| Patent | Date |
|---|
Wafer processing device and method therefor
Grant 10,658,214 - Wang , et al. | 2020-05-19 |
Silicon wafer pre-alignment device and method therefor
Grant 10,276,418 - Sun , et al. | 2019-04-30 |
Adjusting device and adjusting method for exposure device
Grant 10,197,919 - Sun Fe | 2019-02-05 |
Exposure device and out-of-focus and tilt error compensation method
Grant 10,197,923 - Chen , et al. Fe | 2019-02-05 |
Halbach array and magnetic suspension damper using same
Grant 10,170,972 - Wu J | 2019-01-01 |
Silicon wafer edge protection device with collision protection function
Grant 10,041,548 - Huang , et al. August 7, 2 | 2018-08-07 |
Apparatus and Method for 3D Surface Inspection
App 20180195971 - Wang; Fan ; et al. | 2018-07-12 |
Reticle shape correction apparatus and photolithography tool using same
Grant 9,983,488 - Li , et al. May 29, 2 | 2018-05-29 |
Photolithographic illuminator device enabling controlled diffraction
Grant 9,933,703 - Plainchamp , et al. April 3, 2 | 2018-04-03 |
Magnetic alignment system and alignment method therefor
Grant 9,893,596 - Zhang , et al. February 13, 2 | 2018-02-13 |
Photolithographic illuminator that is telecentric in two directions
Grant 9,874,818 - Plainchamp , et al. January 23, 2 | 2018-01-23 |
Focusing leveling device
Grant 9,857,702 - Song , et al. January 2, 2 | 2018-01-02 |
Wafer Processing Device And Method Therefor
App 20170345696 - WANG; Gang ; et al. | 2017-11-30 |
Adjusting Device And Adjusting Method For Exposure Device
App 20170322493 - SUN; Jinglu | 2017-11-09 |
Planar motor rotor displacement measuring device and its measuring method
Grant 9,766,054 - Hu , et al. September 19, 2 | 2017-09-19 |
Reticle shape regulation device and method, and exposure apparatus using same
Grant 9,760,025 - Wang , et al. September 12, 2 | 2017-09-12 |
Lithography machine workpiece table and vertical position initialization method thereof
Grant 9,760,022 - Liao , et al. September 12, 2 | 2017-09-12 |
Negative stiffness system for gravity compensation of micropositioner
Grant 9,752,643 - Zhu , et al. September 5, 2 | 2017-09-05 |
Linear motor and stage apparatus
Grant 9,755,493 - Wu , et al. September 5, 2 | 2017-09-05 |
Exposure Device And Out-of-focus And Tilt Error Compensation Method
App 20170219935 - CHEN; Feibiao ; et al. | 2017-08-03 |
Laser Annealing Device
App 20170144251 - SONG; Chunfeng ; et al. | 2017-05-25 |
Balance mass system shared by workpiece table and mask table, and lithography machine
Grant 9,588,444 - Wang March 7, 2 | 2017-03-07 |
Lithography Machine Workpiece Table And Vertical Position Initialization Method Thereof
App 20170017168 - LIAO; Feihong ; et al. | 2017-01-19 |
Flat Voice Coil Motor
App 20160380524 - DUAN; Subing ; et al. | 2016-12-29 |
Method for measuring and calibrating centroid of coarse stage of photolithography tool
Grant 9,519,231 - Wu , et al. December 13, 2 | 2016-12-13 |
Silicon Wafer Edge Protection Device With Collision Protection Function
App 20160341256 - HUANG; Jingli ; et al. | 2016-11-24 |
Silicon Wafer Pre-alignment Device and Method Therefor
App 20160329229 - SUN; Weiwang ; et al. | 2016-11-10 |
Reticle Shape Correction Apparatus and Photolithography Tool Using Same
App 20160327873 - LI; Lingyu ; et al. | 2016-11-10 |
Focusing Leveling Device
App 20160327875 - SONG; Haijun ; et al. | 2016-11-10 |
Laser annealing apparatus and laser annealing method
Grant 9,455,164 - Zhang , et al. September 27, 2 | 2016-09-27 |
Off-axis alignment system and alignment method
Grant 9,448,488 - Zhang , et al. September 20, 2 | 2016-09-20 |
Halbach Array and Magnetic Suspension Damper Using Same
App 20160197544 - WU; Liwei | 2016-07-07 |
Reticle Shape Regulation Device and Method, and Exposure Apparatus Using Same
App 20160147163 - WANG; Xinxin ; et al. | 2016-05-26 |
Method for measuring displacement of planar motor rotor
Grant 9,310,782 - Zhu , et al. April 12, 2 | 2016-04-12 |
