Patent | Date |
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Sacrificial Fin For Contact Self-alignment App 20220262923 - Mignot; Yann ;   et al. | 2022-08-18 |
Vertical Field Effect Transistor With Crosslink Fin Arrangement App 20220199776 - Seshadri; Indira ;   et al. | 2022-06-23 |
Staggered Stacked Vertical Crystalline Semiconducting Channels App 20220149042 - Kang; Tsung-Sheng ;   et al. | 2022-05-12 |
Sacrificial fin for contact self-alignment Grant 11,316,029 - Mignot , et al. April 26, 2 | 2022-04-26 |
Bottom Source/drain Etch With Fin-cut-last-vtfet App 20220069106 - Li; Tao ;   et al. | 2022-03-03 |
Staggered stacked vertical crystalline semiconducting channels Grant 11,251,182 - Kang , et al. February 15, 2 | 2022-02-15 |
Bottom source/drain etch with fin-cut-last-VTFET Grant 11,245,027 - Li , et al. February 8, 2 | 2022-02-08 |
Self-priming resist for generic inorganic hardmasks Grant 11,226,561 - Liu , et al. January 18, 2 | 2022-01-18 |
Metal Cut Patterning And Etching To Minimize Interlayer Dielectric Layer Loss App 20220005698 - Chung; Kisup ;   et al. | 2022-01-06 |
Sacrificial Fin For Contact Self-alignment App 20210328041 - Mignot; Yann ;   et al. | 2021-10-21 |
Metal cut patterning and etching to minimize interlayer dielectric layer loss Grant 11,133,189 - Chung , et al. September 28, 2 | 2021-09-28 |
Vertically Stacked Fin Semiconductor Devices App 20210296438 - Joseph; Praveen ;   et al. | 2021-09-23 |
Staggered Stacked Vertical Crystalline Semiconducting Channels App 20210296314 - Kang; Tsung-Sheng ;   et al. | 2021-09-23 |
Bottom Source/drain Etch With Fin-cut-last-vtfet App 20210288164 - Li; Tao ;   et al. | 2021-09-16 |
Tunable hardmask for overlayer metrology contrast Grant 11,121,024 - De Silva , et al. September 14, 2 | 2021-09-14 |
Vertically stacked fin semiconductor devices Grant 11,075,266 - Joseph , et al. July 27, 2 | 2021-07-27 |
Semiconductor device with multiple threshold voltages Grant 11,075,081 - Joseph , et al. July 27, 2 | 2021-07-27 |
Transistor Structure With N/p Boundary Buffer App 20210118743 - Lallement; Romain ;   et al. | 2021-04-22 |
Fin cut profile using fin base liner Grant 10,985,025 - Miller , et al. April 20, 2 | 2021-04-20 |
Transistor structure with n/p boundary buffer Grant 10,903,124 - Lallement , et al. January 26, 2 | 2021-01-26 |
Techniques to improve critical dimension width and depth uniformity between features with different layout densities Grant 10,832,945 - Saulnier , et al. November 10, 2 | 2020-11-10 |
Transistor Structure With N/p Boundary Buffer App 20200350212 - Lallement; Romain ;   et al. | 2020-11-05 |
Vertically Stacked Fin Semiconductor Devices App 20200343338 - Joseph; Praveen ;   et al. | 2020-10-29 |
Nanosheet transistor barrier for electrically isolating the substrate from the source or drain regions Grant 10,818,751 - Ebrish , et al. October 27, 2 | 2020-10-27 |
High temperature ultra-fast annealed soft mask for semiconductor devices Grant 10,804,106 - Ebrish , et al. October 13, 2 | 2020-10-13 |
Nanosheet Transistor Barrier For Electrically Isolating The Substrate From The Source Or Drain Regions App 20200279913 - Ebrish; Mona A. ;   et al. | 2020-09-03 |
Enabling Residue Free Gap Fill Between Nanosheets App 20200279956 - SESHADRI; Indira ;   et al. | 2020-09-03 |
