Semba; Norio
Patent Applications and Registrations
Patent applications and USPTO patent grants for Semba; Norio.The latest application filed is for "treatment apparatus and treatment method".
- Semba; Norio - Kikuchi-gun JP
- Semba; Norio - Kumamoto JP
- Semba; Norio - Kumamoto-ken JP
| Patent | Date |
|---|---|
| Treatment apparatus and treatment method Grant 6,368,776 - Harada , et al. April 9, 2 | 2002-04-09 |
| Coating a resist film, with pretesting for particle contamination Grant 6,268,013 - Akimoto , et al. July 31, 2 | 2001-07-31 |
| Resist processing system having process solution deaeration mechanism Grant 6,217,657 - Kiba , et al. April 17, 2 | 2001-04-17 |
| Processing system Grant 6,133,981 - Semba October 17, 2 | 2000-10-17 |
| Resist processing apparatus Grant 6,033,475 - Hasebe , et al. March 7, 2 | 2000-03-07 |
| Liquid supplying device Grant 6,015,066 - Kimura , et al. January 18, 2 | 2000-01-18 |
| Method and apparatus for coating a film on an object being processed Grant 5,938,847 - Akimoto , et al. August 17, 1 | 1999-08-17 |
| Resist processing method and resist processing system Grant 5,866,307 - Kiba , et al. February 2, 1 | 1999-02-02 |
| Method for developing treatment Grant 5,854,953 - Semba December 29, 1 | 1998-12-29 |
| Substrate processing system Grant 5,826,129 - Hasebe , et al. October 20, 1 | 1998-10-20 |
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