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Patent applications and USPTO patent grants for Sergi; Steven G..The latest application filed is for "carbon dopant gas and co-flow for implant beam and source life performance improvement".
Patent | Date |
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Carbon dopant gas and co-flow for implant beam and source life performance improvement Grant 10,354,877 - Byl , et al. July 16, 2 | 2019-07-16 |
Carbon Dopant Gas And Co-flow For Implant Beam And Source Life Performance Improvement App 20180211839 - Byl; Oleg ;   et al. | 2018-07-26 |
Carbon dopant gas and co-flow for implant beam and source life performance improvement Grant 9,960,042 - Byl , et al. May 1, 2 | 2018-05-01 |
Carbon Dopant Gas And Co-flow For Implant Beam And Source Life Performance Improvement App 20160020102 - Byl; Oleg ;   et al. | 2016-01-21 |
Ion Implantation Tool Cleaning Apparatus And Method App 20120111374 - Despres; Joseph R. ;   et al. | 2012-05-10 |
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