Patent | Date |
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Tantalum sputtering target, and production method therefor Grant 10,658,163 - Nagatsu , et al. | 2020-05-19 |
Tantalum sputtering target, and production method therefor Grant 10,570,505 - Nagatsu , et al. Feb | 2020-02-25 |
Tungsten Target App 20200016660 - Dasai; Takafumi ;   et al. | 2020-01-16 |
Tantalum sputtering target and method for producing same Grant 10,490,393 - Senda , et al. Nov | 2019-11-26 |
Tantalum sputtering target and method for producing same Grant 10,407,766 - Senda , et al. Sept | 2019-09-10 |
Sputtering target-backing plate assembly Grant 10,354,846 - Nagatsu , et al. July 16, 2 | 2019-07-16 |
Tantalum Sputtering Target, And Production Method Therefor App 20180105926 - Nagatsu; Kotaro ;   et al. | 2018-04-19 |
Tantalum sputtering target, method for manufacturing same, and barrier film for semiconductor wiring formed by using target Grant 9,890,452 - Nagatsu , et al. February 13, 2 | 2018-02-13 |
Tantalum sputtering target and production method therefor Grant 9,859,104 - Senda , et al. January 2, 2 | 2018-01-02 |
Tantalum Sputtering Target, And Production Method Therefor App 20170372879 - Nagatsu; Kotaro ;   et al. | 2017-12-28 |
Tantalum sputtering target Grant 9,845,528 - Fukushima , et al. December 19, 2 | 2017-12-19 |
Sputtering Target-backing Plate Assembly App 20160086777 - Nagatsu; Kotaro ;   et al. | 2016-03-24 |
Tantalum Sputtering Target And Production Method Therefor App 20150348765 - Senda; Shinichiro ;   et al. | 2015-12-03 |
Tantalum Sputtering Target And Method For Producing Same App 20150329959 - Senda; Shinichiro ;   et al. | 2015-11-19 |
Tantalum Sputtering Target And Method For Producing Same App 20150279637 - Senda; Shinichiro ;   et al. | 2015-10-01 |
Tantalum sputtering target Grant 9,085,819 - Senda , et al. July 21, 2 | 2015-07-21 |
Barrier film for semiconductor wiring, sintered compact sputtering target and method of producing the sputtering target Grant 9,051,645 - Senda , et al. June 9, 2 | 2015-06-09 |
Tantalum Sputtering Target, Method For Manufacturing Same, And Barrier Film For Semiconductor Wiring Formed By Using Target App 20150064056 - Nagatsu; Kotaro ;   et al. | 2015-03-05 |
Tantalum Sputtering Target and Method for Manufacturing Same App 20140242401 - Senda; Shinichiro ;   et al. | 2014-08-28 |
Tantalum Sputtering Target App 20130098759 - Senda; Shinichiro ;   et al. | 2013-04-25 |
Tantalum Sputtering Target App 20130092534 - Senda; Shinichiro ;   et al. | 2013-04-18 |
Plated product having copper thin film formed thereon by electroless plating Grant 8,283,051 - Ito , et al. October 9, 2 | 2012-10-09 |
Tantalum Sputtering Target App 20120037501 - Fukushima; Atsushi ;   et al. | 2012-02-16 |
Tantalum Sputtering Target App 20120031756 - Fukushima; Atsushi ;   et al. | 2012-02-09 |
Barrier Film for Semiconductor Wiring, Sintered Compact Sputtering Target and Method of Producing the Sputtering Target App 20110155570 - Senda; Shinichiro ;   et al. | 2011-06-30 |
Plated Product Having Copper Thin Film Formed Thereon By Electroless Plating App 20110129688 - Ito; Junichi ;   et al. | 2011-06-02 |