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Patent applications and USPTO patent grants for Sheng; Han-Ming.The latest application filed is for "damascene method employing multi-layer etch stop layer".
Patent | Date |
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Damascene method employing multi-layer etch stop layer Grant 6,734,116 - Guo , et al. May 11, 2 | 2004-05-11 |
Damascene method employing multi-layer etch stop layer App 20030134521 - Guo, Cheng-Cheng ;   et al. | 2003-07-17 |
System to position defect location on production wafers Grant 6,477,265 - Sheng November 5, 2 | 2002-11-05 |
Frame layout to monitor overlay performance of chip composed of multi-exposure images Grant 6,330,355 - Chen , et al. December 11, 2 | 2001-12-11 |
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