| Patent | Date |
|---|
System architecture for vacuum processing
Grant 10,115,617 - Bluck , et al. October 30, 2 | 2018-10-30 |
Sputtering system and method using direction-dependent scan speed or power
Grant 10,106,883 - Shah , et al. October 23, 2 | 2018-10-23 |
System and method for bi-facial processing of substrates
Grant 10,062,600 - Bluck , et al. August 28, 2 | 2018-08-28 |
System Architecture For Vacuum Processing
App 20170025300 - Bluck; Terry ; et al. | 2017-01-26 |
System architecture for vacuum processing
Grant 9,502,276 - Bluck , et al. November 22, 2 | 2016-11-22 |
Linear Scanning Sputtering System And Method
App 20160268110 - Brown; David Ward ; et al. | 2016-09-15 |
Method For Sputtering System And Using Counterweight
App 20160177438 - Shah; Vinay ; et al. | 2016-06-23 |
Facilitating photo sharing
Grant 9,077,678 - Hardman , et al. July 7, 2 | 2015-07-07 |
System And Method For Bi-facial Processing Of Substrates
App 20150170947 - Bluck; Terry ; et al. | 2015-06-18 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20150098773 - RICE; Mike ; et al. | 2015-04-09 |
High throughput load lock for solar wafers
Grant 8,998,553 - Shah , et al. April 7, 2 | 2015-04-07 |
Substrate processing sequence in a cartesian robot cluster tool
Grant 8,911,193 - Rice , et al. December 16, 2 | 2014-12-16 |
Font substitution using unsupervised clustering techniques
Grant 8,910,041 - Buryak , et al. December 9, 2 | 2014-12-09 |
Sputtering System And Method Using Counterweight
App 20140332376 - Shah; Vinay ; et al. | 2014-11-13 |
Sputtering System And Method Using Direction-dependent Scan Speed Or Power
App 20140311893 - Shah; Vinay ; et al. | 2014-10-23 |
Method and apparatus for masking solar cell substrates for deposition
Grant 8,677,929 - Berger , et al. March 25, 2 | 2014-03-25 |
System Architecture For Vacuum Processing
App 20130287526 - Bluck; Terry ; et al. | 2013-10-31 |
Dual-mask Arrangement For Solar Cell Fabrication
App 20130276978 - Bluck; Terry ; et al. | 2013-10-24 |
High Throughput Load Lock For Solar Wafers
App 20130149075 - Shah; Vinay ; et al. | 2013-06-13 |
Linear Scanning Sputtering System And Method
App 20130112546 - Brown; David Ward ; et al. | 2013-05-09 |
Solar panel edge deletion module
Grant 8,231,431 - Gajaria , et al. July 31, 2 | 2012-07-31 |
Method And Apparatus For Masking Substrates For Deposition
App 20120171807 - BERGER; Alexander J. ; et al. | 2012-07-05 |
Forming solar cells using a patterned deposition process
Grant 8,207,005 - Weidman , et al. June 26, 2 | 2012-06-26 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20120141237 - RICE; Mike ; et al. | 2012-06-07 |
Substrate processing sequence in a Cartesian robot cluster tool
Grant 8,066,466 - Rice , et al. November 29, 2 | 2011-11-29 |
Forming Solar Cells Using A Patterned Deposition Process
App 20110183458 - WEIDMAN; Timothy W. ; et al. | 2011-07-28 |
Back contact solar cells using printed dielectric barrier
Grant 7,951,637 - Weidman , et al. May 31, 2 | 2011-05-31 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20100280654 - Rice; Mike ; et al. | 2010-11-04 |
Substrate processing sequence in a cartesian robot cluster tool
Grant 7,798,764 - Rice , et al. September 21, 2 | 2010-09-21 |
Small lot size lithography bays
Grant 7,778,721 - Englhardt , et al. August 17, 2 | 2010-08-17 |
Method For Monitoring The Position Of A Semiconductor Processing Robot
App 20100145513 - Yim; Pyongwon ; et al. | 2010-06-10 |
Methods and apparatus for mapping carrier contents
Grant 7,720,558 - Elliott , et al. May 18, 2 | 2010-05-18 |
