loadpatents
Patent applications and USPTO patent grants for Seligson; Joel.The latest application filed is for "structured illumination for contrast enhancement in overlay metrology".
Patent | Date |
---|---|
Structured illumination for contrast enhancement in overlay metrology Grant 10,274,425 - Seligson , et al. | 2019-04-30 |
Near field metrology Grant 10,261,014 - Sapiens , et al. | 2019-04-16 |
Compound objectives for imaging and scatterometry overlay Grant 10,139,528 - Seligson , et al. Nov | 2018-11-27 |
Structured Illumination for Contrast Enhancement in Overlay Metrology App 20170307523 - Seligson; Joel ;   et al. | 2017-10-26 |
Structured illumination for contrast enhancement in overlay metrology Grant 9,645,079 - Seligson , et al. May 9, 2 | 2017-05-09 |
Method and apparatus for lithographic mask production Grant 9,442,369 - Shur , et al. September 13, 2 | 2016-09-13 |
Structured Illumination for Contrast Enhancement in Overlay Metrology App 20160003735 - Seligson; Joel ;   et al. | 2016-01-07 |
Structured illumination for contrast enhancement in overlay metrology Grant 9,104,120 - Seligson , et al. August 11, 2 | 2015-08-11 |
Near Field Metrology App 20150198524 - Sapiens; Noam ;   et al. | 2015-07-16 |
Metrology systems and methods Grant 9,080,971 - Kandel , et al. July 14, 2 | 2015-07-14 |
Metrology Systems and Methods App 20150036142 - Kandel; Daniel ;   et al. | 2015-02-05 |
Flexible scatterometry metrology system and method Grant 8,908,175 - Kandel , et al. December 9, 2 | 2014-12-09 |
Discrete polarization scatterometry Grant 8,896,832 - Hill , et al. November 25, 2 | 2014-11-25 |
Metrology systems and methods Grant 8,873,054 - Kandel , et al. October 28, 2 | 2014-10-28 |
Illumination control Grant 8,681,413 - Manassen , et al. March 25, 2 | 2014-03-25 |
Overlay metrology by pupil phase analysis Grant 8,582,114 - Manassen , et al. November 12, 2 | 2013-11-12 |
Metrology Systems and Methods App 20130229661 - Kandel; Daniel ;   et al. | 2013-09-05 |
Metrology systems and methods Grant 8,441,639 - Kandel , et al. May 14, 2 | 2013-05-14 |
Overlay Metrology By Pupil Phase Analysis App 20130044331 - Manassen; Amnon ;   et al. | 2013-02-21 |
Illumination Control App 20120327503 - Manassen; Amnon ;   et al. | 2012-12-27 |
Structured Illumination For Contrast Enhancement In Overlay Metrology App 20120206729 - Seligson; Joel ;   et al. | 2012-08-16 |
Discrete Polarization Scatterometry App 20110310388 - Hill; Andrew V. ;   et al. | 2011-12-22 |
Metrology Systems And Methods App 20110069312 - Kandel; Daniel ;   et al. | 2011-03-24 |
Method and apparatus for increasing metrology or inspection tool throughput Grant 7,724,375 - Novikov , et al. May 25, 2 | 2010-05-25 |
Optical gain approach for enhancement of overlay and alignment systems performance Grant 7,602,491 - Kandel , et al. October 13, 2 | 2009-10-13 |
Optical Gain Approach For Enhancement Of Overlay And Alignment Systems Performance App 20080266561 - Kandel; Daniel ;   et al. | 2008-10-30 |
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