Patent | Date |
---|
Semiconductor Device And Method For Manufacturing The Same App 20220302057 - SETTA; Yuji | 2022-09-22 |
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device App 20220293450 - SETTA; Yuji | 2022-09-15 |
Semiconductor Device And Manufacturing Method Thereof App 20220077090 - SETTA; Yuji | 2022-03-10 |
Semiconductor device and method of manufacturing the same Grant 11,195,849 - Yoshimizu , et al. December 7, 2 | 2021-12-07 |
Semiconductor Device And Method Of Manufacturing The Same App 20200303408 - YOSHIMIZU; Yasuhito ;   et al. | 2020-09-24 |
Semiconductor device and method for manufacturing same Grant 9,853,052 - Setta December 26, 2 | 2017-12-26 |
Method of forming mark pattern, recording medium and method of generating mark data Grant 9,741,564 - Setta , et al. August 22, 2 | 2017-08-22 |
Microstructure device and method for manufacturing the same Grant 9,698,157 - Kono , et al. July 4, 2 | 2017-07-04 |
Method Of Forming Mark Pattern, Recording Medium And Method Of Generating Mark Data App 20160322307 - SETTA; Yuji ;   et al. | 2016-11-03 |
Semiconductor memory device and method of manufacturing semiconductor memory device and method of layouting auxiliary pattern Grant 9,455,271 - Setta September 27, 2 | 2016-09-27 |
Microstructure Device And Method For Manufacturing The Same App 20160268278 - KONO; Yuko ;   et al. | 2016-09-15 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20150357410 - MIZUTANI; Takuya ;   et al. | 2015-12-10 |
Nonvolatile Semiconductor Memory Device App 20150060975 - NITTA; Hiroyuki ;   et al. | 2015-03-05 |
Focus position adjusting apparatus, reticle, focus position adjusting program, and method of manufacturing semiconductor device Grant 8,910,096 - Setta December 9, 2 | 2014-12-09 |
Focus Position Adjusting Apparatus, Reticle, Focus Position Adjusting Program, And Method Of Manufacturing Semiconductor Device App 20140240683 - SETTA; Yuji | 2014-08-28 |
Semiconductor device manufacturing method Grant 8,349,540 - Setta , et al. January 8, 2 | 2013-01-08 |
Semiconductor device manufacturing method Grant 8,349,541 - Setta , et al. January 8, 2 | 2013-01-08 |
Method for manufacturing semiconductor device Grant 8,093,156 - Setta , et al. January 10, 2 | 2012-01-10 |
Semiconductor Device Manufacturing Method App 20110312186 - SETTA; Yuji ;   et al. | 2011-12-22 |
Semiconductor device manufacturing method and design support apparatus Grant 8,043,948 - Setta October 25, 2 | 2011-10-25 |
Exposure mask and method of manufacturing a semiconductor device Grant 7,927,764 - Setta April 19, 2 | 2011-04-19 |
Semiconductor Device Manufacturing Method And Design Support Apparatus App 20100190327 - Setta; Yuji | 2010-07-29 |
Method for manufacturing semiconductor device and method for designing photomask pattern Grant 7,723,230 - Setta May 25, 2 | 2010-05-25 |
Exposure mask and method of manufacturing the same, and semiconductor device manufacturing method Grant 7,659,040 - Setta February 9, 2 | 2010-02-09 |
Method For Manufacturing Semiconductor Device And Method For Designing Photomask Pattern App 20090081882 - SETTA; Yuji | 2009-03-26 |
Exposure mask and method of manufacturing a film pattern App 20080085457 - SETTA; Yuji | 2008-04-10 |
Method for manufacturing semiconductor device App 20070232077 - Setta; Yuji ;   et al. | 2007-10-04 |
Semiconductor device manufacturing method App 20070178411 - Setta; Yuji ;   et al. | 2007-08-02 |
Exposure mask and method of manufacturing the same, and semiconductor device manufacturing method App 20060269848 - Setta; Yuji | 2006-11-30 |
Semiconductor device and method for fabricating the same Grant 7,138,312 - Minami , et al. November 21, 2 | 2006-11-21 |
Semiconductor device and method for fabricating the same App 20060199318 - Minami; Takayoshi ;   et al. | 2006-09-07 |
Semiconductor device and method for fabricating the same Grant 7,064,395 - Minami , et al. June 20, 2 | 2006-06-20 |
Semiconductor device and method for fabricating the same App 20050040468 - Minami, Takayoshi ;   et al. | 2005-02-24 |