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Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate Grant 9,741,580 - Sipani , et al. August 22, 2 | 2017-08-22 |
Integrated Circuitry, Methods of Forming Capacitors, and Methods of Forming Integrated Circuitry Comprising an Array of Capacitors and Circuitry Peripheral to the Array App 20160027863 - Busch; Brett W. ;   et al. | 2016-01-28 |
Substrate Mask Patterns, Methods Of Forming A Structure On A Substrate, Methods Of Forming A Square Lattice Pattern From An Oblique Lattice Pattern, And Methods Of Forming A Pattern On A Substrate App 20150206760 - Sipani; Vishal ;   et al. | 2015-07-23 |
Integrated circuitry, methods of forming capacitors, and methods of forming integrated circuitry comprising an array of capacitors and circuitry peripheral to the array Grant 9,076,680 - Busch , et al. July 7, 2 | 2015-07-07 |
Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate Grant 8,999,852 - Sipani , et al. April 7, 2 | 2015-04-07 |
Method For Obtaining Extreme Selectivity Of Metal Nitrides And Metal Oxides App 20150031212 - Shea; Kevin R. | 2015-01-29 |
Methods of forming a pattern on a substrate Grant 8,889,559 - Trapp , et al. November 18, 2 | 2014-11-18 |
Method for obtaining extreme selectivity of metal nitrides and metal oxides Grant 8,883,591 - Shea November 11, 2 | 2014-11-11 |
Methods of forming capacitors Grant 8,853,050 - Kiehlbauch , et al. October 7, 2 | 2014-10-07 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material Grant 8,846,542 - Shea , et al. September 30, 2 | 2014-09-30 |
Methods of Forming A Pattern On A Substrate App 20140162459 - Trapp; Shane J. ;   et al. | 2014-06-12 |
Methods for Forming Semiconductor Constructions, and Methods for Selectively Etching Silicon Nitride Relative to Conductive Material App 20140162430 - Shea; Kevin R. ;   et al. | 2014-06-12 |
Substrate Mask Patterns, Methods Of Forming A Structure On A Substrate, Methods Of Forming A Square Lattice Pattern From An Oblique Lattice Pattern, And Methods Of Forming A Pattern On A Substrate App 20140162457 - Sipani; Vishal ;   et al. | 2014-06-12 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material Grant 8,691,704 - Shea , et al. April 8, 2 | 2014-04-08 |
Semiconductor devices and structures including at least partially formed container capacitors Grant 8,692,305 - Busch , et al. April 8, 2 | 2014-04-08 |
Methods of forming capacitors Grant 8,623,725 - Kiehlbauch , et al. January 7, 2 | 2014-01-07 |
Methods for Forming Semiconductor Constructions, and Methods for Selectively Etching Silicon Nitride Relative to Conductive Material App 20130252398 - Shea; Kevin R. ;   et al. | 2013-09-26 |
Method For Obtaining Extreme Selectivity Of Metal Nitrides And Metal Oxides App 20130244426 - Shea; Kevin R. | 2013-09-19 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material Grant 8,470,716 - Shea , et al. June 25, 2 | 2013-06-25 |
Methods of forming a plurality of capacitors Grant 8,450,164 - Bhat , et al. May 28, 2 | 2013-05-28 |
Method for obtaining extreme selectivity of metal nitrides and metal oxides Grant 8,440,525 - Shea May 14, 2 | 2013-05-14 |
Integrated Circuitry, Methods Of Forming Capacitors, And Methods Of Forming Integrated Circuitry Comprising An Array Of Capacitors And Circuitry Peripheral To The Array App 20130093050 - Busch; Brett W. ;   et al. | 2013-04-18 |
Methods of Forming Capacitors App 20130005111 - Kiehlbauch; Mark ;   et al. | 2013-01-03 |
Methods of making capacitors Grant 8,268,695 - Kiehlbauch , et al. September 18, 2 | 2012-09-18 |
Methods of forming a plurality of capacitors Grant 8,263,457 - Bhat , et al. September 11, 2 | 2012-09-11 |
Method For Obtaining Extreme Selectivity Of Metal Nitrides And Metal Oxides App 20120214306 - Shea; Kevin R. | 2012-08-23 |
