SHAO; Shouqian

Patent Applications and Registrations

Patent applications and USPTO patent grants for SHAO; Shouqian.The latest application filed is for "methods of tuning to improve plasma stability".

Company Profile

4.20.35

SHAO; Shouqian - Fremont CA
Shao; ShouQian - US
Shao; ShouQian - Saratoga CA US
Shao; ShouQian - Boston MA
Shao; Shouqian - Winchester MA
Shao; Shouqian - Kanagawa JP
Shao, Shouqian - Tsukui-Gun JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods Of Tuning To Improve Plasma Stability App 20220270858 - SHAO; Shouqian ; et al.	2022-08-25
Substrate Support For Chucking Of Mask For Deposition Processes App 20220122876 - CHEN; Jrjyan Jerry ; et al.	2022-04-21
Gas flow guide design for uniform flow distribution and efficient purge Grant 10,697,062 - Kao , et al.	2020-06-30
Gas Flow Guide Design For Uniform Flow Distribution And Efficient Purge App 20200017971 - KAO; Chien-Teh ; et al.	2020-01-16
Method And Solution For Resolving Cgt Mura Issue App 20190382891 - SHAO; Shouqian ; et al.	2019-12-19
Methods for selective etching of a multi-layer substrate Grant 9,330,928 - Tong , et al. May 3, 2	2016-05-03
High metal ionization sputter gun Grant 9,175,382 - Yang , et al. November 3, 2	2015-11-03
Methods and Apparatus for Combinatorial PECVD or PEALD App 20150184298 - Shao; ShouQian ; et al.	2015-07-02
Methods and apparatus for combinatorial PECVD or PEALD Grant 9,023,438 - Shao , et al. May 5, 2	2015-05-05
Combinatorial RF bias method for PVD Grant 8,974,649 - Shao , et al. March 10, 2	2015-03-10
Systems and methods for measuring, monitoring and controlling ozone concentration Grant 8,925,481 - Shao , et al. January 6, 2	2015-01-06
Systems and methods for measuring, monitoring and controlling ozone concentration Grant 8,851,010 - Shao , et al. October 7, 2	2014-10-07
Method and apparatus for high-K gate performance improvement and combinatorial processing Grant 8,821,985 - Shao , et al. September 2, 2	2014-09-02
In Situ Sputtering Target Measurement App 20140183036 - Shao; ShouQian ; et al.	2014-07-03
Multi-Piece Target and Magnetron to Prevent Sputtering of Target Backing Materials App 20140174921 - Yang; Hong Sheng ; et al.	2014-06-26
Methods and Apparatus for Combinatorial PECVD or PEALD App 20140170335 - Shao; ShouQian ; et al.	2014-06-19
Showerhead for processing chamber Grant 8,733,280 - Yap , et al. May 27, 2	2014-05-27
Control Methods and Hardware Configurations for Ozone Delivery Systems App 20140130922 - Shao; ShouQian ; et al.	2014-05-15
Combinatorial Site Isolated Plasma Assisted Deposition App 20140134849 - Niyogi; Sandip ; et al.	2014-05-15
Method and Apparatus for High-K Gate Performance Improvement and Combinatorial Processing App 20140127422 - Shao; ShouQian ; et al.	2014-05-08
New Magnet Design Which Improves Erosion Profile for PVD Systems App 20140124359 - Shao; ShouQian ; et al.	2014-05-08
Methods For Selective Etching Of A Multi-Layer Substrate App 20140077147 - Tong; Jinhong ; et al.	2014-03-20
Methods for selective etching of a multi-layer substrate Grant 8,613,863 - Tong , et al. December 24, 2	2013-12-24
Method Of Enabling And Controlling Ozone Concentration And Flow App 20130270103 - Shao; ShouQian ; et al.	2013-10-17
Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing App 20130168231 - Yang; Hong Sheng ; et al.	2013-07-04
Combinatorial Processing Using A Remote Plasma Source App 20130153536 - Shao; ShouQian ; et al.	2013-06-20
Combinatorial Rf Bias Method For Pvd App 20130149469 - Shao; ShouQian ; et al.	2013-06-13
Methods For Selective Etching Of A Multi-layer Substrate App 20130137275 - Tong; Jinhong ; et al.	2013-05-30
High Metal Ionization Sputter Gun App 20130101750 - Yang; Hong Sheng ; et al.	2013-04-25
Systems and Methods for Measuring, Monitoring and Controlling Ozone Concentration App 20130092084 - Shao; ShouQian ; et al.	2013-04-18
Systems and Methods for Measuring, Monitoring and Controlling Ozone Concentration App 20130091926 - Shao; ShouQian ; et al.	2013-04-18
Showerhead for Processing Chamber App 20120156877 - Yap; Lipyeow ; et al.	2012-06-21
Particle trap for a plasma source Grant 7,914,603 - Shajii , et al. March 29, 2	2011-03-29
Particle Trap For A Plasma Source App 20090320677 - Shajii; Ali ; et al.	2009-12-31
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Grant 7,501,600 - Holber , et al. March 10, 2	2009-03-10
Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel App 20070145023 - Holber; William M. ; et al.	2007-06-28
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel App 20050145173 - Holber, William M. ; et al.	2005-07-07
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Grant 6,872,909 - Holber , et al. March 29, 2	2005-03-29
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel App 20040206730 - Holber, William M. ; et al.	2004-10-21
Heat treatment apparatus having a thin light-transmitting window Grant 6,437,290 - Shao , et al. August 20, 2	2002-08-20
Heat treatment apparatus having a thin light-transmitting window App 20020030047 - Shao, Shouqian ; et al.	2002-03-14

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