Senzaki; Shigeru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Senzaki; Shigeru.The latest application filed is for "plasma processing method".

Company Profile

2.7.14

Senzaki; Shigeru - Miyagi JP
Senzaki; Shigeru - Kurokawa-gun JP
Senzaki; Shigeru - Ehime JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma processing apparatus Grant 10,276,405 - Miyata , et al.	2019-04-30
Temperature control mechanism, temperature control method and substrate processing apparatus Grant 10,199,246 - Koizumi , et al. Fe	2019-02-05
Dechuck control method and plasma processing apparatus Grant 10,069,443 - Senzaki , et al. September 4, 2	2018-09-04
Plasma processing method Grant 9,818,582 - Murakami , et al. November 14, 2	2017-11-14
Substrate processing apparatus and maintenance method thereof Grant 9,613,837 - Senzaki , et al. April 4, 2	2017-04-04
Plasma Processing Method App 20160372308 - MURAKAMI; Hiraku ; et al.	2016-12-22
Temperature Control Mechanism, Temperature Control Method And Substrate Processing Apparatus App 20160225645 - KOIZUMI; Katsuyuki ; et al.	2016-08-04
Plasma Processing Apparatus App 20160172217 - MIYATA; Akinori ; et al.	2016-06-16
Plasma Processing Apparatus App 20160086773 - SENZAKI; Shigeru	2016-03-24
Substrate Processing Apparatus And Maintenance Method Thereof App 20150086302 - Senzaki; Shigeru ; et al.	2015-03-26
Method For Producing Filtration Filter App 20130240479 - MORIYA; Tsuyoshi ; et al.	2013-09-19
Method For Calculating Bill For Use Of Water Purification System And Water Purification System App 20130226752 - Moriya; Tsuyoshi ; et al.	2013-08-29
Water Treatment Device And Water Treatment Method App 20130193087 - Moriya; Tsuyoshi ; et al.	2013-08-01
Dechuck Control Method And Plasma Processing Apparatus App 20130153147 - SENZAKI; Shigeru ; et al.	2013-06-20
Lighting Device And Lighting System App 20090290336 - Senzaki; Shigeru ; et al.	2009-11-26
Illumination System App 20090052182 - Matsuba; Yoshiaki ; et al.	2009-02-26
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism Grant 7,481,903 - Senzaki , et al. January 27, 2	2009-01-27
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism App 20050150456 - Senzaki, Shigeru ; et al.	2005-07-14
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism Grant 6,899,786 - Senzaki , et al. May 31, 2	2005-05-31
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism App 20040108068 - Senzaki, Shigeru ; et al.	2004-06-10

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