Methods of forming capacitors Grant 8,241,987 - Kiehlbauch , et al. August 14, 2 | 2012-08-14 |
Methods of forming a plurality of capacitors Grant 8,129,240 - Bhat , et al. March 6, 2 | 2012-03-06 |
Methods for Forming Semiconductor Constructions, and Methods for Selectively Etching Silicon Nitride Relative to Conductive Material App 20120052650 - Shea; Kevin R. ;   et al. | 2012-03-01 |
Methods of etching oxide, reducing roughness, and forming capacitor constructions Grant 8,124,545 - Rana , et al. February 28, 2 | 2012-02-28 |
Semiconductor Devices And Structures Including At Least Partially Formed Container Capacitors App 20120043596 - Busch; Brett ;   et al. | 2012-02-23 |
Selective etching of oxides to metal nitrides and metal oxides Grant 8,119,537 - Shea , et al. February 21, 2 | 2012-02-21 |
Methods of Forming a Plurality of Capacitors App 20120034753 - Bhat; Vishwanath ;   et al. | 2012-02-09 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material Grant 8,076,248 - Shea , et al. December 13, 2 | 2011-12-13 |
Semiconductor devices and structures including at least partially formed container capacitors and methods of forming the same Grant 8,058,126 - Busch , et al. November 15, 2 | 2011-11-15 |
Methods of Forming Capacitors App 20110214266 - Kiehlbauch; Mark ;   et al. | 2011-09-08 |
Methods of forming capacitors Grant 7,964,471 - Kiehlbauch , et al. June 21, 2 | 2011-06-21 |
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Methods of Forming a Plurality of Capacitors App 20100311219 - Bhat; Vishwanath ;   et al. | 2010-12-09 |
Method to address carbon incorporation in an interpoly oxide Grant 7,824,505 - Rana , et al. November 2, 2 | 2010-11-02 |
Method to address carbon incorporation in an interpoly oxide Grant 7,806,988 - Rana , et al. October 5, 2 | 2010-10-05 |
Methods of Etching Oxide, Reducing Roughness, and Forming Capacitor Constructions App 20100221916 - Rana; Niraj B. ;   et al. | 2010-09-02 |
Methods of forming a plurality of capacitors Grant 7,785,962 - Bhat , et al. August 31, 2 | 2010-08-31 |
Semiconductor Devices And Structures Including At Least Partially Formed Container Capacitors And Methods Of Forming The Same App 20100193853 - Busch; Brett ;   et al. | 2010-08-05 |
Methods Of Forming A Plurality Of Capacitors App 20100151653 - Bhat; Vishwanath ;   et al. | 2010-06-17 |
Methods of etching oxide, reducing roughness, and forming capacitor constructions Grant 7,713,885 - Rana , et al. May 11, 2 | 2010-05-11 |
Methods For Forming Semiconductor Constructions, And Methods For Selectively Etching Silicon Nitride Relative To Conductive Material App 20100105186 - Shea; Kevin R. ;   et al. | 2010-04-29 |
Methods of removing metal-containing materials Grant 7,683,022 - Shea , et al. March 23, 2 | 2010-03-23 |
Methods of removing metal-containing materials Grant 7,683,020 - Shea , et al. March 23, 2 | 2010-03-23 |
Methods of forming a plurality of capacitors Grant 7,682,924 - Bhat , et al. March 23, 2 | 2010-03-23 |
Methods of removing metal-containing materials Grant 7,683,021 - Shea , et al. March 23, 2 | 2010-03-23 |
Double-sided container capacitors using a sacrificial layer Grant 7,667,258 - Sandhu , et al. February 23, 2 | 2010-02-23 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material Grant 7,666,797 - Shea , et al. February 23, 2 | 2010-02-23 |
Methods Of Making Capacitors, DRAM Arrays and Electronic Systems App 20100041204 - Kiehlbauch; Mark ;   et al. | 2010-02-18 |
Semiconductor fabrication processes Grant 7,642,196 - Shea , et al. January 5, 2 | 2010-01-05 |
Methods of Forming a Plurality of Capacitors App 20090047769 - Bhat; Vishwanath ;   et al. | 2009-02-19 |
Methods of forming capacitors Grant 7,465,627 - Derderian , et al. December 16, 2 | 2008-12-16 |
Reduced cell-to-cell shorting for memory arrays Grant 7,452,770 - Shea November 18, 2 | 2008-11-18 |
