Patent | Date |
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Driver And Control For Variable Impedence Load App 20210339169 - Lipkens; Bart ;   et al. | 2021-11-04 |
Electronic Configuration And Control For Acoustic Standing Wave Generation App 20210268406 - Lipkens; Bart ;   et al. | 2021-09-02 |
Electronic configuration and control for acoustic standing wave generation Grant 11,007,457 - Lipkens , et al. May 18, 2 | 2021-05-18 |
Driver and control for variable impedence load Grant 10,967,298 - Lipkens , et al. April 6, 2 | 2021-04-06 |
Rapid Pulse Electrohydraulic (eh) Shockwave Generator Apparatus With Improved Acoustic Wavefronts App 20200046391 - CAPELLI; Christopher C. ;   et al. | 2020-02-13 |
Device and method for controlling a phase transition of a fluid between liquid and vapour states Grant 10,514,212 - Masse , et al. Dec | 2019-12-24 |
Fluid flow measurement and control Grant 10,444,770 - Ambrosina , et al. Oc | 2019-10-15 |
Systems, methods and apparatus for choked flow element extraction Grant 10,424,460 - Shajii , et al. Sept | 2019-09-24 |
Methods And Apparatus For Controlled Rf Treatments And Rf Generator System App 20190239939 - Boll; James ;   et al. | 2019-08-08 |
Non-Invasive, Uniform and Non-Uniform RF Methods and Systems Related Applications App 20190133673 - Boll; James ;   et al. | 2019-05-09 |
Distributed multi-zone plasma source systems, methods and apparatus Grant 10,283,325 - Shajii , et al. | 2019-05-07 |
Electronic Configuration and Control for Acoustic Standing Wave Generation App 20180236380 - Lipkens; Bart ;   et al. | 2018-08-23 |
Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Methods and Apparatus App 20180228015 - Shajii; Ali ;   et al. | 2018-08-09 |
Driver And Control For Variable Impedence Load App 20180207551 - Lipkens; Bart ;   et al. | 2018-07-26 |
Device And Method For Controlling A Phase Transition Of A Fluid Between Liquid And Vapour States App 20180187986 - Masse; Daniel ;   et al. | 2018-07-05 |
Distributed, concentric multi-zone plasma source systems, methods and apparatus Grant 9,967,965 - Shajii , et al. May 8, 2 | 2018-05-08 |
Electronic configuration and control for acoustic standing wave generation Grant 9,950,282 - Lipkens , et al. April 24, 2 | 2018-04-24 |
Non-invasive Uniform And Non-uniform Rf Methods And Systems App 20180000533 - Boll; James ;   et al. | 2018-01-04 |
Electronic Configuration And Control For Acoustic Standing Wave Generation App 20170291122 - Lipkens; Bart ;   et al. | 2017-10-12 |
Fluid Flow Measurement And Control App 20170205834 - Ambrosina; Jesse E. ;   et al. | 2017-07-20 |
Fluid flow measurement and control Grant 9,616,172 - Ambrosina , et al. April 11, 2 | 2017-04-11 |
Systems, Methods and Apparatus for Choked Flow Element Extraction App 20160358754 - Shajii; Ali ;   et al. | 2016-12-08 |
Systems, methods and apparatus for choked flow element extraction Grant 9,449,793 - Shajii , et al. September 20, 2 | 2016-09-20 |
Fluid flow measurement and control Grant 9,433,734 - Ambrosina , et al. September 6, 2 | 2016-09-06 |
Distributed multi-zone plasma source systems, methods and apparatus Grant 9,155,181 - Shajii , et al. October 6, 2 | 2015-10-06 |
Pinched plasma bridge flood gun for substrate charge neutralization Grant 9,070,538 - Shajii , et al. June 30, 2 | 2015-06-30 |
Movable microchamber system with gas curtain Grant 9,029,809 - Pun , et al. May 12, 2 | 2015-05-12 |
Pinched Plasma Bridge Flood Gun For Substrate Charge Neutralization App 20150115796 - Shajii; Ali ;   et al. | 2015-04-30 |
Systems, methods and apparatus for separate plasma source control Grant 8,999,104 - Shajii , et al. April 7, 2 | 2015-04-07 |
Fluid Flow Measurement And Control App 20140309617 - Ambrosina; Jesse E. ;   et al. | 2014-10-16 |
Fluid Flow Measurement And Control App 20140216560 - Ambrosina; Jesse E. ;   et al. | 2014-08-07 |
Movable microchamber system with gas curtain App 20140151344 - PUN; Digby ;   et al. | 2014-06-05 |
Apparatus and method for pressure fluctuation insensitive mass flow control Grant 8,738,187 - Shajii , et al. May 27, 2 | 2014-05-27 |
