| Patent | Date |
|---|
Method And Apparatus For Non Line-of-sight Doping
App 20200152466 - Hatem; Christopher R. ; et al. | 2020-05-14 |
Method and apparatus for non line-of-sight doping
Grant 10,541,137 - Hatem , et al. Ja | 2020-01-21 |
Method And Apparatus For Non Line-of-sight Doping
App 20190371608 - Hatem; Christopher R. ; et al. | 2019-12-05 |
Apparatus and techniques to treat substrates using directional plasma and reactive gas
Grant 10,004,133 - Liang , et al. June 19, 2 | 2018-06-19 |
Showerhead apparatus for a linear batch chemical vapor deposition system
Grant 9,869,021 - Sferlazzo , et al. January 16, 2 | 2018-01-16 |
Apparatus And Techniques To Treat Substrates Using Directional Plasma And Reactive Gas
App 20170311430 - Liang; Shurong ; et al. | 2017-10-26 |
Apparatus and techniques to treat substrates using directional plasma and reactive gas
Grant 9,706,634 - Liang , et al. July 11, 2 | 2017-07-11 |
Apparatus And Techniques To Treat Substrates Using Directional Plasma And Reactive Gas
App 20170042010 - Liang; Shurong ; et al. | 2017-02-09 |
Method And Apparatus For Surface Processing Of A Substrate Using An Energetic Particle Beam
App 20160071708 - Druz; Boris L. ; et al. | 2016-03-10 |
Method and apparatus for surface processing of a substrate using an energetic particle beam
Grant 9,206,500 - Druz , et al. December 8, 2 | 2015-12-08 |
Parallel batch chemical vapor deposition system
Grant 9,169,562 - Sferlazzo , et al. October 27, 2 | 2015-10-27 |
Linear batch chemical vapor deposition system
Grant 8,986,451 - Sferlazzo March 24, 2 | 2015-03-24 |
Method And System For Inline Chemical Vapor Deposition
App 20140331931 - Sferlazzo; Piero ; et al. | 2014-11-13 |
Method and system for inline chemical vapor deposition
Grant 8,865,259 - Sferlazzo , et al. October 21, 2 | 2014-10-21 |
Heating System For A Roll-to-roll Deposition System
App 20140033976 - Sferlazzo; Piero | 2014-02-06 |
Showerhead Apparatus For A Linear Batch Chemical Vapor Deposition System
App 20130270362 - Sferlazzo; Piero ; et al. | 2013-10-17 |
Web Cooling Device For A Vacuum Processing System
App 20130255922 - Sferlazzo; Piero ; et al. | 2013-10-03 |
Method For Fabricating Thin-film Photovoltaic Devices
App 20130224904 - Sferlazzo; Piero ; et al. | 2013-08-29 |
Parallel Batch Chemical Vapor Deposition System
App 20120219713 - Sferlazzo; Piero ; et al. | 2012-08-30 |
Cooling apparatus for a web deposition system
Grant 8,225,527 - Sferlazzo , et al. July 24, 2 | 2012-07-24 |
Apparatus for cathodic vacuum-arc coating deposition
Grant 8,157,976 - Druz , et al. April 17, 2 | 2012-04-17 |
Movable Injectors In Rotating Disc Gas Reactors
App 20120070916 - Sferlazzo; Piero ; et al. | 2012-03-22 |
System And Method For Fabricating Thin-film Photovoltaic Devices
App 20120031604 - Sferlazzo; Piero ; et al. | 2012-02-09 |
System And Method For Fabricating Thin-film Photovoltaic Devices
App 20120034734 - Sferlazzo; Piero ; et al. | 2012-02-09 |
System And Method For Fabricating Thin-film Photovoltaic Devices
App 20120034733 - Sferlazzo; Piero ; et al. | 2012-02-09 |
System And Method For Fabricating Thin-film Photovoltaic Devices
App 20120034764 - Sferlazzo; Piero ; et al. | 2012-02-09 |
Cooling Apparatus For A Web Deposition System
App 20120006520 - Sferlazzo; Piero ; et al. | 2012-01-12 |
Movable injectors in rotating disc gas reactors
Grant 8,092,599 - Sferlazzo , et al. January 10, 2 | 2012-01-10 |
Linear Batch Chemical Vapor Deposition System
App 20110293831 - Sferlazzo; Piero | 2011-12-01 |
Method And System For Inline Chemical Vapor Deposition
