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Systems And Methods For Laser Splitting And Device Layer Transfer App 20160336233 - Yonehara; Takao ;   et al. | 2016-11-17 |
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High-throughput Thermal Processing Methods For Producing High-efficiency Crystalline Silicon Solar Cells App 20150132931 - Kapur; Pawan ;   et al. | 2015-05-14 |
Metal Foil Metallization For Backplane-attached Solar Cells And Modules App 20150129031 - Moslehi; Mehrdad M. ;   et al. | 2015-05-14 |
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Surface Passivation Of High-efficiency Crystalline Silicon Solar Cells App 20150101662 - Seutter; Sean M. ;   et al. | 2015-04-16 |
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Back Contact Solar Cells Using Aluminum-based Alloy Metallization App 20140360567 - Seutter; Sean M. ;   et al. | 2014-12-11 |
Structures And Methods Of Formation Of Contiguous And Non-contiguous Base Regions For High Efficiency Back-contact Solar Cells App 20140158193 - Desphande; Anande ;   et al. | 2014-06-12 |
High Efficiency Solar Cell Structures And Manufacturing Methods App 20130213469 - Kramer; Karl-Josef ;   et al. | 2013-08-22 |
High-efficiency Photovoltaic Back-contact Solar Cell Structures And Manufacturing Methods Using Three-dimensional Semiconductor Absorbers App 20130167915 - Moslehi; Mehrdad M. ;   et al. | 2013-07-04 |
Laser Annealing Applications In High-efficiency Solar Cells App 20130164883 - Moslehi; Mehrdad M. ;   et al. | 2013-06-27 |
Active Backplane For Thin Silicon Solar Cells App 20130000715 - Moslehi; Mehrdad M. ;   et al. | 2013-01-03 |
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Backplane Reinforcement And Interconnects For Solar Cells App 20120103408 - Moslehi; Mehrdad M. ;   et al. | 2012-05-03 |
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Passivation Methods And Apparatus For Achieving Ultra-low Surface Recombination Velocities For High-efficiency Solar Cells App 20110284068 - Moslehi; Mehrdad M. ;   et al. | 2011-11-24 |
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Multi-Layer Charge Trap Silicon Nitride/Oxynitride Layer Engineering with Interface Region Control App 20110101442 - Ganguly; Udayan ;   et al. | 2011-05-05 |
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Multi-Zone Resistive Heater App 20090314762 - Cui; Anqing ;   et al. | 2009-12-24 |
Method for treating substrates and films with photoexcitation Grant 7,601,652 - Singh , et al. October 13, 2 | 2009-10-13 |
Method For Silicon Based Dielectric Chemical Vapor Deposition App 20090111284 - Wang; Yaxin ;   et al. | 2009-04-30 |
Silicon nitride film with stress control Grant 7,488,690 - Iyer , et al. February 10, 2 | 2009-02-10 |
Method for silicon based dielectric chemical vapor deposition Grant 7,473,655 - Wang , et al. January 6, 2 | 2009-01-06 |
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Apparatus For Integrated Gas And Radiation Delivery App 20080152840 - RIPLEY; MARTIN JOHN ;   et al. | 2008-06-26 |
METHOD AND APPARATUS FOR LOW TEMPERATURE AND LOW K SiBN DEPOSITION App 20080145536 - ZHANG; KANGZHAN ;   et al. | 2008-06-19 |
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Integration Process Of Tungsten Atomic Layer Deposition For Metallization Application App 20070099415 - Chen; Ling ;   et al. | 2007-05-03 |
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Method for silicon based dielectric deposition and clean with photoexcitation App 20060286819 - Seutter; Sean M. ;   et al. | 2006-12-21 |
Method for treating substrates and films with photoexcitation App 20060286820 - Singh; Kaushal K. ;   et al. | 2006-12-21 |
Method For Forming Silicon-containing Materials During A Photoexcitation Deposition Process App 20060286774 - Singh; Kaushal K. ;   et al. | 2006-12-21 |
Formation of a tantalum-nitride layer Grant 7,094,680 - Seutter , et al. August 22, 2 | 2006-08-22 |
Apparatus and method for the deposition of silicon nitride films App 20060102076 - Smith; Jacob W. ;   et al. | 2006-05-18 |
Formation of a tantalum-nitride layer App 20060030148 - Seutter; Sean M. ;   et al. | 2006-02-09 |
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Method for silicon nitride chemical vapor deposition App 20050255714 - Iyer, R. Suryanarayanan ;   et al. | 2005-11-17 |
Formation of a tantalum-nitride layer Grant 6,951,804 - Seutter , et al. October 4, 2 | 2005-10-04 |
Formation of a tantalum-nitride layer App 20050164487 - Seutter, Sean M. ;   et al. | 2005-07-28 |
Thermal chemical vapor deposition of silicon nitride using BTBAS bis(tertiary-butylamino silane) in a single wafer chamber App 20050109276 - Iyer, R. Suryanarayanan ;   et al. | 2005-05-26 |
Deposition of silicon nitride App 20030215570 - Seutter, Sean M. ;   et al. | 2003-11-20 |
Integration of ALD tantalum nitride and alpha-phase tantalum for copper metallization application App 20030124262 - Chen, Ling ;   et al. | 2003-07-03 |
Chamber hardware design for titanium nitride atomic layer deposition App 20030116087 - Nguyen, Anh N. ;   et al. | 2003-06-26 |
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