Shafer; David R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Shafer; David R..The latest application filed is for "catadioptric projection objective".

Company Profile

0.73.55

Shafer; David R. - Fairfield CT
Shafer; David R. - Faifield CT
Shafer; David R. - Connecticut CA
Shafer; David R - Fairfield CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type Grant 10,481,500 - Mann , et al. Nov	2019-11-19
Imaging optics, microlithography projection exposure apparatus having same and related methods Grant 9,535,337 - Mann , et al. January 3, 2	2017-01-03
Catadioptric Projection Objective App 20160274343 - Shafer; David R. ; et al.	2016-09-22
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 9,377,414 - Chuang , et al. June 28, 2	2016-06-28
Imaging Optics, Microlithography Projection Exposure Apparatus Having Same And Related Methods App 20150219999 - Mann; Hans-Juergen ; et al.	2015-08-06
Catadioptric Projection Objective App 20150055214 - Shafer; David R. ; et al.	2015-02-26
Immersion catadioptric projection objective having two intermediate images Grant 8,908,269 - Shafer , et al. December 9, 2	2014-12-09
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers App 20140217299 - Chuang; Yung-Ho ; et al.	2014-08-07
Catadioptric Projection Objective App 20140111787 - Shafer; David R. ; et al.	2014-04-24
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 8,692,986 - Chuang , et al. April 8, 2	2014-04-08
Catadioptric imaging system for broad band microscopy Grant 8,675,276 - Shafer , et al. March 18, 2	2014-03-18
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers App 20140001370 - Chuang; Yung-Ho ; et al.	2014-01-02
EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers Grant 8,553,217 - Chuang , et al. October 8, 2	2013-10-08
Catadioptric Projection Objective With Mirror Group App 20130120728 - Epple; Alexander ; et al.	2013-05-16
Imaging Optical System And Projection Exposure Installation For Microlithography With An Imaging Optical System Of This Type App 20120069312 - Mann; Hans-Juergen ; et al.	2012-03-22
EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers App 20110116077 - Chuang; Yung-Ho ; et al.	2011-05-19
Small ultra-high NA catadioptric objective using aspheric surfaces Grant 7,869,121 - Shafer , et al. January 11, 2	2011-01-11
Microlithographic reduction projection catadioptric objective Grant 7,859,748 - Shafer , et al. December 28, 2	2010-12-28
Ultra-broadband UV microscope imaging system with wide range zoom capability Grant 7,773,296 - Shafer , et al. August 10, 2	2010-08-10
Catadioptric objective comprising two intermediate images Grant RE41,350 - Shafer , et al. May 25, 2	2010-05-25
Symmetrical objective having four lens groups for microlithography Grant 7,697,211 - Shafer , et al. April 13, 2	2010-04-13
High performance catadioptric imaging system Grant 7,679,842 - Shafer , et al. March 16, 2	2010-03-16
Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth Grant 7,672,043 - Armstrong , et al. March 2, 2	2010-03-02
Small ultra-high NA catadioptric objective Grant 7,646,533 - Chuang , et al. January 12, 2	2010-01-12
Inspection system using small catadioptric objective Grant 7,639,419 - Chuang , et al. December 29, 2	2009-12-29
Catadioptric imaging system employing immersion liquid for use in broad band microscopy Grant 7,633,675 - Armstrong , et al. December 15, 2	2009-12-15
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system Grant 7,518,789 - Shafer , et al. April 14, 2	2009-04-14
Ultra-broadband UV microscope imaging system with wide range zoom capability App 20090080065 - Shafer; David R. ; et al.	2009-03-26
Symmetrical Objective Having Four Lens Groups For Microlithography App 20090080086 - Shafer; David R. ; et al.	2009-03-26
