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Patent applications and USPTO patent grants for Shaikh; Fayaz A..The latest application filed is for "spatially tunable deposition to compensate within wafer differential bow".
Patent | Date |
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Spatially Tunable Deposition To Compensate Within Wafer Differential Bow App 20220298632 - Shaikh; Fayaz A. ;   et al. | 2022-09-22 |
High Temperature Heating Of A Substrate In A Processing Chamber App 20220199379 - LEE; James F. ;   et al. | 2022-06-23 |
Asymmetric wafer bow compensation by chemical vapor deposition Grant 10,903,070 - Liu , et al. January 26, 2 | 2021-01-26 |
Asymmetric Wafer Bow Compensation By Chemical Vapor Deposition App 20200105523 - Liu; Chanyuan ;   et al. | 2020-04-02 |
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