Chemical ionization reaction or proton transfer reaction mass spectrometry Grant 8,704,171 - Robinson , et al. April 22, 2 | 2014-04-22 |
Distributed Multi-zone Plasma Source Systems, Methods And Apparatus App 20140096908 - Shajii; Ali ;   et al. | 2014-04-10 |
Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator Grant 8,692,466 - Benzerrouk , et al. April 8, 2 | 2014-04-08 |
Pressure regulation in remote zones Grant 8,689,822 - Shajii , et al. April 8, 2 | 2014-04-08 |
Radio frequency power delivery system Grant 8,633,782 - Nagarkatti , et al. January 21, 2 | 2014-01-21 |
Measuring and controlling parameters of a plasma generator Grant 8,624,501 - Nagarkatti , et al. January 7, 2 | 2014-01-07 |
Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry App 20130203180 - Robinson; Timothy Roger ;   et al. | 2013-08-08 |
Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Methods and Apparatus App 20130025788 - Shajii; Ali ;   et al. | 2013-01-31 |
Chemical ionization reaction or proton transfer reaction mass spectrometry Grant 8,334,505 - Robinson , et al. December 18, 2 | 2012-12-18 |
Pressure Regulation In Remote Zones App 20120202408 - Shajii; Ali ;   et al. | 2012-08-09 |
Apparatus and Method for Pressure Fluctuation Insensitive Mass Flow Control App 20120174992 - Shajii; Ali ;   et al. | 2012-07-12 |
Measuring And Controlling Parameters Of A Plasma Generator App 20120146508 - Nagarkatti; Siddharth P. ;   et al. | 2012-06-14 |
Apparatus and method for pressure fluctuation insensitive mass flow control Grant 8,150,553 - Shajii , et al. April 3, 2 | 2012-04-03 |
Distributed Multi-zone Plasma Source Systems, Methods And Apparatus App 20120034394 - Shajii; Ali ;   et al. | 2012-02-09 |
Systems, Methods And Apparatus For Separate Plasma Source Control App 20120031876 - Shajii; Ali ;   et al. | 2012-02-09 |
Systems, Methods And Apparatus For Choked Flow Element Extraction App 20120035766 - Shajii; Ali ;   et al. | 2012-02-09 |
Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry App 20120003748 - Robinson; Timothy Roger ;   et al. | 2012-01-05 |
Pressure regulation in remote zones Grant 8,037,896 - Shajii , et al. October 18, 2 | 2011-10-18 |
Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer Grant 8,003,936 - Robinson , et al. August 23, 2 | 2011-08-23 |
Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer Grant 8,003,935 - Robinson , et al. August 23, 2 | 2011-08-23 |
Particle trap for a plasma source Grant 7,914,603 - Shajii , et al. March 29, 2 | 2011-03-29 |
Methods and Apparatus for Protecting Plasma Chamber Surfaces App 20110005922 - Tai; Chiu-Ying ;   et al. | 2011-01-13 |
Apparatus And Method For Pressure Fluctuation Insensitive Mass Flow Control App 20100324743 - Shajii; Ali ;   et al. | 2010-12-23 |
Pulsed mass flow delivery system and method Grant 7,829,353 - Shajii , et al. November 9, 2 | 2010-11-09 |
Apparatus and method for pressure fluctuation insensitive mass flow control Grant 7,809,473 - Shajii , et al. October 5, 2 | 2010-10-05 |
Radio Frequency Power Delivery System App 20100231296 - Nagarkatti; Siddharth P. ;   et al. | 2010-09-16 |
Method and Apparatus of Providing Power to Ignite and Sustain a Plasma in a Reactive Gas Generator App 20100219757 - Benzerrouk; Souheil ;   et al. | 2010-09-02 |
Radio frequency power delivery system Grant 7,764,140 - Nagarkatti , et al. July 27, 2 | 2010-07-27 |
Particle Trap For A Plasma Source App 20090320677 - Shajii; Ali ;   et al. | 2009-12-31 |
Pulsed mass flow delivery system and method Grant 7,628,860 - Shajii , et al. December 8, 2 | 2009-12-08 |
Pulsed mass flow delivery system and method Grant 7,615,120 - Shajii , et al. November 10, 2 | 2009-11-10 |
Apparatus and method for displaying mass flow controller pressure Grant 7,552,015 - Shajii , et al. June 23, 2 | 2009-06-23 |
Chemical Ionization Reaction Or Proton Transfer Reaction Mass Spectrometry With A Time-of-flight Mass Spectrometer App 20090095902 - ROBINSON; TIMOTHY ROGER ;   et al. | 2009-04-16 |
Chemical Ionization Reaction Or Proton Transfer Reaction Mass Spectrometry With A Quadrupole Mass Spectrometer App 20090095901 - Robinson; Timothy Roger ;   et al. | 2009-04-16 |
Critical flow based mass flow verifier Grant 7,474,968 - Ding , et al. January 6, 2 | 2009-01-06 |