Broad band DUV, VUV long-working distance catadioptric imaging system Grant 7,502,177 - Shafer , et al. March 10, 2	2009-03-10
Broad band objective having improved lateral color performance Grant 7,474,461 - Chuang , et al. January 6, 2	2009-01-06
Catadioptric Projection Objective With Geometric Beam Splitting App 20080316456 - Shafer; David R. ; et al.	2008-12-25
Optical projection lens system Grant 7,450,312 - Shafer , et al. November 11, 2	2008-11-11
Catadioptric imaging system employing immersion liquid for use in broad band microscopy App 20080247035 - Armstrong; J. Joseph ; et al.	2008-10-09
Objectives as a microlithography projection objective with at least one liquid lens Grant 7,428,105 - Shafer , et al. September 23, 2	2008-09-23
Catadioptric projection objective with geometric beam splitting Grant 7,426,082 - Shafer , et al. September 16, 2	2008-09-16
Ultra-broadband UV microscope imaging system with wide range zoom capability Grant 7,423,805 - Shafer , et al. September 9, 2	2008-09-09
Objectives as a microlithography projection objective with at least one liquid lens Grant 7,385,764 - Shafer , et al. June 10, 2	2008-06-10
Objectives As A Microlithography Projection Objective With At Least One Liquid Lens App 20080030869 - Shafer; David R. ; et al.	2008-02-07
Catadioptric imaging system employing immersion liquid for use in broad band microscopy Grant 7,307,783 - Armstrong , et al. December 11, 2	2007-12-11
Broad band objective having improved lateral color performance App 20070258154 - Chuang; Yung-Ho ; et al.	2007-11-08
Broad band DUV, VUV long-working distance catadioptric imaging system App 20070171547 - Shafer; David R. ; et al.	2007-07-26
Broad band objective having improved lateral color performance Grant 7,245,438 - Chuang , et al. July 17, 2	2007-07-17
Microlithographic Reduction Projection Catadioptric Objective App 20070153398 - Shafer; David R. ; et al.	2007-07-05
Microlithographic reduction projection catadioptric objective Grant 7,218,445 - Shafer , et al. May 15, 2	2007-05-15
High performance catadioptric imaging system Grant 7,180,658 - Shafer , et al. February 20, 2	2007-02-20
High performance catadioptric imaging system App 20070024961 - Shafer; David R. ; et al.	2007-02-01
Projection objective having adjacently mounted aspheric lens surfaces Grant 7,154,678 - Schuster , et al. December 26, 2	2006-12-26
Broad band objective having improved lateral color performance App 20060262418 - Chuang; Yung-Ho ; et al.	2006-11-23
Broad band DUV, VUV long-working distance catadioptric imaging system Grant 7,136,234 - Shafer , et al. November 14, 2	2006-11-14
Catadioptric reduction lens Grant 7,136,220 - Ulrich , et al. November 14, 2	2006-11-14
Small ultra-high NA catadioptric objective using aspheric surfaces App 20060238856 - Shafer; David R. ; et al.	2006-10-26
Objectives as a microlithography projection objective with at least one liquid lens App 20060221456 - Shafer; David R. ; et al.	2006-10-05
Small ultra-high NA catadioptric objective App 20060158720 - Chuang; Yung-Ho ; et al.	2006-07-20
Catadioptric reductions lens Grant 7,046,459 - Shafer , et al. May 16, 2	2006-05-16
Catadioptric projection objective with an in-line, single-axis configuration App 20060082905 - Shafer; David R. ; et al.	2006-04-20
Catadioptric projection objective with geometric beam splitting App 20060077366 - Shafer; David R. ; et al.	2006-04-13
Catadioptric projection objective with geometric beam splitting Grant 6,995,930 - Shafer , et al. February 7, 2	2006-02-07
Catadioptric optical system and exposure apparatus having the same App 20060007532 - Shafer; David R.	2006-01-12
