Sherman; Steven Robert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sherman; Steven Robert.The latest application filed is for "etch rate modulation through ion implantation".
- Sherman; Steven Robert - Newton MA
| Patent | Date |
|---|---|
| Etch rate modulation through ion implantation Grant 10,332,748 - Prasad , et al. | 2019-06-25 |
| Etch Rate Modulation Through Ion Implantation App 20180182636 - Prasad; Rajesh ; et al. | 2018-06-28 |
| Etch rate modulation through ion implantation Grant 9,934,982 - Prasad , et al. April 3, 2 | 2018-04-03 |
| Etch Rate Modulation Through Ion Implantation App 20170178914 - Prasad; Rajesh ; et al. | 2017-06-22 |
| Method for improving critical dimension variability by implanting argon or silicon ions into a patterned mask Grant 9,613,813 - Sherman , et al. April 4, 2 | 2017-04-04 |
| Method For Improving Critical Dimension Variability App 20160133467 - Sherman; Steven Robert ; et al. | 2016-05-12 |
| Workpiece Processing Method And Apparatus App 20160111254 - Evans; Morgan D. ; et al. | 2016-04-21 |
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