Patent | Date |
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Sliding material composition, sliding molded article, and sliding member Grant 11,370,986 - Sekine June 28, 2 | 2022-06-28 |
Sliding Material Composition, Sliding Molded Article, And Sliding Member App 20210324286 - SEKINE; Yoshiyuki | 2021-10-21 |
Computer readable medium and exposure method Grant 8,411,253 - Sekine , et al. April 2, 2 | 2013-04-02 |
Exposure apparatus and device manufacturing method Grant 8,027,025 - Sekine September 27, 2 | 2011-09-27 |
Computer Readable Medium And Exposure Method App 20100053580 - Sekine; Yoshiyuki ;   et al. | 2010-03-04 |
Projection optical system, exposure apparatus, device manufacturing method, and device manufactured by using the same Grant 7,511,888 - Sekine March 31, 2 | 2009-03-31 |
Exposure Apparatus And Device Manufacturing Method App 20090002667 - Sekine; Yoshiyuki | 2009-01-01 |
Maskless exposure apparatus using optical modulator, and method for monitoring pattern generating performance by the optical modulator Grant 7,430,036 - Sekine September 30, 2 | 2008-09-30 |
Interferometer and interferance measurement method Grant 7,106,455 - Suzuki , et al. September 12, 2 | 2006-09-12 |
Projection optical system and exposure apparatus having the same App 20060176461 - Sekine; Yoshiyuki | 2006-08-10 |
Maskless exposure apparatus using optical modulator, and method for monitoring pattern generating performance by the optical modulator App 20060066829 - Sekine; Yoshiyuki | 2006-03-30 |
Projection optical system, exposure apparatus, device manufacturing method, and device manufactured by using the same App 20050270648 - Sekine, Yoshiyuki | 2005-12-08 |
Method for correcting surface shape App 20040256047 - Sekine, Yoshiyuki | 2004-12-23 |
Optical unit having plural optical elements Grant 6,731,431 - Sekine May 4, 2 | 2004-05-04 |
Projection optical system with diffractive optical element Grant 6,600,606 - Sekine July 29, 2 | 2003-07-29 |
Optical Unit Having Plural Optical Elements App 20030043462 - SEKINE, YOSHIYUKI | 2003-03-06 |
Interferometer and interferance measurement method App 20030011783 - Suzuki, Akiyoshi ;   et al. | 2003-01-16 |
Illumination optical system and exposure apparatus having the same Grant 6,441,886 - Suzuki , et al. August 27, 2 | 2002-08-27 |
Illumination Optical System And Exposure Apparatus Having The Same App 20020015142 - SUZUKI, AKIYOSHI ;   et al. | 2002-02-07 |
Projection optical system with diffractive optical element App 20020008911 - Sekine, Yoshiyuki | 2002-01-24 |
Projection Exposure Apparatus And Device Manufacturing Method Including A Projection Optical System Having A Pair Of Diffractive Members App 20010048512 - SUZUKI, AKIYOSHI ;   et al. | 2001-12-06 |
Projection exposure apparatus and device manufacturing method including a projection optical system having a pair of diffractive members Grant 6,307,618 - Suzuki , et al. October 23, 2 | 2001-10-23 |
Apparatus and method for exposing a pattern on a ball-like device material Grant 6,097,472 - Tanaka , et al. August 1, 2 | 2000-08-01 |
Luminance signal generator with interpolation Grant 5,414,465 - Kodama , et al. May 9, 1 | 1995-05-09 |