Systems and methods for transferring small lot size substrate carriers between processing tools
Grant 7,711,445 - Rice , et al. May 4, 2 | 2010-05-04 |
Back Contact Solar Cells Using Printed Dielectric Barrier
App 20100055822 - Weidman; Timothy W. ; et al. | 2010-03-04 |
Cartesian robot cluster tool architecture
Grant 7,651,306 - Rice , et al. January 26, 2 | 2010-01-26 |
Methods and apparatus for identifying small lot size substrate carriers
Grant 7,611,319 - Shah , et al. November 3, 2 | 2009-11-03 |
Solar Panel Edge Deletion Module
App 20090221217 - GAJARIA; DHRUV ; et al. | 2009-09-03 |
Methods and apparatus for a band to band transfer module
Grant 7,577,487 - Lowrance , et al. August 18, 2 | 2009-08-18 |
Hydrogen and oxygen based photoresist removal process
Grant 7,413,994 - Smith , et al. August 19, 2 | 2008-08-19 |
Substrate gripper for a substrate handling robot
Grant 7,374,391 - Rice , et al. May 20, 2 | 2008-05-20 |
Method of retaining a substrate during a substrate transferring process
Grant 7,374,393 - Rice , et al. May 20, 2 | 2008-05-20 |
Method for removing residue containing an embedded metal
App 20070184666 - Smith; Patricia Beauregard ; et al. | 2007-08-09 |
Substrate gripper for a substrate handling robot
App 20070147979 - Rice; Michael ; et al. | 2007-06-28 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20070147976 - Rice; Mike ; et al. | 2007-06-28 |
Method of retaining a substrate during a substrate transferring process
App 20070147982 - Rice; Mike ; et al. | 2007-06-28 |
Systems and methods for transferring small lot size substrate carriers between processing tools
Grant 7,221,993 - Rice , et al. May 22, 2 | 2007-05-22 |
Systems And Methods For Transferring Small Lot Size Substrate Carriers Between Processing Tools
App 20070059861 - Rice; Michael R. ; et al. | 2007-03-15 |
Methods and apparatus for a transport lift assembly
App 20070059153 - Lowrance; Robert B. ; et al. | 2007-03-15 |
Methods and apparatus for a transfer station
App 20070059144 - Lowrance; Robert B. ; et al. | 2007-03-15 |
Methods and apparatus for a band to band transfer module
App 20070061031 - Lowrance; Robert B. ; et al. | 2007-03-15 |
Hydrogen and oxygen based photoresist removal process
App 20060281312 - Smith; Patricia Beauregard ; et al. | 2006-12-14 |
Method For Monitoring The Position Of A Semiconductor Processing Robot
App 20060224276 - Yim; Pyongwon ; et al. | 2006-10-05 |
Method and apparatus for monitoring the position of a semiconductor processing robot
Grant 7,107,125 - Yim , et al. September 12, 2 | 2006-09-12 |
Cartesian robot cluster tool architecture
App 20060182536 - Rice; Mike ; et al. | 2006-08-17 |
Methods and apparatus for identifying small lot size substrate carriers
App 20060182531 - Shah; Vinay ; et al. | 2006-08-17 |
Cartesian robot design
App 20060182535 - Rice; Mike ; et al. | 2006-08-17 |
Methods and apparatus for mapping carrier contents
App 20060051184 - Elliott; Martin R. ; et al. | 2006-03-09 |
Small lot size lithography bays
App 20050273191 - Englhardt, Eric Andrew ; et al. | 2005-12-08 |
Method and apparatus for monitoring the position of a semiconductor processing robot
App 20050096794 - Yim, Pyongwon ; et al. | 2005-05-05 |
Systems and methods for transferring small lot size substrate carriers between processing tools
App 20040193300 - Rice, Michael R. ; et al. | 2004-09-30 |
Refractory assembly including inner and outer refractory members with interference shrink fit therebetween and method of formation thereof
Grant 4,951,929 - Schwarz , et al. August 28, 1 | 1990-08-28 |
| 