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Spatial Monitoring And Control Of Plasma Processing Environments
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Spatial monitoring and control of plasma processing environments
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Match Efficiency-variation Compensation
App 20220181121 - Shaw; Denis ; et al. | 2022-06-09 |
Systems And Methods Combining Match Networks And Frequency Tuning
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Spatial monitoring and control of plasma processing environments
Grant 11,282,677 - Shaw , et al. March 22, 2 | 2022-03-22 |
Application of modulating supplies in a plasma processing system
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Spatial Monitoring And Control Of Plasma Processing Environments
App 20210241996 - Carter; Daniel ; et al. | 2021-08-05 |
Synchronization Between An Excitation Source And A Substrate Bias Supply
App 20210134562 - Fairbairn; Kevin ; et al. | 2021-05-06 |
Application Of Modulating Supplies In A Plasma Processing System
App 20210074513 - Van Zyl; Gideon ; et al. | 2021-03-11 |
Synchronization between an excitation source and a substrate bias supply
Grant 10,896,807 - Fairbairn , et al. January 19, 2 | 2021-01-19 |
Spatial Monitoring And Control Of Plasma Processing Environments
App 20210005428 - Shaw; Denis ; et al. | 2021-01-07 |
Synchronization with a bias supply in a plasma processing system
Grant 10,811,229 - Van Zyl , et al. October 20, 2 | 2020-10-20 |
Application of modulating supplies in a plasma processing system
Grant 10,811,227 - Van Zyl , et al. October 20, 2 | 2020-10-20 |
Control of plasma processing systems that include plasma modulating supplies
Grant 10,811,228 - Van Zyl , et al. October 20, 2 | 2020-10-20 |
Spatial and temporal control of ion bias voltage for plasma processing
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Synchronization Between An Excitation Source And A Substrate Bias Supply
App 20200203128 - Fairbairn; Kevin ; et al. | 2020-06-25 |
Synchronized pulsing of plasma processing source and substrate bias
Grant 10,607,813 - Fairbairn , et al. | 2020-03-31 |
Synchronization With A Bias Supply In A Plasma Processing System
App 20190172685 - Van Zyl; Gideon ; et al. | 2019-06-06 |
Synchronized Pulsing Of Plasma Processing Source And Substrate Bias
App 20190157040 - Fairbairn; Kevin ; et al. | 2019-05-23 |
Spatial And Temporal Control Of Ion Bias Voltage For Plasma Processing
App 20190157043 - Shaw; Denis ; et al. | 2019-05-23 |
Application Of Modulating Supplies In A Plasma Processing System
App 20190157041 - Zyl; Gideon Van ; et al. | 2019-05-23 |
Control Of Plasma Processing Systems That Include Plasma Modulating Supplies
App 20190157042 - Van Zyl; Gideon ; et al. | 2019-05-23 |
Apparatus for frequency tuning in a RF generator
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Apparatus for Frequency Tuning in a RF Generator
App 20170323771 - Choi; Myeong Yeol ; et al. | 2017-11-09 |
Apparatus for frequency tuning in a RF generator
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Method and apparatus for preventing the formation of a plasma-inhibiting substance
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Method And Apparatus For Preventing The Formation Of A Plasma-inhibiting Substance
App 20080127893 - Tomasel; Fernando Gustavo ; et al. | 2008-06-05 |
Method of cleaning ion source, and corresponding apparatus/system
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Method of cleaning ion source, and corresponding apparatus/system
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