Particle Reduction Through Gas and Plasma Source Control App 20080302652 - Entley; William Robert ;   et al. | 2008-12-11 |
Mass flow verifier with flow restrictor Grant 7,463,991 - Shajii , et al. December 9, 2 | 2008-12-09 |
Apparatus and method for pressure fluctuation insensitive mass flow control Grant 7,424,346 - Shajii , et al. September 9, 2 | 2008-09-09 |
Apparatus And Method For Pressure Fluctuation Insensitive Mass Flow Control App 20080091306 - Shajii; Ali ;   et al. | 2008-04-17 |
Radio Frequency Power Delivery System App 20070139122 - Nagarkatti; Siddharth P. ;   et al. | 2007-06-21 |
Pulsed mass flow delivery system and method App 20070042508 - Shajii; Ali ;   et al. | 2007-02-22 |
Pulsed mass flow delivery system and method App 20070039550 - Shajii; Ali ;   et al. | 2007-02-22 |
Pulsed mass flow delivery system and method App 20070039549 - Shajii; Ali ;   et al. | 2007-02-22 |
External volume insensitive flow verification Grant 7,174,263 - Shajii , et al. February 6, 2 | 2007-02-06 |
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Grant 7,166,187 - Shajii , et al. January 23, 2 | 2007-01-23 |
Apparatus and method for calibration of mass flow controller Grant 7,136,767 - Shajii , et al. November 14, 2 | 2006-11-14 |
Thermal mass flow rate sensor having fixed bypass ratio Grant 7,121,139 - Shajii , et al. October 17, 2 | 2006-10-17 |
Flow monitoring system Grant 7,120,542 - Kottenstette , et al. October 10, 2 | 2006-10-10 |
Parallel plate valve assembly App 20060214127 - Shajii; Ali ;   et al. | 2006-09-28 |
External volume insensitive flow verification App 20060217903 - Shajii; Ali ;   et al. | 2006-09-28 |
Mass flow verifier with flow restrictor App 20060217900 - Shajii; Ali ;   et al. | 2006-09-28 |
Vaporizer and method of vaporizing a liquid for thin film delivery App 20060207503 - Meneghini; Paul ;   et al. | 2006-09-21 |
Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects Grant 7,107,834 - Meneghini , et al. September 19, 2 | 2006-09-19 |
Apparatus and method for pressure fluctuation insensitive mass flow control App 20060173642 - Shajii; Ali ;   et al. | 2006-08-03 |
Pressure regulation in remote zones App 20060169327 - Shajii; Ali ;   et al. | 2006-08-03 |
Porous valve assembly Grant 7,073,771 - Shajii , et al. July 11, 2 | 2006-07-11 |
Semiconductor manufacturing gas flow divider system and method Grant 7,072,743 - Shajii , et al. July 4, 2 | 2006-07-04 |
Thermal mass flow rate sensor having fixed bypass ratio App 20060101907 - Shajii; Ali ;   et al. | 2006-05-18 |
Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects App 20060101908 - Meneghini; Paul ;   et al. | 2006-05-18 |
Precursor gas delivery with carrier gas mixing App 20060060139 - Meneghini; Paul ;   et al. | 2006-03-23 |
Mass flow ratio system and method Grant 7,007,707 - Ambrosina , et al. March 7, 2 | 2006-03-07 |
Apparatus and method for mass flow controller with embedded web server Grant 7,004,191 - Shajii , et al. February 28, 2 | 2006-02-28 |
Reynolds number correction function for mass flow rate sensor Grant 7,000,463 - Shajii , et al. February 21, 2 | 2006-02-21 |
System and method for controlling pressure in remote zones Grant 6,986,359 - Shajii , et al. January 17, 2 | 2006-01-17 |
Pulsed mass flow delivery system and method App 20050223979 - Shajii, Ali ;   et al. | 2005-10-13 |
Flow monitoring system App 20050222782 - Kottenstette, Nicholas ;   et al. | 2005-10-06 |
Flow measurement calibration App 20050217346 - Nagarkatti, Siddharth P. ;   et al. | 2005-10-06 |
Porous Valve Assembly App 20050218361 - Shajii, Ali ;   et al. | 2005-10-06 |
Apparatus and method for self-calibration of mass flow controller Grant 6,948,508 - Shajii , et al. September 27, 2 | 2005-09-27 |
Semiconductor manufacturing gas flow divider system and method App 20050199342 - Shajii, Ali ;   et al. | 2005-09-15 |
System And Method For Controlling Pressure In Remote Zones App 20050199287 - Shajii, Ali ;   et al. | 2005-09-15 |
Apparatus and method for pressure fluctuation insensitive mass flow control Grant 6,932,098 - Shajii , et al. August 23, 2 | 2005-08-23 |
