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Patent applications and USPTO patent grants for Seligson; Joel L..The latest application filed is for "optics symmetrization for metrology".
Patent | Date |
---|---|
Optics symmetrization for metrology Grant 9,164,397 - Manassen , et al. October 20, 2 | 2015-10-20 |
Optics Symmetrization For Metrology App 20120033226 - Manassen; Amnon ;   et al. | 2012-02-09 |
Apparatus and methods for determining overlay and uses of same Grant 7,876,438 - Ghinovker , et al. January 25, 2 | 2011-01-25 |
Apparatus and Methods for Determining Overlay and Uses of Same App 20100005442 - Ghinovker; Mark ;   et al. | 2010-01-07 |
Apparatus and methods for determining overlay and uses of same Grant 7,608,468 - Ghinovker , et al. October 27, 2 | 2009-10-27 |
Order selected overlay metrology Grant 7,528,941 - Kandel , et al. May 5, 2 | 2009-05-05 |
Continuously varying offset mark and methods of determining overlay Grant 7,440,105 - Adel , et al. October 21, 2 | 2008-10-21 |
Use of overlay diagnostics for enhanced automatic process control Grant 7,310,789 - Seligson , et al. December 18, 2 | 2007-12-18 |
Order Selected Overlay Metrology App 20070279630 - Kandel; Daniel ;   et al. | 2007-12-06 |
Use of overlay diagnostics for enhanced automatic process control App 20060280357 - Seligson; Joel L. ;   et al. | 2006-12-14 |
Use of overlay diagnostics for enhanced automatic process control Grant 7,111,256 - Seligson , et al. September 19, 2 | 2006-09-19 |
Continuously varying offset mark and methods of determining overlay App 20050195398 - Adel, Michael E. ;   et al. | 2005-09-08 |
Use of overlay diagnostics for enhanced automatic process control Grant 6,928,628 - Seligson , et al. August 9, 2 | 2005-08-09 |
Use of overlay diagnostics for enhanced automatic process control App 20040038455 - Seligson, Joel L. ;   et al. | 2004-02-26 |
Use of overlay diagnostics for enhanced automatic process control App 20040040003 - Seligson, Joel L. ;   et al. | 2004-02-26 |
Autofocusing apparatus and method for high resolution microscope system Grant 6,172,349 - Katz , et al. January 9, 2 | 2001-01-09 |
Imaging apparatus which includes a light-valve array having electrostatically deflectable elements Grant 4,805,038 - Seligson February 14, 1 | 1989-02-14 |
Imaging apparatus Grant 4,731,670 - Allen , et al. March 15, 1 | 1988-03-15 |
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