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Patent applications and USPTO patent grants for SETA; Satoko.The latest application filed is for "method of cleaning a film-forming apparatus".
Patent | Date |
---|---|
Method Of Cleaning A Film-forming Apparatus App 20130220377 - SATO; Yuusuke ;   et al. | 2013-08-29 |
Method of manufacturing semiconductor device Grant 8,114,776 - Eda , et al. February 14, 2 | 2012-02-14 |
Method Of Manufacturing Semiconductor Device App 20110076833 - Eda; Hajime ;   et al. | 2011-03-31 |
Polishing Method, Polishing Apparatus, And Manufacturing Method Of Semiconductor Device App 20110070745 - MATSUI; Yukiteru ;   et al. | 2011-03-24 |
Polishing Apparatus And Method Of Manufacturing Semiconductor Device Using The Same App 20100240285 - SETA; Satoko | 2010-09-23 |
Semiconductor Device Manufacturing Method App 20090258493 - MATSUI; Yukiteru ;   et al. | 2009-10-15 |
Method of manufacturing semiconductor device Grant 7,435,682 - Matsui , et al. October 14, 2 | 2008-10-14 |
Method of manufacturing semiconductor device App 20050266355 - Matsui, Yukiteru ;   et al. | 2005-12-01 |
Method of cleaning a film-forming apparatus and film-forming apparatus App 20050082002 - Sato, Yuusuke ;   et al. | 2005-04-21 |
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