Sen Corporation, An Shi and Axcelis Company
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sen Corporation, An Shi and Axcelis Company.The latest application filed is for "beam processing apparatus".
- Sen Corporation, An Shi and Axcelis Company - Tokyo JP
- SEN Corporation, an SHI and Axcelis Company - JP JP
- SEN Corporation, an SHI and AXCELIS Company -
| Patent | Date |
|---|---|
| Wafer processing system, wafer processing method, and ion implantation system Grant 8,096,744 - Okada , et al. January 17, 2 | 2012-01-17 |
| Ion source apparatus and cleaning optimized method thereof Grant 7,947,129 - Murata , et al. May 24, 2 | 2011-05-24 |
| Ion implantation apparatus and ion implantation method Grant 7,851,772 - Tsukihara , et al. December 14, 2 | 2010-12-14 |
| Ion implantation apparatus Grant 7,791,049 - Tsukihara , et al. September 7, 2 | 2010-09-07 |
| Electrostatic beam deflection scanner and beam deflection scanning method Grant 7,687,782 - Tsukihara , et al. March 30, 2 | 2010-03-30 |
| Method of controlling mover device Grant 7,597,531 - Okada , et al. October 6, 2 | 2009-10-06 |
| Beam Processing Apparatus App 20080258074 - TSUKIHARA; Mitsukuni ; et al. | 2008-10-23 |
| Ion Implantation Apparatus and Method of Converging/Shaping Ion Beam Used Therefor App 20080251734 - Tsukihara; Mitsukuni ; et al. | 2008-10-16 |
| Ion Implantation Apparatus And Ion Implantation Method App 20080251713 - Tsukihara; Mitsukuni ; et al. | 2008-10-16 |
| Ion Implantation Apparatus App 20080251737 - TSUKIHARA; Mitsukuni ; et al. | 2008-10-16 |
| Irradiation system with ion beam/charged particle beam Grant 7,423,276 - Yagita September 9, 2 | 2008-09-09 |
| Method to increase low-energy beam current in irradiation system with ion beam Grant 7,361,892 - Kabasawa , et al. April 22, 2 | 2008-04-22 |
| Irradiation system with ion beam Grant 7,351,987 - Kabasawa , et al. April 1, 2 | 2008-04-01 |
| Beam processing system and beam processing method App 20080067397 - Tsukihara; Mitsukuni ; et al. | 2008-03-20 |
| Electrostatic beam deflection scanner and beam deflection scanning method App 20080067404 - Tsukihara; Mitsukuni ; et al. | 2008-03-20 |
| Irradiation system with ion beam/charged particle beam Grant 7,315,034 - Yagita , et al. January 1, 2 | 2008-01-01 |
| Wafer charge compensation device and ion implantation system having the same Grant 7,304,319 - Kawaguchi , et al. December 4, 2 | 2007-12-04 |
| Beam space-charge compensation device and ion implantation system having the same Grant 7,276,711 - Kawaguchi , et al. October 2, 2 | 2007-10-02 |
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