Catadioptric optical system and exposure apparatus having the same Grant 6,985,286 - Shafer , et al. January 10, 2	2006-01-10
Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth App 20050259318 - Armstrong, J. Joseph ; et al.	2005-11-24
Optical projection lens system App 20050248853 - Shafer, David R. ; et al.	2005-11-10
Broad spectrum ultraviolet inspection systems employing catadioptric imaging Grant 6,956,694 - Shafer , et al. October 18, 2	2005-10-18
Optical projection lens system Grant 6,930,837 - Shafer , et al. August 16, 2	2005-08-16
Projection objective having adjacently mounted aspheric lens surfaces App 20050157400 - Schuster, Karl-Heinz ; et al.	2005-07-21
Catadioptric imaging system employing immersion liquid for use in broad band microscopy App 20050152027 - Armstrong, J. Joseph ; et al.	2005-07-14
Broad band DUV, VUV long-working distance catadioptric imaging system App 20050153559 - Shafer, David R. ; et al.	2005-07-14
6-mirror projection objective with few lenses Grant 6,912,042 - Shafer June 28, 2	2005-06-28
Projection objective having adjacently mounted aspheric lens surfaces Grant 6,903,802 - Schuster , et al. June 7, 2	2005-06-07
Catadioptric projection objective with geometric beam splitting App 20050117224 - Shafer, David R. ; et al.	2005-06-02
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system App 20050111081 - Shafer, David R. ; et al.	2005-05-26
Microlithographic reduction projection catadioptric objective Grant 6,873,476 - Shafer March 29, 2	2005-03-29
Ultra-broadband UV microscope imaging system with wide range zoom capability App 20050057796 - Shafer, David R. ; et al.	2005-03-17
Broad band DUV, VUV long-working distance catadioptric imaging system Grant 6,842,298 - Shafer , et al. January 11, 2	2005-01-11
Catadioptric reduction lens App 20040263955 - Ulrich, Wilhelm ; et al.	2004-12-30
Catadioptric imaging system for broad band microscopy App 20040240047 - Shafer, David R. ; et al.	2004-12-02
Projection objective having adjacently mounted aspheric lens surfaces App 20040233409 - Schuster, Karl-Heinz ; et al.	2004-11-25
Inspection system using small catadioptric objective App 20040218262 - Chuang, Yung-Ho ; et al.	2004-11-04
Optical projection lens system App 20040201899 - Shafer, David R. ; et al.	2004-10-14
Ultra-broadband UV microscope imaging system with wide range zoom capability Grant 6,801,357 - Shafer , et al. October 5, 2	2004-10-05
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system Grant 6,801,358 - Shafer , et al. October 5, 2	2004-10-05
Optical projection lens system Grant 6,791,761 - Shafer , et al. September 14, 2	2004-09-14
Catadioptric optical system and exposure apparatus having the same App 20040169914 - Shafer, David R. ; et al.	2004-09-02
High performance catadioptric imaging system App 20040165257 - Shafer, David R. ; et al.	2004-08-26
Catadioptric reduction objective App 20040075894 - Shafer, David R. ; et al.	2004-04-22
Catadioptric optical system and exposure apparatus having the same Grant 6,717,722 - Shafer , et al. April 6, 2	2004-04-06
Microlithographic reduction projection catadioptric objective App 20040027653 - Shafer, David R. ; et al.	2004-02-12
6-Mirror projection objective with few lenses App 20030234992 - Shafer, David R.	2003-12-25
Projection exposure lens with aspheric elements Grant 6,665,126 - Shafer , et al. December 16, 2	2003-12-16
Projection objective having adjacently mounted aspheric lens surfaces Grant 6,646,718 - Schuster , et al. November 11, 2	2003-11-11
Microlithographic reduction projection catadioptric objective Grant 6,636,350 - Shafer , et al. October 21, 2	2003-10-21
Optical projection lens system App 20030179462 - Shafer, David R. ; et al.	2003-09-25
