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Patent applications and USPTO patent grants for Setton, David A..The latest application filed is for "methods for transporting wafers for vacuum processing".
Patent | Date |
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Methods for transporting wafers for vacuum processing App 20040091349 - Tabrizi, Farzad ;   et al. | 2004-05-13 |
Door systems for low contamination, high throughput handling of workpieces for vacuum processing Grant 6,647,665 - Tabrizi , et al. November 18, 2 | 2003-11-18 |
Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing Grant 6,568,552 - Tabrizi , et al. May 27, 2 | 2003-05-27 |
Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber Grant 6,315,512 - Tabrizi , et al. November 13, 2 | 2001-11-13 |
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