| Patent | Date |
|---|
Manifold valve for multiple precursors
Grant 11,427,908 - Shanbhag , et al. August 30, 2 | 2022-08-30 |
Film Stack Simplification For High Aspect Ratio Patterning And Vertical Scaling
App 20220051938 - Wu; Hui-Jung ; et al. | 2022-02-17 |
Selective Deposition Of Etch-stop Layer For Enhanced Patterning
App 20210358753 - Shankar; Nagraj ; et al. | 2021-11-18 |
Nitride Films With Improved Etch Selectivity For 3d Nand Integration
App 20210320004 - Subramonium; Pramod ; et al. | 2021-10-14 |
Selective deposition of etch-stop layer for enhanced patterning
Grant 11,094,542 - Shankar , et al. August 17, 2 | 2021-08-17 |
Selective deposition with atomic layer etch reset
Grant 10,998,187 - Reddy , et al. May 4, 2 | 2021-05-04 |
Manifold Valve For Multiple Precursors
App 20210040611 - Shanbhag; Damodar Rajaram ; et al. | 2021-02-11 |
Substrate processing chamber with showerhead having cooled faceplate
Grant 10,900,124 - Shanbhag , et al. January 26, 2 | 2021-01-26 |
Deposition of aluminum oxide etch stop layers
Grant 10,804,144 - Rainville , et al. October 13, 2 | 2020-10-13 |
Showerhead with air-gapped plenums and overhead isolation gas distributor
Grant 10,745,806 - Shankar , et al. A | 2020-08-18 |
Deposition Of Aluminum Oxide Etch Stop Layers
App 20200251384 - Kind Code | 2020-08-06 |
Selective Deposition Of Etch-stop Layer For Enhanced Patterning
App 20200168466 - Shankar; Nagraj ; et al. | 2020-05-28 |
Deposition of Aluminum oxide etch stop layers
Grant 10,665,501 - Rainville , et al. | 2020-05-26 |
Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing
Grant 10,651,080 - Rainville , et al. | 2020-05-12 |
Pre-treatment method to improve selectivity in a selective deposition process
Grant 10,643,889 - Hausmann , et al. | 2020-05-05 |
Selective Deposition With Atomic Layer Etch Reset
App 20200118809 - Reddy; Kapu Sirish ; et al. | 2020-04-16 |
Staircase encapsulation in 3D NAND fabrication
Grant 10,580,690 - Yu , et al. | 2020-03-03 |
Showerhead With Air-gapped Plenums And Overhead Isolation Gas Distributor
App 20200063261 - Shankar; Nagraj ; et al. | 2020-02-27 |
Selective deposition of etch-stop layer for enhanced patterning
Grant 10,566,194 - Shankar , et al. Feb | 2020-02-18 |
Selective deposition with atomic layer etch reset
Grant 10,559,461 - Reddy , et al. Feb | 2020-02-11 |
Pre-treatment Method To Improve Selectivity In A Selective Deposition Process
App 20200043776 - HAUSMANN; Dennis ; et al. | 2020-02-06 |
Substrate Processing Chamber With Showerhead Having Cooled Faceplate
App 20190376183 - Shanbhag; Damodar Rajaram ; et al. | 2019-12-12 |
Showerhead With Air-gapped Plenums And Overhead Isolation Gas Distributor
App 20190352777 - Shankar; Nagraj ; et al. | 2019-11-21 |
Showerhead with air-gapped plenums and overhead isolation gas distributor
Grant 10,472,716 - Shankar , et al. Nov | 2019-11-12 |
Selective Deposition Of Etch-stop Layer For Enhanced Patterning
App 20190341256 - Shankar; Nagraj ; et al. | 2019-11-07 |
Composite dielectric interface layers for interconnect structures
Grant 10,418,236 - Reddy , et al. Sept | 2019-09-17 |
Liner and barrier applications for subtractive metal integration
Grant 10,199,235 - Wu , et al. Fe | 2019-02-05 |
Composite Dielectric Interface Layers For Interconnect Structures
App 20180342389 - Reddy; Kapu Sirish ; et al. | 2018-11-29 |
Staircase Encapsulation In 3d Nand Fabrication
App 20180330985 - Yu; Yongsik ; et al. | 2018-11-15 |
Selective Deposition With Atomic Layer Etch Reset
