Patent | Date |
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Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20070238399 - Tolles; Robert D. ;   et al. | 2007-10-11 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,255,632 - Tolles , et al. August 14, 2 | 2007-08-14 |
Polishing apparatus having a trough Grant 7,238,090 - Tolles , et al. July 3, 2 | 2007-07-03 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20060194525 - Tolles; Robert D. ;   et al. | 2006-08-31 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,097,544 - Tolles , et al. August 29, 2 | 2006-08-29 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20050048880 - Tolles, Robert D. ;   et al. | 2005-03-03 |
Carrier head for a chemical mechanical polishing apparatus Grant 6,503,134 - Shendon January 7, 2 | 2003-01-07 |
Carrier head for a chemical mechanical polishing apparatus App 20010044268 - Shendon, Norm | 2001-11-22 |
Circumferentially oscillating carousel apparatus for sequentially polishing substrates Grant 6,136,715 - Shendon , et al. October 24, 2 | 2000-10-24 |
System for chemical mechanical polishing having multiple polishing stations Grant 6,126,517 - Tolles , et al. October 3, 2 | 2000-10-03 |
Underwater wafer storage and wafer picking for chemical mechanical polishing Grant 6,080,046 - Shendon , et al. June 27, 2 | 2000-06-27 |
Carrier head for a chemical/mechanical polishing apparatus and method of polishing Grant 6,019,671 - Shendon February 1, 2 | 2000-02-01 |
Substrate belt polisher Grant 5,961,372 - Shendon October 5, 1 | 1999-10-05 |
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning Grant 5,951,373 - Shendon , et al. September 14, 1 | 1999-09-14 |
Head for a chemical mechanical polishing apparatus Grant 5,913,718 - Shendon June 22, 1 | 1999-06-22 |
Method and apparatus for using a retaining ring to control the edge effect Grant 5,795,215 - Guthrie , et al. August 18, 1 | 1998-08-18 |
Continuous processing system for chemical mechanical polishing Grant 5,738,574 - Tolles , et al. April 14, 1 | 1998-04-14 |
Apparatus and method for distribution of slurry in a chemical mechanical polishing system Grant 5,709,593 - Guthrie , et al. January 20, 1 | 1998-01-20 |
Carrier head design for a chemical mechanical polishing apparatus Grant 5,681,215 - Sherwood , et al. October 28, 1 | 1997-10-28 |
Chemical mechanical polishing apparatus with improved polishing control Grant 5,643,053 - Shendon July 1, 1 | 1997-07-01 |
Orbital chemical mechanical polishing apparatus and method Grant 5,582,534 - Shendon , et al. December 10, 1 | 1996-12-10 |
Wafer polisher head having floating retainer ring Grant 5,205,082 - Shendon , et al. April 27, 1 | 1993-04-27 |