977 - Brown, Karl ; et al. | 2004-05-06 |
| Pedestal with integral shield Grant 6,726,805 - Brown , et al. April 27, 2 | 2004-04-27 |
| Pedestal with integral shield Grant 6,652,713 - Brown , et al. November 25, 2 | 2003-11-25 |
| Method of fabricating an electrostatic chuck Grant 6,557,248 - Shamouilian , et al. May 6, 2 | 2003-05-06 |
| Pedestal with integral shield App 20030029564 - Brown, Karl ; et al. | 2003-02-13 |
| Pedestal with integral shield App 20030029568 - Brown, Karl ; et al. | 2003-02-13 |
| Substrate support member for a processing chamber Grant 6,464,795 - Sherstinsky , et al. October 15, 2 | 2002-10-15 |
| Substrate support member Grant 6,464,790 - Sherstinsky , et al. October 15, 2 | 2002-10-15 |
| Heater for processing chamber Grant 6,350,320 - Sherstinsky , et al. February 26, 2 | 2002-02-26 |
| Electrostatic chuck with improved temperature control and puncture resistance Grant 6,278,600 - Shamouilian , et al. August 21, 2 | 2001-08-21 |
| Etch chamber Grant 6,270,621 - Tam , et al. August 7, 2 | 2001-08-07 |
| Apparatus and method for delivering a gas Grant 6,248,176 - Yudovsky , et al. June 19, 2 | 2001-06-19 |
| Apparatus and method for delivering a gas Grant 5,985,033 - Yudovsky , et al. November 16, 1 | 1999-11-16 |
| Electrostatic chuck with fluid flow regulator Grant 5,883,778 - Sherstinsky , et al. March 16, 1 | 1999-03-16 |
| Method of making electrostatic chuck with conformal insulator film Grant 5,753,132 - Shamouilian , et al. May 19, 1 | 1998-05-19 |
| Electrostatic chuck with conformal insulator film Grant 5,745,331 - Shamouilian , et al. April 28, 1 | 1998-04-28 |
| Apparatus for improving wafer and chuck edge protection Grant 5,740,009 - Pu , et al. April 14, 1 | 1998-04-14 |
| Apparatus for centering substrates on support members Grant 5,673,922 - Sherstinsky , et al. October 7, 1 | 1997-10-07 |
| Electrostatic chuck Grant 5,671,117 - Sherstinsky , et al. September 23, 1 | 1997-09-23 |
| Method of making a dielectric chuck Grant 5,634,266 - Sherstinsky , et al. June 3, 1 | 1997-06-03 |
| Compound clamp ring for semiconductor wafers Grant 5,421,401 - Sherstinsky , et al. June 6, 1 | 1995-06-06 |
| Clamping ring and susceptor therefor Grant 5,326,725 - Sherstinsky , et al. July 5, 1 | 1994-07-05 |
| Clamping ring apparatus for processing semiconductor wafers Grant 5,316,278 - Sherstinsky , et al. May 31, 1 | 1994-05-31 |
| Plasma etching apparatus with conductive means for inhibiting arcing Grant 5,292,399 - Lee , et al. March 8, 1 | 1994-03-08 |
| Bearing unloading mechanism for disc clamping unit Grant 4,627,288 - Guzik , et al. December 9, 1 | 1986-12-09 |
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