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Patent applications and USPTO patent grants for Shahrjerdy; Mir Homayoun.The latest application filed is for "method and apparatus to determine a patterning process parameter".
Patent | Date |
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Method And Apparatus To Determine A Patterning Process Parameter App 20220066330 - TSIATMAS; Anagnostis ;   et al. | 2022-03-03 |
Method and apparatus to determine a patterning process parameter Grant 11,143,972 - Tsiatmas , et al. October 12, 2 | 2021-10-12 |
Substrate measurement recipe design of, or for, a target including a latent image Grant 10,578,982 - Van Der Laan , et al. | 2020-03-03 |
Substrate Measurement Recipe Design Of, Or For, A Target Including A Latent Image App 20190171116 - VAN DER LAAN; Hans ;   et al. | 2019-06-06 |
Method And Apparatus To Determine A Patterning Process Parameter App 20190155173 - Tsiatmas; Anagnostis ;   et al. | 2019-05-23 |
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