App 20180308680 - Reddy; Kapu Sirish ; et al. | 2018-10-25 |
Composite dielectric interface layers for interconnect structures
Grant 10,049,869 - Reddy , et al. August 14, 2 | 2018-08-14 |
Liner And Barrier Applications For Subtractive Metal Integration
App 20180211846 - Wu; Hui-Jung ; et al. | 2018-07-26 |
Deposition Of Aluminum Oxide Etch Stop Layers
App 20180197770 - Rainville; Meliha Gozde ; et al. | 2018-07-12 |
Staircase encapsulation in 3D NAND fabrication
Grant 10,002,787 - Yu , et al. June 19, 2 | 2018-06-19 |
Staircase Encapsulation In 3d Nand Fabrication
App 20180144977 - Yu; Yongsik ; et al. | 2018-05-24 |
Composite Dielectric Interface Layers For Interconnect Structures
App 20180096886 - Reddy; Kapu Sirish ; et al. | 2018-04-05 |
Liner and barrier applications for subtractive metal integration
Grant 9,899,234 - Wu , et al. February 20, 2 | 2018-02-20 |
Deposition of aluminum oxide etch stop layers
Grant 9,859,153 - Rainville , et al. January 2, 2 | 2018-01-02 |
Oxidizing Treatment Of Aluminum Nitride Films In Semiconductor Device Manufacturing
App 20170309514 - Rainville; Meliha Gozde ; et al. | 2017-10-26 |
Methods for formation of low-k aluminum-containing etch stop films
Grant 9,633,896 - Damjanovic , et al. April 25, 2 | 2017-04-25 |
Methods For Formation Of Low-k Aluminum-containing Etch Stop Films
App 20170103914 - Damjanovic; Daniel ; et al. | 2017-04-13 |
Selective formation of dielectric barriers for metal interconnects in semiconductor devices
Grant 9,418,889 - Mountsier , et al. August 16, 2 | 2016-08-16 |
Method and apparatus for purging and plasma suppression in a process chamber
Grant 9,399,228 - Breiling , et al. July 26, 2 | 2016-07-26 |
Sacrificial pre-metal dielectric for self-aligned contact scheme
Grant 9,379,210 - Mountsier , et al. June 28, 2 | 2016-06-28 |
Sacrificial Pre-metal Dielectric For Self-aligned Contact Scheme
App 20160071953 - Mountsier; Thomas Weller ; et al. | 2016-03-10 |
High Growth Rate Process For Conformal Aluminum Nitride
App 20160064211 - Swaminathan; Shankar ; et al. | 2016-03-03 |
Selective Formation Of Dielectric Barriers For Metal Interconnects In Semiconductor Devices
App 20150380302 - Mountsier; Thomas Weller ; et al. | 2015-12-31 |
Liner And Barrier Applications For Subtractive Metal Integration
App 20150380272 - Wu; Hui-Jung ; et al. | 2015-12-31 |
High growth rate process for conformal aluminum nitride
Grant 9,214,334 - Swaminathan , et al. December 15, 2 | 2015-12-15 |
Sacrificial pre-metal dielectric for self-aligned contact scheme
Grant 9,190,489 - Mountsier , et al. November 17, 2 | 2015-11-17 |
Methods and apparatus for selective deposition of cobalt in semiconductor processing
Grant 9,153,482 - Knisley , et al. October 6, 2 | 2015-10-06 |
High Growth Rate Process For Conformal Aluminum Nitride
App 20150235835 - Swaminathan; Shankar ; et al. | 2015-08-20 |
Methods And Apparatus For Selective Deposition Of Cobalt In Semiconductor Processing
App 20150221542 - Knisley; Thomas Joseph ; et al. | 2015-08-06 |
Metal And Silicon Containing Capping Layers For Interconnects
App 20140216336 - Yu; Jengyi ; et al. | 2014-08-07 |
Method And Apparatus For Purging And Plasma Suppression In A Process Chamber
App 20140217193 - Breiling; Patrick ; et al. | 2014-08-07 |
Metal and silicon containing capping layers for interconnects
Grant 8,753,978 - Yu , et al. June 17, 2 | 2014-06-17 |
Metal And Silicon Containing Capping Layers For Interconnects
App 20130143401 - Yu; Jengyi ; et al. | 2013-06-06 |
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