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Methods of forming a plurality of capacitors App 20080206950 - Bhat; Vishwanath ;   et al. | 2008-08-28 |
Methods of removing metal-containing materials Grant 7,368,416 - Shea , et al. May 6, 2 | 2008-05-06 |
Method For Obtaining Extreme Selectivity Of Metal Nitrides And Metal Oxides App 20080099817 - Shea; Kevin R. | 2008-05-01 |
Methods for forming semiconductor constructions, and methods for selectively etching silicon nitride relative to conductive material App 20080045034 - Shea; Kevin R. ;   et al. | 2008-02-21 |
Double-sided container capacitors using a sacrificial layer Grant 7,329,576 - Sandhu , et al. February 12, 2 | 2008-02-12 |
Method for obtaining extreme selectivity of metal nitrides and metal oxides Grant 7,312,120 - Shea December 25, 2 | 2007-12-25 |
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor Grant 7,276,455 - Shea October 2, 2 | 2007-10-02 |
Methods of removing metal-containing materials Grant 7,244,682 - Shea , et al. July 17, 2 | 2007-07-17 |
Reduced Cell-to-cell Shorting For Memory Arrays App 20070131995 - Shea; Kevin R. | 2007-06-14 |
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Semiconductor constructions App 20070117347 - Wang; Hongmei ;   et al. | 2007-05-24 |
Semiconductor processing methods, and semiconductor constructions App 20060292787 - Wang; Hongmei ;   et al. | 2006-12-28 |
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor App 20060283837 - Shea; Kevin R. | 2006-12-21 |
Method to address carbon incorporation in an interpoly oxide App 20060260646 - Rana; Niraj ;   et al. | 2006-11-23 |
Methods of removing metal-containing materials App 20060258165 - Shea; Kevin R. ;   et al. | 2006-11-16 |
Methods of removing metal-containing materials App 20060258167 - Shea; Kevin R. ;   et al. | 2006-11-16 |
Methods of forming capacitors App 20060258085 - Derderian; Garo J. ;   et al. | 2006-11-16 |
Methods of etching oxide, reducing roughness, and forming capacitor constructions App 20060258169 - Rana; Niraj B. ;   et al. | 2006-11-16 |
Methods of removing metal-containing materials App 20060258168 - Shea; Kevin R. ;   et al. | 2006-11-16 |
Methods of removing metal-containing materials App 20060258166 - Shea; Kevin R. ;   et al. | 2006-11-16 |
Methods of forming capacitors Grant 7,122,422 - Derderian , et al. October 17, 2 | 2006-10-17 |
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor Grant 7,115,527 - Shea October 3, 2 | 2006-10-03 |
Reduced cell-to-cell shorting for memory arrays Grant 7,091,085 - Shea August 15, 2 | 2006-08-15 |
Semiconductor fabrication processes App 20060177988 - Shea; Kevin R. ;   et al. | 2006-08-10 |
Method to address carbon incorporation in an interpoly oxide App 20060065286 - Rana; Niraj ;   et al. | 2006-03-30 |
Method for obtaining extreme selectivity of metal nitrides and metal oxides App 20060043451 - Shea; Kevin R. | 2006-03-02 |
Double-sided container capacitors using a sacrificial layer App 20060046419 - Sandhu; Gurtej S. ;   et al. | 2006-03-02 |
Selective etching of oxides to metal nitrides and metal oxides App 20060046513 - Shea; Kevin R. ;   et al. | 2006-03-02 |
Methods Of Forming Capacitors App 20060019461 - Derderian; Garo J. ;   et al. | 2006-01-26 |
Methods of etching an aluminum oxide comprising substrate, and methods of forming a capacitor App 20060011587 - Shea; Kevin R. | 2006-01-19 |
Method of etching nitrides App 20060011586 - Shea; Kevin R. | 2006-01-19 |
Reduced cell-to-cell shorting for memory arrays App 20050260813 - Shea, Kevin R. | 2005-11-24 |
Methods of removing metal-containing materials App 20050250339 - Shea, Kevin R. ;   et al. | 2005-11-10 |
Reduced cell-to-cell shorting for memory arrays App 20050106809 - Shea, Kevin R. | 2005-05-19 |