Shang; Yao-Yuan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Shang; Yao-Yuan.The latest application filed is for "metrology method in wafer transportation".
- Shang; Yao-Yuan - Taichung TW
- SHANG; Yao-Yuan - Taichung City TW
| Patent | Date |
|---|---|
| Metrology method in wafer transportation Grant 11,387,123 - Huang , et al. July 12, 2 | 2022-07-12 |
| Metrology Method In Wafer Transportation App 20200251365 - Kind Code | 2020-08-06 |
| Metrology method in wafer transportation Grant 10,651,066 - Huang , et al. | 2020-05-12 |
| Wafer Cleaning System And Method App 20200135516 - TSENG; Kuo-Shu ; et al. | 2020-04-30 |
| Wafer cleaning system and method Grant 10,515,833 - Tseng , et al. Dec | 2019-12-24 |
| Metrology method in reticle transportation Grant 10,345,716 - Shang , et al. July 9, 2 | 2019-07-09 |
| Metrology Method In Wafer Transportation App 20190164792 - HUANG; Powen ; et al. | 2019-05-30 |
| Metrology Method In Reticle Transportation App 20190163070 - SHANG; Yao-Yuan ; et al. | 2019-05-30 |
| Cup-wash device, semiconductor apparatus, and cup cleaning method Grant 9,919,350 - Tseng , et al. March 20, 2 | 2018-03-20 |
| Brush, back surface treatment assembly and method for cleaning substrate Grant 9,770,092 - Tseng , et al. September 26, 2 | 2017-09-26 |
| Brush, Back Surface Treatment Assembly And Method For Cleaning Substrate App 20170049221 - TSENG; Kuo-Shu ; et al. | 2017-02-23 |
| Method and system for positioning wafer in semiconductor manufacturing fabrication Grant 9,570,334 - Shang , et al. February 14, 2 | 2017-02-14 |
| Method And System For Positioning Wafer In Semiconductor Manufacturing Fabrication App 20160293471 - SHANG; Yao-Yuan ; et al. | 2016-10-06 |
| Cup-wash Device, Semiconductor Apparatus, And Cup Cleaning Method App 20160276207 - TSENG; Kuo-Shu ; et al. | 2016-09-22 |
| Wafer Cleaning System And Method App 20150214027 - TSENG; Kuo-Shu ; et al. | 2015-07-30 |
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