Techniques to Improve Critical Dimension Width and Depth Uniformity Between Features with Different Layout Densities App 20200266100 - Saulnier; Nicole ;   et al. | 2020-08-20 |
Boundary protection for CMOS multi-threshold voltage devices Grant 10,741,454 - Guo , et al. A | 2020-08-11 |
Controlling fin hardmask cut profile using a sacrificial epitaxial structure Grant 10,741,452 - Miller , et al. A | 2020-08-11 |
Metal cut patterning and etching to minimize interlayer dielectric layer loss Grant 10,734,234 - Chung , et al. | 2020-08-04 |
Nanosheet substrate to source/drain isolation Grant 10,734,523 - Lie , et al. | 2020-08-04 |
Damage free hardmask strip Grant 10,699,912 - Seshadri , et al. | 2020-06-30 |
Surface treatment of titanium containing hardmasks Grant 10,678,135 - De Silva , et al. | 2020-06-09 |
Controlling gate length of vertical transistors Grant 10,665,715 - Joseph , et al. | 2020-05-26 |
Semiconductor device with multiple threshold voltages Grant 10,665,461 - Joseph , et al. | 2020-05-26 |
Patterning material film stack with hard mask layer configured to support selective deposition on patterned resist layer Grant 10,656,527 - De Silva , et al. | 2020-05-19 |
Enabling residue free gap fill between nanosheets Grant 10,658,521 - Seshadri , et al. | 2020-05-19 |
Controlling Fin Hardmask Cut Profile Using A Sacrificial Epitaxial Structure App 20200135570 - Miller; Eric R. ;   et al. | 2020-04-30 |
Fin Cut Profile Using Fin Base Liner App 20200135484 - Miller; Eric R. ;   et al. | 2020-04-30 |
Approach to prevent collapse of high aspect ratio Fin structures for vertical transport Fin field effect transistor devices Grant 10,629,489 - Seshadri , et al. | 2020-04-21 |
Low undercut N-P work function metal patterning in nanosheet replacement metal gate process Grant 10,629,495 - Seshadri , et al. | 2020-04-21 |
Damage Free Hardmask Strip App 20200118831 - Seshadri; Indira ;   et al. | 2020-04-16 |
Dielectric gap fill evaluation for integrated circuits Grant 10,622,250 - Chu , et al. | 2020-04-14 |
Tunable hardmask for overlayer metrology contrast Grant 10,622,248 - De Silva , et al. | 2020-04-14 |
Surface Treatment Of Titanium Containing Hardmasks App 20200105520 - De Silva; Ekmini A. ;   et al. | 2020-04-02 |
Semiconductor Device With Multiple Threshold Voltages App 20200098569 - Joseph; Praveen ;   et al. | 2020-03-26 |
Approach To Prevent Collapse Of High Aspect Ratio Fin Structures For Vertical Transport Fin Field Effect Transistor Devices App 20200098639 - Seshadri; Indira ;   et al. | 2020-03-26 |
Semiconductor Device With Multiple Threshold Voltages App 20200098570 - Joseph; Praveen ;   et al. | 2020-03-26 |
Wet strippable OPL using reversible UV crosslinking and de-crosslinking Grant 10,586,697 - De Silva , et al. | 2020-03-10 |
Controlling Gate Length Of Vertical Transistors App 20200075761 - Joseph; Praveen ;   et al. | 2020-03-05 |
Boundary Protection For Cmos Multi-threshold Voltage Devices App 20200051872 - Guo; Jing ;   et al. | 2020-02-13 |
Nanosheet Substrate To Source/drain Isolation App 20200052107 - Lie; Fee Li ;   et al. | 2020-02-13 |
Patterning Material Film Stack With Hard Mask Layer Configured To Support Selective Deposition On Patterned Resist Layer App 20200050113 - De Silva; Ekmini Anuja ;   et al. | 2020-02-13 |
Self-priming Resist For Generic Inorganic Hardmasks App 20200050108 - Liu; Chi-Chun ;   et al. | 2020-02-13 |
