SHAO; Shou-Qian
Patent Applications and Registrations
Patent applications and USPTO patent grants for SHAO; Shou-Qian.The latest application filed is for "ultraviolet-ray-assisted processing apparatus for semiconductor process".
- SHAO; Shou-Qian - Winchester MA
| Patent | Date |
|---|---|
| Ultraviolet-ray-assisted Processing Apparatus For Semiconductor Process App 20080127895 - SHAO; Shou-Qian ; et al. | 2008-06-05 |
| Oxygen conditioning of plasma vessels App 20080083701 - Shao; Shou-Qian ; et al. | 2008-04-10 |
| Oxygen Conditioning Of Plasma Vessels App 20080083609 - Shao; Shou-Qian ; et al. | 2008-04-10 |
| Sheet type heat treating apparatus and method for processing semiconductors Grant 7,029,505 - Sha , et al. April 18, 2 | 2006-04-18 |
| Sheet type heat treating device and method for processing semiconductors App 20050260835 - Sha, Lin ; et al. | 2005-11-24 |
| Ultraviolet ray assisted processing device for semiconductor processing App 20040149215 - Shao, Shou-Qian ; et al. | 2004-08-05 |
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