Thermal mass flow rate sensor providing increased rate of heat transfer to gas Grant 6,918,295 - Shajii , et al. July 19, 2 | 2005-07-19 |
Apparatus and method for mass flow controller with a plurality of closed loop control code sets Grant 6,868,862 - Shajii , et al. March 22, 2 | 2005-03-22 |
Thermal anemometry mass flow measurement apparatus and method Grant 6,868,723 - Shajii , et al. March 22, 2 | 2005-03-22 |
Two phase flow sensor using tomography techniques Grant 6,857,323 - Shajii , et al. February 22, 2 | 2005-02-22 |
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling App 20050026447 - Shajii, Ali ;   et al. | 2005-02-03 |
Apparatus and method for pressure fluctuation insensitive mass flow control App 20040256003 - Shajii, Ali ;   et al. | 2004-12-23 |
Thermal anemometry mass flow measurement apparatus and method App 20040226358 - Shajii, Ali ;   et al. | 2004-11-18 |
Method and apparatus for conditioning a gas flow to improve a rate of pressure change measurement Grant 6,813,943 - Smith , et al. November 9, 2 | 2004-11-09 |
Apparatus and method for mass flow controller with network access to diagnostics Grant 6,810,308 - Shajii , et al. October 26, 2 | 2004-10-26 |
Mass flow ratio system and method App 20040187928 - Ambrosina, Jesse ;   et al. | 2004-09-30 |
Method And Apparatus For Conditioning A Gas Flow To Improve A Rate Of Pressure Change Measurement App 20040182148 - Smith, John A. ;   et al. | 2004-09-23 |
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Grant 6,783,630 - Shajii , et al. August 31, 2 | 2004-08-31 |
Apparatus and method for thermal management of a mass flow controller Grant 6,779,394 - Ambrosina , et al. August 24, 2 | 2004-08-24 |
Mass flow ratio system and method Grant 6,766,260 - Ambrosina , et al. July 20, 2 | 2004-07-20 |
Apparatus and method for pressure fluctuation insensitive mass flow control Grant 6,712,084 - Shajii , et al. March 30, 2 | 2004-03-30 |
Apparatus for cooling a substrate through thermal conduction in the viscous regime App 20040053514 - Shajii, Ali ;   et al. | 2004-03-18 |
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling App 20040040508 - Shajii, Ali ;   et al. | 2004-03-04 |
Apparatus and method for thermal dissipation in a thermal mass flow sensor Grant 6,668,641 - Ambrosina , et al. December 30, 2 | 2003-12-30 |
Apparatus and method for mass flow controller with embedded web server App 20030234048 - Shajii, Ali ;   et al. | 2003-12-25 |
Apparatus And Method For Pressure Fluctuation Insensitive Mass Flow Control App 20030234039 - Shajii, Ali ;   et al. | 2003-12-25 |
Apparatus and method for self-calibration of mass flow controller App 20030234046 - Shajii, Ali ;   et al. | 2003-12-25 |
Apparatus and method for dual processor mass flow controller App 20030234047 - Shajii, Ali ;   et al. | 2003-12-25 |
Apparatus and method for mass flow controller with on-line diagnostics App 20030234045 - Shajii, Ali ;   et al. | 2003-12-25 |
Apparatus and method for mass flow controller with a plurality of closed loop control code sets App 20030234044 - Shajii, Ali ;   et al. | 2003-12-25 |
Apparatus and method for calibration of mass flow controller App 20030236643 - Shajii, Ali ;   et al. | 2003-12-25 |
Apparatus and method for mass flow controller with network access to diagnostics App 20030236592 - Shajii, Ali ;   et al. | 2003-12-25 |
Apparatus and method for displaying mass flow controller pressure App 20030236638 - Shajii, Ali ;   et al. | 2003-12-25 |
System and method for controlling movement of a workpiece in a thermal processing system Grant 6,610,968 - Shajii , et al. August 26, 2 | 2003-08-26 |
Mass flow ratio system and method App 20030130807 - Ambrosina, Jesse ;   et al. | 2003-07-10 |
Apparatus and method for thermal dissipation in a thermal mass flow sensor App 20030115950 - Ambrosina, Jesse ;   et al. | 2003-06-26 |
Apparatus and method for thermal management of a mass flow controller App 20030115949 - Ambrosina, Jesse ;   et al. | 2003-06-26 |
System and method for the real time determination of the in situ emissivity and temperature of a workpiece during processing Grant 6,375,348 - Hebb , et al. April 23, 2 | 2002-04-23 |