Sensys Instruments Corporation
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sensys Instruments Corporation.The latest application filed is for "integrated surface metrology".
- Sensys Instruments Corporation - Santa Clara CA
- Sensys Instruments Corporation - Sunnyvale CA
| Patent | Date |
|---|---|
| Integrated surface metrology Grant 6,829,054 - Stanke , et al. December 7, 2 | 2004-12-07 |
| Integrated surface metrology Grant 6,690,473 - Stanke , et al. February 10, 2 | 2004-02-10 |
| Notch and flat sensor for wafer alignment Grant 6,677,602 - Norton January 13, 2 | 2004-01-13 |
| Small-spot spectrometry instrument with reduced polarization Grant 6,667,805 - Norton , et al. December 23, 2 | 2003-12-23 |
| Apparatus and method for characterizing semiconductor wafers during processing Grant 6,182,510 - Stanke , et al. February 6, 2 | 2001-02-06 |
| In-situ measurement of deposition on reactor chamber members Grant 6,019,000 - Stanke , et al. February 1, 2 | 2000-02-01 |
| Apparatus and method for characterizing semiconductor wafers during processing Grant 5,996,415 - Stanke , et al. December 7, 1 | 1999-12-07 |
| SEC | 0001024276 | SENSYS INSTRUMENTS CORP |
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