Tunable Hardmask For Overlayer Metrology Contrast App 20190371651 - De Silva; Ekmini A. ;   et al. | 2019-12-05 |
Inverse Tone Direct Print Euv Lithography Enabled By Selective Material Deposition App 20190355625 - JOSEPH; Praveen ;   et al. | 2019-11-21 |
Enabling Residue Free Gap Fill Between Nanosheets App 20190355851 - SESHADRI; Indira ;   et al. | 2019-11-21 |
Wet Strippable Opl Using Reversible Uv Crosslinking And De-crosslinking App 20190295841 - De Silva; Ekmini A. ;   et al. | 2019-09-26 |
Patterning material film stack comprising hard mask layer having high metal content interface to resist layer Grant 10,395,925 - De Silva , et al. A | 2019-08-27 |
High Temperature Ultra-fast Annealed Soft Mask For Semiconductor Devices App 20190259616 - Ebrish; Mona ;   et al. | 2019-08-22 |
Wet strippable OPL using reversible UV crosslinking and de-crosslinking Grant 10,388,510 - De Silva , et al. A | 2019-08-20 |
Vertical transport FET with two or more gate lengths Grant 10,361,127 - Karve , et al. | 2019-07-23 |
Self-aligned double patterning formed fincut Grant 10,361,129 - Sieg , et al. | 2019-07-23 |
Wet Strippable Opl Using Reversible Uv Crosslinking And De-crosslinking App 20190221423 - De Silva; Ekmini A. ;   et al. | 2019-07-18 |
Simplified block patterning with wet strippable hardmask for high-energy implantation Grant 10,354,922 - De Silva , et al. July 16, 2 | 2019-07-16 |
Low Undercut N-p Work Function Metal Patterning In Nanosheet Replacement Metal Gate Process App 20190214311 - Seshadri; Indira ;   et al. | 2019-07-11 |
Patterning Material Film Stack Comprising Hard Mask Layer Having High Metal Content Interface To Resist Layer App 20190206681 - De Silva; Ekmini Anuja ;   et al. | 2019-07-04 |
Tunable Hardmask For Overlayer Metrology Contrast App 20190206722 - De Silva; Ekmini A. ;   et al. | 2019-07-04 |
Vertical Transport Fet With Two Or More Gate Lengths App 20190206738 - Karve; Gauri ;   et al. | 2019-07-04 |
Simplified Block Patterning With Wet Strippable Hardmask For High-energy Implantation App 20190198398 - De Silva; Ekmini Anuja ;   et al. | 2019-06-27 |
Metal Cut Patterning And Etching To Minimize Interlayer Dielectric Layer Loss App 20190198327 - Chung; Kisup ;   et al. | 2019-06-27 |
Patterning Material Film Stack With Hard Mask Layer Configured To Support Selective Deposition On Patterned Resist Layer App 20190196340 - De Silva; Ekmini Anuja ;   et al. | 2019-06-27 |
Dielectric Gap Fill Evaluation For Integrated Circuits App 20190189503 - Chu; Isabel Cristina ;   et al. | 2019-06-20 |
Metal Cut Patterning And Etching To Minimize Interlayer Dielectric Layer Loss App 20190189452 - Chung; Kisup ;   et al. | 2019-06-20 |
Dielectric Gap Fill Evaluation For Integrated Circuits App 20190189504 - Chu; Isabel Cristina ;   et al. | 2019-06-20 |
Surface Treatment Of Titanium Containing Hardmasks App 20190189429 - De Silva; Ekmini A. ;   et al. | 2019-06-20 |
Dielectric gap fill evaluation for integrated circuits Grant 10,312,140 - Chu , et al. | 2019-06-04 |
Inverse tone direct print EUV lithography enabled by selective material deposition Grant 10,304,744 - Joseph , et al. | 2019-05-28 |
Low undercut N-P work function metal patterning in nanosheet replacement metal gate process Grant 10,276,452 - Seshadri , et al. | 2019-04-30 |
Direct gate patterning for vertical transport field effect transistor Grant 10,176,997 - De Silva , et al. J | 2019-01-08 |