App 20110262628 - Sferlazzo; Piero ; et al. | 2011-10-27 |
Inline Chemical Vapor Deposition System
App 20110262641 - Sferlazzo; Piero ; et al. | 2011-10-27 |
Apparatus And Method For Ultra-shallow Implantation In A Semiconductor Device
App 20100330787 - Sferlazzo; Piero | 2010-12-30 |
Roll-to-Roll Chemical Vapor Deposition System
App 20100310766 - Armour; Eric A. ; et al. | 2010-12-09 |
Continuous Feed Chemical Vapor Deposition System
App 20100310769 - Armour; Eric ; et al. | 2010-12-09 |
Web Substrate Deposition System
App 20100291308 - Sferlazzo; Piero ; et al. | 2010-11-18 |
Web Substrate Deposition System
App 20100221426 - Sferlazzo; Piero | 2010-09-02 |
Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam
App 20090098306 - Druz; Boris ; et al. | 2009-04-16 |
Movable injectors in rotating disc gas reactors
App 20090017190 - Sferlazzo; Piero ; et al. | 2009-01-15 |
Apparatus For Cathodic Vacuum-arc Coating Deposition
App 20080264341 - Druz; Boris ; et al. | 2008-10-30 |
Sputter deposition system and methods of use
App 20070209932 - Sferlazzo; Piero ; et al. | 2007-09-13 |
Apparatus For Reactive Sputtering
App 20070151842 - DeVito; Richard ; et al. | 2007-07-05 |
Method of sputter depositing an alloy on a substrate
App 20070045102 - Lee; Chih-Ling ; et al. | 2007-03-01 |
Continuous flow deposition system
Grant 6,972,055 - Sferlazzo December 6, 2 | 2005-12-06 |
Substrate processing pallet and related substrate processing method and machine
Grant 6,821,912 - Klein , et al. November 23, 2 | 2004-11-23 |
Continuous Flow Deposition System
App 20040187784 - Sferlazzo, Piero | 2004-09-30 |
Acousto-optic tunable filter with segmented acousto-optic interaction region
Grant 6,718,076 - Bures , et al. April 6, 2 | 2004-04-06 |
Substrate processing pallet and related substrate processing method and machine
Grant 6,682,288 - Klein , et al. January 27, 2 | 2004-01-27 |
Dual-scan thin film processing system
Grant 6,669,824 - Sferlazzo , et al. December 30, 2 | 2003-12-30 |
Acousto-optic tunable filter with segmented acousto-optic interaction region
App 20030179975 - Bures, Kenneth J. ; et al. | 2003-09-25 |
Differentially-pumped material processing system
Grant 6,495,010 - Sferlazzo December 17, 2 | 2002-12-17 |
Substrate processing pallet and related substrate processing method and machine
App 20020034429 - Klein, Martin P. ; et al. | 2002-03-21 |
Substrate processing pallet and related substrate processing method and machine
App 20020033133 - Klein, Martin P. ; et al. | 2002-03-21 |
Substrate processing pallet and related substrate processing method and machine
App 20020034883 - Klein, Martin P. ; et al. | 2002-03-21 |
Dual-scan thin film processing system
App 20020005347 - Sferlazzo, Piero ; et al. | 2002-01-17 |
Differentially-pumped material processing system
App 20020003086 - Sferlazzo, Piero | 2002-01-10 |
In-line sputter deposition system
Grant 6,217,272 - Felsenthal , et al. April 17, 2 | 2001-04-17 |
Aerosol surface processing
Grant 6,203,406 - Rose , et al. March 20, 2 | 2001-03-20 |
Processing a surface
Grant 5,967,156 - Rose , et al. October 19, 1 | 1999-10-19 |
Aerosol surface processing
Grant 5,931,721 - Rose , et al. August 3, 1 | 1999-08-03 |
Control mechanisms for dosimetry control in ion implantation systems
Grant 5,811,823 - Blake , et al. September 22, 1 | 1998-09-22 |
Microwave energized ion source for ion implantation
Grant 5,523,652 - Sferlazzo , et al. June 4, 1 | 1996-06-04 |
Ion generating source for use in an ion implanter
Grant 5,497,006 - Sferlazzo , et al. March 5, 1 | 1996-03-05 |
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