Projection objective having adjacently mounted aspheric lens surfaces App 20030179356 - Schuster, Karl-Heinz ; et al.	2003-09-25
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system App 20030147128 - Shafer, David R. ; et al.	2003-08-07
Catadioptric objective comprising two intermediate images Grant 6,600,608 - Shafer , et al. July 29, 2	2003-07-29
Optical projection system Grant 6,590,715 - Shafer , et al. July 8, 2	2003-07-08
Ultra-broadband UV microscope imaging system with wide range zoom capability App 20030076583 - Shafer, David R. ; et al.	2003-04-24
Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system Grant 6,512,631 - Shafer , et al. January 28, 2	2003-01-28
Catadioptric optical system and exposure apparatus having the same App 20020196533 - Shafer, David R. ; et al.	2002-12-26
Broad spectrum ultraviolet catadioptric imaging system App 20020085271 - Shafer, David R. ; et al.	2002-07-04
Projection exposure lens with aspheric elements App 20020039175 - Shafer, David R. ; et al.	2002-04-04
Microlithographic reduction projection catadioptric objective App 20020012100 - Shafer, David R.	2002-01-31
Optical projection system App 20020001141 - Shafer, David R. ; et al.	2002-01-03
Optical projection system App 20010050820 - Shafer, David R. ; et al.	2001-12-13
Microlithographic reduction projection catadioptric objective App 20010043391 - Shafer, David R. ; et al.	2001-11-22
Broad Band Deep Ultraviolet/vacuum Ultraviolet Catadioptric Imaging System App 20010040722 - SHAFER, DAVID R. ; et al.	2001-11-15
Broad spectrum ultraviolet inspection methods employing catadioptric imaging Grant 6,313,467 - Shafer , et al. November 6, 2	2001-11-06
High numerical aperture ring field projection system for extreme ultraviolet lithography Grant 6,188,513 - Hudyma , et al. February 13, 2	2001-02-13
Four-mirror extreme ultraviolet (EUV) lithography projection system Grant 6,142,641 - Cohen , et al. November 7, 2	2000-11-07
Broad spectrum ultraviolet inspection methods employing catadioptric imaging Grant 6,133,576 - Shafer , et al. October 17, 2	2000-10-17
Reflective optical imaging system Grant 6,014,252 - Shafer January 11, 2	2000-01-11
Reflective optical imaging system with balanced distortion Grant 5,973,826 - Chapman , et al. October 26, 1	1999-10-26
Broad spectrum ultraviolet catadioptric imaging system Grant 5,956,174 - Shafer , et al. September 21, 1	1999-09-21
Broad spectrum ultraviolet catadioptric imaging system Grant 5,717,518 - Shafer , et al. February 10, 1	1998-02-10
Reflective projection system comprising four spherical mirrors Grant 5,410,434 - Shafer April 25, 1	1995-04-25
Lens system for X-ray projection lithography camera Grant 5,353,322 - Bruning , et al. October 4, 1	1994-10-04
High magnification reflecting microscope objective having a dual magnification mode and zoom magnification capability Grant 4,863,253 - Shafer , et al. September 5, 1	1989-09-05
Lens usable in the ultraviolet Grant 4,770,477 - Shafer September 13, 1	1988-09-13
Optical relay system with magnification Grant 4,747,678 - Shafer , et al. May 31, 1	1988-05-31
Restrictive off-axis field optical system Grant 4,469,414 - Shafer September 4, 1	1984-09-04
Optical system for correcting the aberrations of a beamsplitter in converging light Grant 4,412,723 - Shafer November 1, 1	1983-11-01
Monocentric optical systems Grant 4,331,390 - Shafer May 25, 1	1982-05-25
Four mirror unobscurred anastigmatic telescope with all spherical surfaces Grant 4,226,501 - Shafer October 7, 1	1980-10-07
Laser beam expander Grant 4,205,902 - Shafer June 3, 1	1980-06-03
Laser fusion optical system Grant 4,179,192 - Shafer December 18, 1	1979-12-18

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