Seo; Hwan Seok

Patent Applications and Registrations

Patent applications and USPTO patent grants for Seo; Hwan Seok.The latest application filed is for "photomasks, methods of manufacturing photomasks, and methods of manufacturing semiconductor device using photomasks".

Company Profile

2.10.10

Seo; Hwan Seok - Suwon-si KR
Seo; Hwan Seok - Ichon KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Mask blank and phase shift mask using same Grant 10,444,619 - Lee , et al. Oc	2019-10-15
Photomasks, Methods Of Manufacturing Photomasks, And Methods Of Manufacturing Semiconductor Device Using Photomasks App 20190179225 - SEO; Hwan Seok ; et al.	2019-06-13
Mask Blank And Phase Shift Mask Using Same App 20180033612 - LEE; Hye Kyoung ; et al.	2018-02-01
Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same Grant 9,645,484 - Kim , et al. May 9, 2	2017-05-09
Reflective photomask blanks and reflective photomasks Grant 9,454,074 - Seo , et al. September 27, 2	2016-09-27
Reflective Masks For Use In Extreme Ultraviolet Lithography Apparatus And Methods Of Manufacturing The Same App 20160116835 - KIM; Seong-sue ; et al.	2016-04-28
Beam generator Grant 9,025,624 - Lee , et al. May 5, 2	2015-05-05
Reflective Photomask Blanks and Reflective Photomasks App 20150010854 - SEO; Hwan-seok ; et al.	2015-01-08
EUV projection lens and optic system having the same Grant 8,637,840 - Lee , et al. January 28, 2	2014-01-28
Beam Generator App 20130028273 - Lee; Dong-Gun ; et al.	2013-01-31
Reflective photomask and method of fabricating, reflective illumination system and method of process using the same Grant 8,119,309 - Lee , et al. February 21, 2	2012-02-21
Method of manufacturing mask structure App 20110065029 - Seo; Hwan-Seok ; et al.	2011-03-17
EUV projection lens and optic system having the same App 20110042587 - LEE; Dong-Gun ; et al.	2011-02-24
Reflective photomask and method of fabricating, reflective illumination system and method of process using the same App 20100216062 - Lee; Dong-Gun ; et al.	2010-08-26
Method of manufacturing a gate electrode in a semiconductor device Grant 6,184,113 - Seo , et al. February 6, 2	2001-02-06

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