Shah; Vivek Bharat

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shah; Vivek Bharat.The latest application filed is for "techniques to improve adhesion and defects for tungsten carbide film".

Company Profile

12.6.12

Shah; Vivek Bharat - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus and methods for removing contaminant particles in a plasma process Grant 11,120,976 - Kumar , et al. September 14, 2	2021-09-14
Techniques To Improve Adhesion And Defects For Tungsten Carbide Film App 20210108309 - SHAH; Vivek Bharat ; et al.	2021-04-15
Technique to prevent aluminum fluoride build up on the heater Grant 10,892,143 - Shah , et al. January 12, 2	2021-01-12
Plasma Density Control On Substrate Edge App 20200381222 - KUMAR; Bhaskar ; et al.	2020-12-03
Plasma Parameters And Skew Characterization By High Speed Imaging App 20200357668 - BHATIA; Sidharth ; et al.	2020-11-12
Apparatus And Methods For Removing Contaminant Particles In A Plasma Process App 20200350146 - KUMAR; Bhaskar ; et al.	2020-11-05
Plasma density control on substrate edge Grant 10,790,121 - Kumar , et al. September 29, 2	2020-09-29
Chucking Process And System For Substrate Processing Chambers App 20200286716 - KUMAR; Bhaskar ; et al.	2020-09-10
Plasma parameters and skew characterization by high speed imaging Grant 10,748,797 - Bhatia , et al. A	2020-08-18
Apparatus and methods for removing contaminant particles in a plasma process Grant 10,714,319 - Kumar , et al.	2020-07-14
Aluminum fluoride mitigation by plasma treatment Grant 10,688,538 - Shah , et al.	2020-06-23
Technique To Enable High Temperature Clean For Rapid Processing Of Wafers App 20190382889 - PARIMI; Venkata Sharat Chandra ; et al.	2019-12-19
Apparatus And Methods For Removing Contaminant Particles In A Plasma Process App 20190259585 - KUMAR; Bhaskar ; et al.	2019-08-22
Gas Phase Particle Reduction In Pecvd Chamber App 20180294139 - KUMAR; Bhaskar ; et al.	2018-10-11
Plasma Density Control On Substrate Edge App 20180294146 - KUMAR; Bhaskar ; et al.	2018-10-11
Plasma Parameters And Skew Characterization By High Speed Imaging App 20180204750 - BHATIA; Sidharth ; et al.	2018-07-19
Technique To Prevent Aluminum Fluoride Build Up On The Heater App 20180114679 - SHAH; Vivek Bharat ; et al.	2018-04-26
Aluminum Fluoride Mitigation By Plasma Treatment App 20180036775 - SHAH; Vivek Bharat ; et al.	2018-02-08

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