SEXTON; Gregory
Patent Applications and Registrations
Patent applications and USPTO patent grants for SEXTON; Gregory.The latest application filed is for "tunable upper plasma-exclusion-zone ring for a bevel etcher".
- SEXTON; Gregory - Fremont CA
| Patent | Date |
|---|---|
| Tunable Upper Plasma-exclusion-zone Ring For A Bevel Etcher App 20210151297 - CHEN; Jack ; et al. | 2021-05-20 |
| Tunable upper plasma-exclusion-zone ring for a bevel etcher Grant 10,937,634 - Chen , et al. March 2, 2 | 2021-03-02 |
| Back side deposition apparatus and applications Grant 9,881,788 - Kim , et al. January 30, 2 | 2018-01-30 |
| Back Side Deposition Apparatus And Applications App 20150340225 - Kim; Yunsang ; et al. | 2015-11-26 |
| Configurable bevel etcher Grant 9,053,925 - Bailey, III , et al. June 9, 2 | 2015-06-09 |
| Tunable Upper Plasma-exclusion-zone Ring For A Bevel Etcher App 20150099365 - Chen; Jack ; et al. | 2015-04-09 |
| Bevel etcher with vacuum chuck Grant 8,721,908 - Bailey, III , et al. May 13, 2 | 2014-05-13 |
| Bevel Etcher With Vacuum Chuck App 20140038418 - Bailey, III; Andrew D. ; et al. | 2014-02-06 |
| Methods And Apparatus For Bevel Edge Cleaning In A Plasma Processing System App 20140007901 - Chen; Jack ; et al. | 2014-01-09 |
| Bevel etcher with vacuum chuck Grant 8,580,078 - Bailey, III , et al. November 12, 2 | 2013-11-12 |
| Flush mounted fastener for plasma processing apparatus Grant 8,562,266 - Sexton October 22, 2 | 2013-10-22 |
| Passive Compensation For Temperature-dependent Wafer Gap Changes In Plasma Processing Systems App 20120318455 - Fischer; Andreas ; et al. | 2012-12-20 |
| Configurable Bevel Etcher App 20110214687 - Bailey, III; Andrew D. ; et al. | 2011-09-08 |
| Extension Electrode Of Plasma Bevel Etching Apparatus And Method Of Manufacture Thereof App 20110206833 - Sexton; Gregory ; et al. | 2011-08-25 |
| Flush Mounted Fastener For Plasma Processing Apparatus App 20110206479 - Sexton; Gregory | 2011-08-25 |
| Configurable bevel etcher Grant 7,943,007 - Bailey, III , et al. May 17, 2 | 2011-05-17 |
| Bevel etcher with gap control Grant 7,858,898 - Bailey, III , et al. December 28, 2 | 2010-12-28 |
| Bevel etcher with gap control App 20080179297 - Bailey; Andrew D. ; et al. | 2008-07-31 |
| Configurable bevel etcher App 20080182412 - Bailey III; Andrew D. ; et al. | 2008-07-31 |
| Bevel etcher with vacuum chuck App 20080179010 - Bailey III; Andrew D. ; et al. | 2008-07-31 |
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