| Patent | Date |
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Resistivity-based Adjustment Of Thresholds For In-situ Monitoring
App 20220043095 - Xu; Kun ; et al. | 2022-02-10 |
Temperature And Slurry Flow Rate Control In Cmp
App 20210402553 - Wu; Haosheng ; et al. | 2021-12-30 |
Resistivity-based adjustment of measurements from in-situ monitoring
Grant 11,199,605 - Xu , et al. December 14, 2 | 2021-12-14 |
Resistivity-based calibration of in-situ electromagnetic inductive monitoring
Grant 11,079,459 - Xu , et al. August 3, 2 | 2021-08-03 |
Polishing Apparatus Using Neural Network For Monitoring
App 20210229234 - Xu; Kun ; et al. | 2021-07-29 |
Core configuration with alternating posts for in-situ electromagnetic induction monitoring system
Grant 11,004,708 - Iravani , et al. May 11, 2 | 2021-05-11 |
Polishing apparatus using neural network for monitoring
Grant 10,994,389 - Xu , et al. May 4, 2 | 2021-05-04 |
Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing
Grant 10,589,397 - Duboust , et al. | 2020-03-17 |
Real time profile control for chemical mechanical polishing
Grant 10,562,148 - Shen , et al. Feb | 2020-02-18 |
Determination of gain for eddy current sensor
Grant 10,556,315 - Xu , et al. Feb | 2020-02-11 |
Core Configuration For In-situ Electromagnetic Induction Monitoring System
App 20190358770 - Iravani; Hassan G. ; et al. | 2019-11-28 |
Endpoint detection with compensation for filtering
Grant 10,427,272 - Xu , et al. October 1, 2 | 2019-10-01 |
Core configuration for in-situ electromagnetic induction monitoring system
Grant 10,391,610 - Iravani , et al. A | 2019-08-27 |
Overpolishing based on electromagnetic inductive monitoring of trench depth
Grant 10,350,723 - Shen , et al. July 16, 2 | 2019-07-16 |
Temperature Control of Chemical Mechanical Polishing
App 20190143476 - Wu; Haosheng ; et al. | 2019-05-16 |
Determination Of Gain For Eddy Current Sensor
App 20190134775 - Xu; Kun ; et al. | 2019-05-09 |
Determination of gain for eddy current sensor
Grant 10,207,386 - Xu , et al. Feb | 2019-02-19 |
Polishing Apparatus Using Neural Network For Monitoring
App 20180304435 - Xu; Kun ; et al. | 2018-10-25 |
Resistivity-based Calibration Of In-situ Electromagnetic Inductive Monitoring
App 20180203090 - Xu; Kun ; et al. | 2018-07-19 |
Resistivity-based Adjustment Of Measurements From In-situ Monitoring
App 20180203089 - Xu; Kun ; et al. | 2018-07-19 |
Core Configuration With Alternating Posts For In-situ Electromagnetic Induction Monitoring System
App 20180122667 - Iravani; Hassan G. ; et al. | 2018-05-03 |
Core Configuration For In-situ Electromagnetic Induction Monitoring System
App 20180111251 - Iravani; Hassan G. ; et al. | 2018-04-26 |
Real Time Profile Control For Chemical Mechanical Polishing
App 20180099374 - Shen; Shih-Haur ; et al. | 2018-04-12 |
Endpoint Detection With Compensation for Filtering
App 20180079052 - Xu; Kun ; et al. | 2018-03-22 |
Overpolishing Based On Electromagnetic Inductive Monitoring Of Trench Depth
App 20180079048 - Shen; Shih-Haur ; et al. | 2018-03-22 |
Endpoint Control Of Multiple Substrate Zones Of Varying Thickness In Chemical Mechanical Polishing
App 20170151647 - Duboust; Alain ; et al. | 2017-06-01 |
Adjusting eddy current measurements
Grant 9,636,797 - Xu , et al. May 2, 2 | 2017-05-02 |
Feedback control using detection of clearance and adjustment for uniform topography
Grant 9,472,475 - Xu , et al. October 18, 2 | 2016-10-18 |
Determination Of Gain For Eddy Current Sensor
App 20160158908 - Xu; Kun ; et al. | 2016-06-09 |
Determination of gain for eddy current sensor
Grant 9,281,253 - Xu , et al. March 8, 2 | 2016-03-08 |
Determination of gain for eddy current sensor
Grant 9,275,917 - Xu , et al. March 1, 2 | 2016-03-01 |
In-situ monitoring system with monitoring of elongated region
Grant 9,205,527 - Xu , et al. December 8, 2 | 2015-12-08 |
Adjusting Eddy Current Measurements
App 20150224623 - Xu; Kun ; et al. | 2015-08-13 |
High sensitivity eddy current monitoring system
Grant 9,023,667 - Iravani , et al. May 5, 2 | 2015-05-05 |
Determination Of Gain For Eddy Current Sensor
App 20150118765 - Xu; Kun ; et al. | 2015-04-30 |
Determination Of Gain For Eddy Current Sensor
App 20150118766 - Xu; Kun ; et al. | 2015-04-30 |
Endpoint Control Of Multiple Substrates Of Varying Thickness On The Same Platen In Chemical Mechanical Polishing
App 20140222188 - Duboust; Alain ; et al. | 2014-08-07 |
In-situ Monitoring System With Monitoring Of Elongated Region
App 20140127971 - Xu; Kun ; et al. | 2014-05-08 |
Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing
Grant 8,694,144 - Duboust , et al. April 8, 2 | 2014-04-08 |
Control Of Polishing Of Multiple Substrates On The Same Platen In Chemical Mechanical Polishing
App 20140030956 - Zhang; Jimin ; et al. | 2014-01-30 |
Feedback Control Using Detection Of Clearance And Adjustment For Uniform Topography
App 20130224890 - Xu; Kun ; et al. | 2013-08-29 |
Eddy Current Monitoring Of Metal Features
App 20120276662 - Iravani; Hassan G. ; et al. | 2012-11-01 |
Eddy Current Monitoring Of Metal Residue Or Metal Pillars
App 20120276817 - Iravani; Hassan G. ; et al. | 2012-11-01 |
High Sensitivity Eddy Current Monitoring System
App 20120276661 - Iravani; Hassan G. ; et al. | 2012-11-01 |
Endpoint Control Of Multiple Substrates Of Varying Thickness On The Same Platen In Chemical Mechanical Polishing
App 20120053717 - Duboust; Alain ; et al. | 2012-03-01 |
Method Of Soft Pad Preparation To Reduce Removal Rate Ramp-up Effect And To Stabilize Defect Rate
App 20090061743 - JEW; STEPHEN ; et al. | 2009-03-05 |
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