Method for measuring distortion of projection objective
Grant 9,256,138 - Fang , et al. February 9, 2 | 2016-02-09 |
Negative Stiffness System For Gravity Compensation Of Micropositioner
App 20150369331 - ZHU; Yu ; et al. | 2015-12-24 |
Warped Silicon-chip Adsorption Device And Adsorption Method Thereof
App 20150357217 - WANG; Xinxin ; et al. | 2015-12-10 |
Magnetic Alignment System And Alignment Method Therefor
App 20150340931 - ZHANG; Lin ; et al. | 2015-11-26 |
Interference exposure device and method
Grant 9,195,146 - Xu , et al. November 24, 2 | 2015-11-24 |
Backside alignment apparatus and method
Grant 9,188,434 - Xu , et al. November 17, 2 | 2015-11-17 |
Wafer Stage Having Function of Anti-Collision
App 20150311099 - Zhu; Yu ; et al. | 2015-10-29 |
Balance Mass System Shared by Workpiece Table and Mask Table, and Lithography Machine
App 20150286154 - Wang; Tianming | 2015-10-08 |
Off-Axis Alignment System and Alignment Method
App 20150261098 - Zhang; Pengli ; et al. | 2015-09-17 |
Photolithographic Illuminator Device Enabling Controlled Diffraction
App 20150248063 - Plainchamp; Bertrand ; et al. | 2015-09-03 |
Photolithographic Illuminator That Is Telecentric In Two Directions
App 20150234288 - Plainchamp; Bertrand ; et al. | 2015-08-20 |
Linear Motor And Stage Apparatus
App 20150137624 - Wu; Liwei ; et al. | 2015-05-21 |
Six-axis four-subdividing interferometer
Grant 9,036,155 - Chen , et al. May 19, 2 | 2015-05-19 |
Four-axis four-subdividing interferometer
Grant 9,036,154 - Cheng , et al. May 19, 2 | 2015-05-19 |
Method For Measuring Displacement Of Planar Motor Rotor
App 20150097508 - Zhu; Yu ; et al. | 2015-04-09 |
Projection objective lens system
Grant 8,970,964 - Zhu March 3, 2 | 2015-03-03 |
Laser Annealing Apparatus and Laser Annealing Method
App 20150037984 - Zhang; Jun ; et al. | 2015-02-05 |
Planar Motor Rotor Displacement Measuring Device And Its Measuring Method
App 20150012242 - Hu; Jinchun ; et al. | 2015-01-08 |
Split type aerostatic bearing
Grant 8,920,031 - Li , et al. December 30, 2 | 2014-12-30 |
Split type aerostatic bearing
Grant 08920031 - | 2014-12-30 |
Interference Exposure Device And Method
App 20140176925 - Xu; Qixin ; et al. | 2014-06-26 |
Four-axis Four-subdividing Interferometer
App 20140160489 - CHENG; Zhaogu ; et al. | 2014-06-12 |
Six-axis Four-subdividing Interferometer
App 20140125989 - CHEN; Jianfang ; et al. | 2014-05-08 |
Method For Measuring And Calibrating Centroid Of Coarse Stage Of Photolithography Tool
App 20140074428 - Wu; Liwei ; et al. | 2014-03-13 |
Split Type Aerostatic Bearing
App 20140016886 - Li; Jinchun ; et al. | 2014-01-16 |
Large Field Projection Objective For Lithography
App 20130293859 - Wu; Heng ; et al. | 2013-11-07 |
Projection Objective Lens System
App 20130250434 - Zhu; Lirong | 2013-09-26 |
Dual stage positioning and switching system
Grant 8,134,689 - Li , et al. March 13, 2 | 2012-03-13 |
Immersion flow field maintenance system for an immersion lithography machine
Grant 8,130,365 - Yang March 6, 2 | 2012-03-06 |
Method for in-situ aberration measurement of optical imaging system in lithographic tools
Grant 8,035,801 - Wang , et al. October 11, 2 | 2011-10-11 |
Precise positioning system for dual stage switching exposure
Grant 8,027,028 - Li , et al. September 27, 2 | 2011-09-27 |
Method For In-situ Aberration Measurement Of Optical Imaging System In Lithographic Tools
App 20100177294 - Wang; Fan ; et al. | 2010-07-15 |
Large-field unit-magnification projection optical system
Grant 7,746,571 - Li , et al. June 29, 2 | 2010-06-29 |
Immersion Flow Field Maintenance System For An Immersion Lithography Machine
App 20090273765 - Yang; Zhiyong | 2009-11-05 |
Precise Positioning System For Dual Stage Switching Exposure
App 20090219503 - Li; Yingsheng ; et al. | 2009-09-03 |
Large-field Unit-magnification Projection Optical System
App 20090185290 - Li; Tiejun ; et al. | 2009-07-23 |
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